Swivels

Performance Data S Series Swivel (1/4", 3/8", 1/2", 3/4") Test Fluid: Oil 150 SUS vs. Pressure Drop 40 35 3/8" Features 3/4" 1/2" 30 3000 psi working pressure rating for all sizes. D Swivels Pressure Drop in PSID Variety of seal options. 25 Torque value does not significantly increase with pressure.

AC Servo Motor Driver (Pulse input type)

No Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 65536 32768 65536 32768 65536 32768 Electronic gear denominator *3 PA07 1 150 75 75 150 75 75 250 125 125 200 100 50 Regenerative option PA02 0 0 (Non)/ 0002 (LEC-MR-RB-032) 1 1 0 0 Rotation direction selection *4 PA14 0 (+Counter (+Counter (+Counter (+Counter

OMR0031

For a longer reset input time, the processing time takes approximately 150 ms from startup of the reset signal, and this will increase the total reset processing time. If the table moves before the counter reset process is complete, the display value of the multicounter may be shifted.

AP10PA

Pneumatic Actuation Pressure Regulator Low flow Series AP10PA Actuation control pressure isolated from process gas by two seals Body material: 316L SS secondary remelt High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (Option): to 120 slpm Ni-Cr-Mo alloy internals available for corrosion resistance 100 psig (0.69 MPa) outlet pressure achievable with 80

Booster Regulator Series VBA1110 to 4200 1

Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Valve Solenoid Max.operating frequency 20Hz 5Hz Individual EXH Pilot valve EXH Not required Lubrication Non-locking push style/Locking slotted style Manual override (2) 150/30 m/s2 Shock/Vibration resistance Dust proof Enclosure 12V, 24V DC 100V, 110V, 200V, 220V AC 10% of rated voltage Coil rated voltage Allowable voltage Class B Coil insurance 1W DC (42mA), 0.5W DC (21mA) 24V DC 1W DC (

q"s

Relief flotv characledstics suppry pressurc: i .0 r pa Pressure characteiistics sei plessu:0.4 Mpa Flow characteristics supp y pGssure: 1.0 M Pa 1 0.9 0.8 d : 0 . 7 0 6 0 .s 'rt E o.+ 0 0.1 0.0 0.0" " " o 50 100 150 200 250 300 o 1 0.6 0.8 1 1.2 Supply pfessure (lvlPa) 50 100 150 200 250 Frow rale (4min (ANB)) Series lTV205n Hysteresis Linearity Repeatability 0.9 0.8 o.7 ii 0.6 3 o.s : 0.4

IIIIIII

Supplv Pressure 220 PSIG (15 Kqflcmz) Operating Pressure 22-150 PS|G (1.5-9.9 Kqf/cm2) 15-150 PS|G (1-9.9 Kqf/cm2) Ooeratino TemDerature 40-140'F (5-60'C) Bodv Aluminum Die Cast Spool & Sleeve 440F Stainless Steel, passivated & heat treated to 58-63 Rockwell C. Sleeve O-Rinqs Buna N Soacer Delrin Shock Pad Urethane Rubber Max. Cycle Rate 300 cPM Weight (Valve Body Only) oz.

Vacuum

Flat with rib 1 0 12 29.9 46 80 91 1 . 7 1 5 12 29.9 46 57 80 9 1 3 1 . 8 1 8 t25 21.5n4 465 30.5 Deep type '5132" tube may be substituted lor 4mm (Check leakage) I t o IPR $enies ffitlr Buflen lnimen Pad Diameters s20 . a25. o32 Pad Diameters @4O. sso Flat type Deep typeZPB2SD only Deep typeIZPR4oD only ) Flat type. Flat with rib Flat type .

