Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

PF-OMN0009_C

* , *PVC PVC PVC () PVC PVC , -10No.PF-OMN0009CN-F PF3W5 48 () 3 A : 04 20 40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Operating: 0 to 50C, Stored: 10 to 60C (with no freezing and condensation) Resistance Operating or Stored: 35 to 85%RH (with no condensation) 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs., whichever is smaller.

VQZ100V-OMT0001

/VQZ 95 95 95 95 ,N.O. ,N.O. ,N.O. ,N.O. 3 5 3 4(A)5 4(A)2B 1 1 1 1 1 1 1 1 2 2 2 2 0 0 0 0 2 2 2 2 0 0 0 0 3 3 3 3 1 1 1 1 3 3 3 3 1 1 1 1 5 2 3 () () () (3 ) 5 3 NL R LED R 2(B),CM 10 No.VQZ100V-OMT0001 VQZ Series/ / / / DIN DIN DIN DIN DIN DIN 0.30.4Nm VQZ100 VQZ100 VQZ100 VQZ100 300 300 300 300 VQZ200 VQZ200 VQZ200 VQZ200 VQZ1000/2000 VQZ1000/2000 VQZ1000/2000 VQZ1000/2000

Regulator for 2 MPa ARX 20

400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 Flow rate l/min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure characteristics

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 16

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, 3-POSITION, ACTUATOR, RZQ 3-POSITION CYLINDER, MC, 40MM RZQ OTHERS (COMBO), 3.08647 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, 3-POSITION, ACTUATOR, RZQ 3-POSITION CYLINDER, MC, 40MM RZQ OTHERS (COMBO), 3.08647 lb

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

9 8 7 6 5 4 3 2 1 310 600 281 571 252 542 223 513 194 484 165 455 136 426 107 397 78 368 L1 L2 L3 L4 L5 49 339 300 590 271 561 242 532 213 503 184 474 155 445 126 416 97 387 68 358 39 329 337.5 625 300 587.5 275 562.5 250 537.5 212.5 500 187.5 475 162.5 450 137.5 425 100 387.5 75 362.5 348 635.5 310.5 598 285.5 573 260.5 548 223 510.5 198 485.5 173 460.5 148 435.5 110.5 398 85.5 373 298.8

Made to Order Specifications:

Specifications AFF11B to 75B Applicable model AFF2B to 37B Applicable model Refer to How to Order for standard specifications on page 14-20-10. Refer to How to Order for standard specifications on page 14-20-10.

2.0

Inscribed number 3 3 x 1 3 3A 1/8" x 1/16" 4 4 x 2 4 4A 5/32" x 1/32" 6 6 x 4 6 6A 1/4" x 1/8" KO Plug connector, Without connector G (Option) Grommet, 300 mm y Lead wire length Nil 300 mm 6 600 mm 10 1000 mm The plug connector is included but does not come assembled.

90

-l01 G43-10-l01 G43-10-l01 Refer to pages 427 and 430 for details of the modular applicable products and accessories.

PSxx-OMG0001CN

DC1224 V DC1224 V 8 DC(+) DC(-) DC1224 V DC1224 V DC(+) 9 DC(-) / / 10 ( ) 11 / 5m / 12 2030 20 -28No.PS-OMG0001CN-H No.

IDX-OM-U022

ON OFF 2 3 4 6 1 2 4 8 5 10 0.5 ON:SEC OFF:MIN 0.5 IDFA100F150F 4 4 4.2 IDX-OM-U022 5. 5.1 3 ON OFF (R) OFFON 3 2 R T 5.2 60cm 1 5.2 5.2 10% 5.2 IDFA100F150F 5 1 5.1 IDX-OM-U022 5. ( ) ( ) 60cm 1 10% 3 ( ) 60cm 1 2 INOUT INOUT () IDFA100F150F 5 2 5.1 IDX-OM-U022 5. 5.2 1-3 5.1 3.7 OFF () ON OFF ON IDFA100F150F 5 3 5.2 IDX-OM-U022 5. 5.3 R () OFF OFF OFF ON

3 Way,3 Port Solenoid Valve NVZ Series

R Pod 20 stations lf there are more than 10 stations, exhaust from both sides of manifold. .In cas of NVZ120 manifold type, Supply air to "R" port of manitold base. ''P" port of maniljold base will be the exhaust port. NW4Zl-'?jjD 1 -? o*, "."o"oo 2 stations Top ported NW4Z1-20-91 F: With mounting 20 stations lfthe.e ale fiors lhan 10 stdions, xhaust from both sides of lnanilold.

NVZseies

R Pod 20 stations lf there are more than 10 stations, exhaust from both sides of manifold. .In cas of NVZ120 manifold type, Supply air to "R" port of manitold base. ''P" port of maniljold base will be the exhaust port. NW4Zl-'?jjD 1 -? o*, "."o"oo 2 stations Top ported NW4Z1-20-91 F: With mounting 20 stations lfthe.e ale fiors lhan 10 stdions, xhaust from both sides of lnanilold.

3 Way Direct Acting NVKF 300 Series

llmb0nilm $ffh$ IUUff 300 Electrical entry Grommet Lead wire length: 12inch (300mm) ' (H) Grommet lype with 24 inch leads is also available. Specialorder only. Port size lll5 10-32 Nom. (M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

NVKF

Port size lll5 10-32 Nom. (M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

High Speed Pilot Operated

L 35 10 Cable length (L) Part no. 300 mm V100-49-1-1 500 mm V100-49-1-2 1000 mm V100-49-1-3 2000 mm V100-49-1-4 3000 mm V100-49-1-5 4000 mm V100-49-1-6 5000 mm V100-49-1-7 Sheath O.D. 3.4 mm Cover diameter 1.16 mm Conductor area 0.16 mm2 Surge Voltage Suppressor 33.9 2.3 MWith power-saving circuit (PWM circuit built-in type, non-polar type) The power consumption has been reduced to approx