Please contact SMC. 95 Process Gas Equipment / Regulator Specific Product Precautions Be sure to read before handling. Refer to back cover for Safety Instructions and P. 145 and 146 and the Operation Manual for common precautions. Operation manual is available from the SMC web site. http://www.smcworld.com Selection Warning Maintenance Warning 1. Confirm the specifications.
Please contact SMC. 95 Process Gas Equipment / Back Pressure Regulator Specific Product Precautions AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Be sure to read before handling.
Valve type Table 1 CE-compliant Applicable model CE marking applicable standard EMC Directive 2004/108/EC Low Voltage Directive 2006/95/EC CCV-D1172 A Valve Unit CCVS/CCVL Series Solenoid Valve Specifications of Combined Valve (Stop valve/Skip valve) Applicable Converter Solenoid Valve Function Plate N.C. N.O.
:; HS 71 .5 77 84 1.5 0 1.5 A 24.5 23 24.5 B DA4 type o 82.5 95 ~ H s 88 c==._~M~a~jo~r~D~im~e~n~s~io~n~s~_ ___ (mm) Clamp Cylinder: Series CK1 SpCpd controller Cushion valve N s-t-Strok.e ___ _ -, ...!t ,r' M -1 6X 1. 5 \ ~~-.~. . I~r ~ 1~ -~ -~t l -,? ~ . ~ I 'S " .. ! /'Vvf..>---'---r-'-~ /i . -l ,~ -0 I .. .i ~ l d1h across flatsl]" 4M6 Screw depth 1 3 ~J:"!
CKZ3N -X2742A -X2568 Dimensions: Base Type Rubber cover type XC XB R RR RA (Dual arm) RB (Right arm) RC (Left arm) Release point Pivot point with square flats Nh9 RW L LA0.1 LB PD0.05 PB0.02 E PC0.05 PA0.02 GB GA C 2 x 2 x P H7 depth D 2 x 2 x MM depth J 2 x 2 x NPT 1/4 G Rc Hexagon socket head plug RD B [mm] Bore size B C D E GA GB J L LA LB MM N P Rubber cover Metal cover 50 92 48 12 13.7 95
XC Nh9 R NA0.02 NC RW LB For Asia For North America For Europe For France Special NB0.05 PD0.05 VC0.1 VB0.1 VD0.05 PA0.02 PC0.05 GC +0.1 K 0 PB0.02 GA GB VF LA0.1 VA0.02 C VE L 2 x 2 x P H7 depth D 2 x V H7 depth I 4 x NN depth S N 2 x NPT 1/4 G 2 x 2 x MM depth J Hexagon socket head plug 2 x NPT 1/4 G E B RB (mm) Bore size (mm) 50 63 80 C D E GA GB GC I J K L LA LB MM N NA NB NC NN P B 95
Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89 80 85 90 95
CDQSB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQSB12-5D -10D -15D -20D -25D -30D CDQSB16-5D -10D -15D -20D -25D -30D CDQSB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D 40 45 50 55 60 65 40 45 50 55 60 65 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95
0.8 (Finger closing port) M5 x 0.8 (Finger opening port) 6.5 H 4 x M6 x 1 (Piston rod thread and rack thread) 22.6 2 x M5 x 0.8 Vacuum port 8 0.5 10 11 11 8 8 9 16.5 20.5 11 O S 39 19 K (58) 15 25 19 19 9 4 4 9 25 When open F 13 13 43 4 x M5 x 0.8 through (Thread for mounting attachment) When open G (mm) J 26 50 70 H 144 216 256 G 114 186 226 F 84 126 146 E 28 58 78 D 76 106 126 B C 45 75 95
Stroke Against Lateral Load D 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 50 33 43 49 53 0.3 10 23 31 36 39 T 0.5 REC40 REC32 REC25 REC20 5 18 25 29 31 0.7 2 Rod side flange style: F Head side flange style: G 182 167 148 118 Foot style: L 0.3 1 L 140 128 114 90 0.5 0.5 W W W F REA 117 108 95
CRB2 Counter-clockwise A port Positioning pin hole 5 Adjustment bolt A CRB1 (For counter-clockwise rotation end adjustment) 22 95 .5 e MSU ng Adjustment bolt B ra t (For clockwise rotation end adjustment) en CRJ tm se wi us ck dj a lo CRA1 -c nd B port er se Clockwise e nt wi on Cl ck u lo o oc C ad ti CRQ2 C ta 90 k ju ro wi st 1 se m r ge en ot With Adjustment Bolt at t r an io n an
4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 VFN L2 Body ported (Top ported) Type 21 Manifold Grommet: G DIN terminal: D VV5K3-21Station (P port) (P port) n1 = Number of VK3000 n2 = Number of VK300 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95
.10 74.1 70.9 Manual override (Non-locking) Pg7 2 x 4.5 (Mounting hole) n2 x Rc1/8 (A port) 11 2B 4A 2A 2B VV061 38 4A 2A 19 VV100 3 (Pitch) 2 x Rc1/8 2 x Rc1/8 V100 (P port) (P port) 2n1 x Rc 1/8 (A,Bport) (Lead wire length) S070 n1 = Number of VK3000 n2 = Number of VK300 ~ = 300 VQD VQD-V VK VK 2n x M5 x 0.8 (R1, R2 port) (Pitch) VT L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95
Push button Cover for push button 3410701-R 3410703 (White only) Color Red 3410701-B Black 3410701-G Green 2348 2/3 Port Mechanical Valve New New RoHS Lightweight 60 g 90 g (Conventional model: 95 g) VM100 Side ported (Conventional model: 111 g) VM200 Bottom ported Side ported, basic type Mounting interchangeable with the conventional model Available in vacuum applications (VM100) 100
H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port
Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N
Center of F.R.L. body A D Silencer Compact resin type High noise reduction type B B A A Dimensions [mm] Model Port size R Dimensions [mm] A B AN302-03 3/8 84 28 AN402-04 1/2 95 34 Model Port size R A B AN30-03 3/8 58.5 20 AN40-04 1/2 68 24 3 Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve VP500/700 Series Dimensions VP517 Surge voltage suppressor (for D YS, D YZ) Manual
mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting a b d e f g h i j VXS23 1/4, 3/8 21 57 28.5 87.5 35 10.5 22 40 35 10 M5 56 75 2.3 30 6.5 10.5 31 37 VXS24 1/2 28 70 37.5 94 35 14 22 48 35 14 M5 56 75 2.3 34 6.5 10.5 35 41 VXS25 3/4 33.5 71 38.5 105.5 40 17 24.5 62 33 15.2 M6 70.5 92 2.3 39 6.5 10.5 43 46 VXS26 1 42 95
1000 Ambient temperature 5 to 60C Piston rod size 30 mm 0 0.5 0.4 0.3 0.2 0.1 Weight 28 kg 35 kg Supply pressure [MPa] W-R3-SProximity Switch Specifications/Maker: OMRON Corporation 4000 Model E2E-X7D1-M1J-T10.3M Clamping force [N] Voltage range 10 to 30 VDC {Allowable ripple: 10% or less (P-P)} 3000 Temperature range 25 to 70C (with no freezing or condensation) 2000 Humidity range 35 to 95%
Specifications Fluid Note 1) Air, Nitrogen 100 to 0 kPa Max. 0.5 MPa (Unable to hold when pressurized) 5 to 60C 30 m (Filtration efficiency 95%) 20 kPa Operating pressure range Vacuum release pressure Operating and ambient temperature range Filtration accuracy Element replacement differential pressure Max. 10 station manifold is possible.