VXR21/22/23

(90) 82 (92) M 67 (74) 80 (90) 82 (92) N M 67 (74) 80 (90) 82 (92) Normally open Normally closed VXR215006 04 06 04 VXR2152, 1 1 VXR2262-10 VXR2272-12 80 90 125 101 (112) 119 (136) 126 (143) 18 32.5 36.5 43.5 46.5 52 36 36 42 53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5 23 25.5 41.5 1 4 1 2 62 97 64 50 93

Vacuum

Flat with rib 1 0 12 29.9 46 80 91 1 . 7 1 5 12 29.9 46 57 80 9 1 3 1 . 8 1 8 t25 21.5n4 465 30.5 Deep type '5132" tube may be substituted lor 4mm (Check leakage) I t o IPR $enies ffitlr Buflen lnimens Pad Diameters s20 . a25. o32 Pad Diameters @4O. sso Flat type Deep typeZPB2SD only Deep typeIZPR4oD only Flat type. Flat with rib Flat type .

Clean Regulator/Fluororesin Type

Pilot port Rc, NPT 1/8 12 R 132 100 42.3 91 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 OUT IN 100 6 HEX.35 (178) With nut 80 Pilot port Rc, NPT 1/8 12 R 132 100 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 100 SRF50 19 Model A1 A2 B1 B2 OUT IN SRF50S-1S19 SRF50S-1S1925 SRF50S-1S25 SRF50S-1S2519 SRF50S-2S19 42.3 91 58 91 58 91 55 98 55 98 55 98 A1 A2 58 91 6 B1 B2 56 95 56 95 Tube extensions 80

Modular Type Lubricators Series AL

How to Order AL800 AL 23 80 12 0 R AL900 Semi-standard R Flow direction: Right Left Body size Port size Semi-standard Lubricator 1 1S-1 1S-2 2 3 6 8 1000 cm3 tank 1000 cm3 tank with switch (Bottom limit ON) 1000 cm3 tank with switch (Bottom limit OFF) Metal bowl With drain cock Nylon bowl (Including sight dome) Metal bowl with level gauge Symbol 12 14 20 4 1 1 1 2 2 1 80 90 1 2 2 1 Thread

PFxx-OMO0007CN

NPN1 V (80 mA ) PNP1.5 V (80 mA ) 1 s 1F.S. 2F.S. 5F.S. 0 3 (3 digits) 50 ms 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse 5 L/pulse 5F.S. 3 7 OUT1ON OUT2ON DC1224 V10 () 150 mA 160 mA 170 mA -35No.PF-OMO0007CN PF2A710 PF2A750 PF2A711 PF2A721 PF2A751 IP65 050 -2585 () 3585R.H.() 3F.S.(1535 )5F.S.(050 ) AC1000 V1 50 M(DC500 V ) CERoHS (RcNPTG) 1/81/4 3/8 1/2 ADCNBRSUSPBTPtlrFeNiOFC

LFE-OMY0008

mA OUT1 (OUT2)80 mA OUT2 20%F.S. 1 [F34] 1F.S.

XL-OMY0003

XLH-25 XLH-40 XLH-50 AC90240V XLA25-60S-1 XLA25-60S-1 1 1 H4 AC100V 200/40 200/50 / AC200V 800/40 800/50 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 1 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 30 ( 7 XL-OMY0003 . <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) <

SL5200

100 Flow rate (slpm, N2) 0 40 80 120 160 200 240 280 320 Flow rate (slpm, N2) ) If connection size differs, flow characteristics also differ.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

For 90 rotation Single vane (S): 80 to 100 adjustable Adjustment range of adjustment bolt (A) Adjustment range of adjustment bolt (B) 180 10 10 22.5 Allowable radial load (N) Size Allowable thrust load (N) Positioning pin hole 20 1 15 40 3 30 50 7 60 Adjustment bolt (A) Adjustment bolt (B) 60 20 80 Single vane (S): 170 to 190 adjustable For 180 rotation 11-5-6 6 Series MSUA Rotary Table:

Flow Control Equipment

Effective area is larger than the former model. 6, 10, 16, 20 AS1001F 20, 25, 32 AS2001F 20, 25, 32, 40 AS2051F 40, 50, 63 AS3001F Application to inch size tubing 63, 80, 100 AS4001F Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Note) : Nickel plated model is standard.