MK (mm) Operating direction Piston area (cm2) RHC 1.0 0.7 0.5 0.3 80 56 40 24 0.8 R 12 6 MTS 110 77 55 33 1.1 H 150 105 75 45 1.5 R 16 8 CC 200 140 100 60 2 H 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Order Made 600 418 300 182 6 R Made to Order 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R Refer to the p.5.4-1 regarding made to order
In addition, 3 of the wiring types are available with IP65 enclosures. 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ5100--04 VQ5101--04 IP65 compatible Enclosure Individual wiring type
1 Silencers/Exhaust Cleaner Series AN/Series AMC Series Noise reduction Nominal filtration rating (Reference values) Oil mist removal ratio Standard type Low back pressure Compact and easy mounting Series AN00 100 m 150 m Page 5-10-2 30 dB (A) Compact type Space-saving compact type Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588
rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less
(Initial conditions) 200 0.05 32 SFE1 SFE3 Inlet pressure/Back pressure [MPa] 150 SFE5 0.04 25 100 SFE4 SFE7 95 20 0.03 50 10 0 0.02 0 100 200 300 400 500 600 700 800 Cylinder driving speed [mm/s] AN 0.01 AMC Example) Bore size: 32, Driving speed: 400 mm/s, Supply pressure: 0.5 MPaG 1. From the graph, exhaust flow rate is found to be 95 L/min (ANR). 2.
rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.
174 R134a 890 3 3/4 PDE260-S 1007 7.5 8.5 23.6 78.7 55.1 19.7 19.7 460/3/60 FLANGE 3 150 174 R134a 990 5 PDE310-S 1200 7.8 8.8 23.6 78.7 55.1 19.7 19.7 460/3/60 FLANGE 3 150 174 R134a 1060 5 PDE410-S 1483 13.5 15.0 27.6 78.7 68.8 19.7 21.3 460/3/60 FLANGE 4 150 174 R134a 1180 6 PDE510-S 1840 15.5 17.8 27.6 78.7 68.8 19.7 21.3 460/3/60 FLANGE 4 150 174 R134a 1200 8.5 PDE610-S 2400 20.0 22.8
Relay, PLC 100 V Reed switch Solid state switch PLC 100 V, 200 V Relay, PLC 12 V Yes Yes 24 V 2-wire Terminal conduit PLC 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) 5 V, 12 V 24 V IC circuit Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire Terminal conduit 5 V, 12 V Relay, PLC 12 V 3-wire (NPN
SFD100/200 AMG SFD200 only Rc 1/4 NPT 1/4 G 1/4 AFF Female thread SFD100/200 AM Different diameters for IN and OUT ports are Made to Order. For details, refer to page 326. AMD Relationship between Operating Temperature and Max.
mm/sec Cylinder stroke: 200 mm AQ The set pressure can be either fixed or variable.
Male thread Proper tightening torque Nm Width across flats mm Nominal size of adjustable angle wrench mm M5 10/32-UNF 1/6 turn after hand tightening 8 100 1/8 1/4 3/8 1/2 150 200 200 200 14 17 21 24 7 to 9 12 to 14 22 to 24 28 to 30 17 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK EUROPE SWEDEN SMC Pneumatics Sweden AB SWITZERLAND SMC Pneumatik AG.
For sub-plate style, mainfold type 40, 41, 41R, 42, 42R Port size E: Push-turn locking lever type 02: 1/4 port With sub-plate 01: 1/8 port With sub-plate Nil: Without sub-plate Body option Nil: Individual pilot exhaust style (With gasket and screws) Electrical entry Grommet L plug connector 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12 VDC/ 100, 110, 200, 220 VAC M plug connector DIN
Allowable power supply fluctuation: 3 phase 200 VAC +/-10% (50Hz); 3 phase 200 VAC to 220V +/-10% (60Hz) Power supply cable specification Prepare the power supply cables below. Power supply cable: 10AWG (5.5mm2 or greater), cable O.D.
200 Lower limit 100 100 Lower limit 0 0 10 20 30 40 0 10 20 30 40 0 Transfer speed [m/min] Transfer speed [m/min] RS2H63-30 The graphs indicate the values at normal temperature. (20 to 25C) = 0.2 = 0.1 1,000 900 800 700 600 500 400 300 200 100 0 1,000 900 800 700 600 500 400 300 200 100 0 Mass of transferred object m [kg] Mass of transferred object m [kg] 63 Operating range Upper limit
However under Japanese regulation, only MPa is available in Japan. -30 in.Hg to 100 psig 0 to 200 psig 0 to 1000 psig V Porting Configuration 1) Other range available.
No code 0 V3 L 1 H 2 4 No gauge port No pressure gauge Ports -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa Code Ports 2 ports 3 ports 2PW 3PW Porting Configuration e w q w q 1) Other range available.
V 2-wire PLC 12 V No 200 V or less 24V Terminal conduit Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indicator) 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.
S Z Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage R Lead wire length U 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm For AC voltage valves there is no S option.