Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L8 = 16n + 118.5 100 Drawing shows a SC case.

Information

63 84 30 8 44 22 14 60 77 60 11 M10 x 20 L 75, 100 10 to 50 91.5 CQ-C080 80 101.5 38 10 56 28 18 77 98 70 13.5 M12 x 30L 75, 100 101.5 10 to 50 110 120 CQ-C100 100 120 45 13 67 32 22 94 117 70 13.5 M12 x 30L 75, 100 The double clevis pin and retaining ring are not included.

PF-OMM0004_C

] =00 = ON EEPROM 100 +100 OFF GND 30 msec. 1 [ooo] 1 [ooo] [F20] [iNP] [iNP][-] [-] [F20] -47No.PF-OMM0004-D [F22] 5 V20 mA [F22] [AnA] [AnA][-] [F22] -48No.PF-OMM0004-D OFF ON 5 V 20 mA 10% [F22] -49No.PF-OMM0004-D [F30] OFF 2 5 100 24 5 5 100 500 9.5 2 2 100 200 3.8 [F30] [SAVE] [F30] 2 5 OFF OFF 2 5 B -50No.PF-OMM0004-D [F80] 12% 30 ON [F80] [dSP] [F80] ON 30 OFF

DOC1020530

Target position: 100.000[mm] (=10 [m] = 186A0h) Target speed: 100[r/min] (=10 [0.01r/min] = 2710h) Acceleration time constant: 100 [ms] (= 64h) Deceleration time constant: 100 [ms] (= 64h) The setup value is as follows.

MXU

35 8-3-7 8 Series MXU Dimensions: MXU16 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8

MXU

35 8-3-7 8 Series MXU Dimensions: MXU16 (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10) MX MTS MY CY MG CX MXU16 (16) D-X With auto switch 20Data Component Parts No. q Note Hard anodized No. !

Thermo-chiller

Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series How to Order HRL A 20 100 Power supply Cooling capacity CH1 CH2 100 9 kW 1 kW 200 19 kW 1 kW 300 26 kW 1 kW 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Cooling method A Air-cooled refrigeration Specications

VCW

N.O. 100 Electrical Terminology 1. Surge voltage A high voltage which is momentarily generated in the shut-off unit by shutting off the power. VCW 7 Cv=1.38 3 4 VCW 10 Cv=2.1 3 4 VCW4 5 Cv=0.85 VCW2 2 Cv=0.16 10 Flow rate Ql /min 5.0 Other 1. Materials NBR: Nitrile rubber FKM: Fluoro rubber Trade names: Viton, Dai-el, etc.

NVEPA|VEFseies

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

Soft Start-up Valve

Without light SY100-61-1 With light Rated voltage Voltage symbol Part number 24 VDC 24 V SY100-61-3-05 12 VDC 12 V SY100-61-3-06 100 VAC 100 V SY100-61-2-01 200 VAC 200 V SY100-61-2-02 110 VAC 110 V SY100-61-2-03 220 VAC 220 V SY100-61-2-04 Without light SY100-82-1 Caution With light Rated voltage Voltage symbol Part number 24 VDC 24 VN SY100-82-3-05 12 VDC 12 VN SY100-82-3-06 100

Compact Cylinder with Air Cushion and Lock Series RLQ

RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 90 95 100 110 120 145 170 100 105 110 120 130 155 180 120 130 140 165 190 125 135 145 170 195 Mounting bolt 8 C Spring washer D Note) When mounting 50 to 63 cylinders from the rod side, be sure to use the attached flat washers because the bearing surface is limited. 9 13.5 12.5

3

Display can be rotated in increments of 45 to suit the installation conditions. Easy operation, improved visibility.

PFxx-OMP0001CN

500] 500 L/min(PFMB7102) [F 1][oU1] [1000] 1000 L/min(PFMB7202) 28 [ 25] 25 L/min(PFMB7501) [H_1] OUT1 [ 50] 50 L/min(PFMB7102) [100] 100 L/min(PFMB7202) [CoL] OUT1 [SoG] ONOFF [oU2] OUT2 2 [HYS] [2ot] OUT2 2 [2_P] [ 250] 250 L/min(PFMB7501) 2 [P_2] OUT2 [ 500] 500 L/min(PFMB7102) [F 2][oU2] 36 [1000] 1000 L/min(PFMB7202) [ 25] 25 L/min(PFMB7501) 2 [H_2] OUT2 [ 50] 50 L/min(PFMB7102) [100

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Load N 12 12 12 L = 100mm L = 100mm L = 100mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load N 0 50 100 150 Load N 0 50 100 150 Load N 200 16 16 16 L = 120mm L = 120mm L = 120mm MXP16

3 Port Solenoid Valve SYJ300/500/700 Series

Body ported type M5 0.8 3.6 (0.2) 43 45 SYJ522 N.O. SYJ514 N.C. Base mounted type (With sub-plate) 57 (Without sub-plate 43) 59 (Without sub-plate 45) 1/8 NPTF 4.5 (0.25) SYJ524 N.O.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

VCHC ASD230FG ASD330FG ASD430FG ASR ASQ 100 200 400 07,08,09,10,11 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 300 06 200 50 100 100 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530FG ASD630FG ASD530FG ASD630FG 1500 1000 10,11 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 10,11,12 08,09 1000 500 06,07

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

60 90 75 40 60 Suction flow 45 20 30 15 0 0 20 40 60 80 100 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow [L/min(ANR)] Supply pressure [MPa] 256 Vacuum Pad with Ejector ZHP Series Construction A-A Component Parts t !

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping

JXCx-OMT0028CN

500 100 500 1 1 200 1000 200 1000 2 2 A-miniB type 50 200 50 200 3 3 CN2 CN2TB/PC 27 - 6.CN4 6.1 No.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Standard strokes (mm) Bore sizes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 50, 63 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Example) For CQ2XB40-57D, an 18mm spacer is installed inside a standard stroke CQ2XB40-75D cylinder. Specific Product Precautions Be sure to read before handling. Refer to pages 15 to 24 for safety instructions and precautions.