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Replacement part . 42 6-3. Maintenance . 42 1 - Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

For details, refer to page 9-15-42. 9-8-22

58 45 30 32 9 +0.2 +0.1 23 2 34H9 +0.062 depth 4 0 27 30 4 x M6 x 1 thread depth 7 Rc 1/8 (G1/8, NPT1/8) (Finger closing port) 45 (Thread for mounting attachment) Auto Switch Mounting Groove Dimensions 32.9 20 20 51 11 11 Rc 1/8 (G1/8, NPT1/8) (Finger opening port) 25 13 MHW2-32D1 5 Right angle finger type 6.45 5.5 44 21 14 20 7 18 27 4 x M6 x 1 through (Thread for mounting attachment) 34

1, @2 and @6 each. 12 MXY12-PS 8-9-11 11 Series MXY Dimensions 2-M5 x 0.8 Piping port J + Stroke Same in case of the type of centralized piping on one side without switch rail ( ) JH Piping port (Plug: M-5P) 2-M5 x 0.8 (Plug: M-5P) 2-M5 x 0.8 Piping port FL 21 21 FH 2-M thread depth MM +0.03 0 Width across flats MB (lock plate fixing bolt) R 4-M thread depth MM PR RL PR +0.03 0 MA (Stroke

LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N NPT1/8 2 01F G1/8 M5 M50.8 M50.8 M-5P ZB03 ZB04 ZB05 ZB06 PV N.C.

No.PS-OMM0002CN-F / / ZSE80(F) ISE80(H) 2 9 10 11 14 14 16 17 19 19 21 21 21 F0 23 F1 OUT1 24 F2 OUT2 27 F3 27 F4 / 28 F5 30 F7 31 F8 32 F9 34 F10 35 F98 36 F99 38 39 42 42 43 50 50 52 -1No.PS-OMM0002CN-F (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems.

11 Series IR1000/2000/3000 Series IR3000 Flow Characteristics Relief Characteristics Pressure Characteristics Testing methods conform to JIS B 8372.

Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C./N.O. 1/8 to 3/4 0 to 3 (1) 17-2-57 VV2CW2/3/4 N.C./N.O.

Material Valve 9 143145 NBR/Brass Spring 10 143146 Stainless steel Valve 8 NBR 14283 143022 O-ring 11 143147 NBR Spring 9 Stainless steel 14282 143023 Cross-recessed head cap screw 12 Note) AA00241 Steel wire Cross-recessed head cap screw 10 AA00241 AA00058 O-ring 11 14284 NBR 143021 Note) AS2000E: Stainless steel, AS3000E: Steel wire. 663 ASE Series Dimensions AS2000E/3000E 2 x port size

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 3 25 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 50 7 2B Flange 634 Steam Valve: 2 Port Valve For SteamVND Series Model Port size Flow rate characteristics Weight (kg) Orifice dia.

0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port w !2 !6 !4 !

R Right side parallel L Left side parallel Symbol LEKFS25 LEKFS32 LEKFS40 H 20 24 30 A 12 16 20 B 6 8 10 E Battery-less absolute (Step motor 24 VDC) y Motor option t Stroke*1 u Actuator cable type/length Robotic cable [m] Nil None R8 8*2 R1 1.5 RA 10*2 R3 3 RB 15*2 R5 5 RC 20*2 Nil Without option B With lock Size Stroke 100 200 300 400 500 600 25 V V V V V 32 V V V V V 40 V V V V V 11

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 15. In locations where strong impacts or vibrations occur. 16.

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

18 16 24 43 47 40 79 87 85 2.8 5/32 12.7 2.8 6.5 6.5 6.5 11.11 13.6 1/4 H 14.29 17 M 14.29 5/16 18.5 A 14 42 L 17.46 54.2 47.2 49.2 60.5 54.5 17.46 24 3/8 21 22.23 34 1/2 22.23 22 Connection thread Reference dimension after screwing into NPT threads.

Pg9 Rc 1/4 Pilot EXH 2-Rc 1/8 (External pilot port) (Mounting hole) 2-8.5 EXH 205.1 196.1 PA PE 156 103 119 112 93 IN EXH OUT 65 62 42 42 25 (EXH port) Rc 3/4 (IN, OUT port) 2-Rc 3/8, 1/2, 3/4 36 71 36 When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned at left, when looking at the EXH port in the front face.

AirlLiq' 3-5 6-8 9-11 11-12 NVFM 250 Mech. Actuated/ Pilot Operated Cv 1.0 13-17 NVZM 450 Mech. Actuated/ Pilot Operated Cv 0.55 13; 18-20 Materials Body Aluminum DieCast Spool, Stem, Spring Stainless Steel Seals & Poppets Buna N Weaqhtoz.

M1 L M2 D 4 KCH04-00 KCH06-00 KCH08-00 KCH10-00 KCH12-00 42.1 45.8 52.8 59.8 63.5 10.4 12.8 15.2 18.5 20.9 2.6 6.8 16.2 25.6 35.4 18 19 21.5 24 25.5 16 17 18.5 21 22 2.6 6.8 13.1 20.4 30.4 5 8 11 18 24 6 8 10 12 Note) D: max. diameter Straight plug for frequent use: KCH Applicable tube O.D.

3. 1 Test operation using a computer (Step data operation) . 11 3. 2 Test operation using a computer (Continuous operation) 13 4Start up procedureOperation by PLC . 15 41 Wiring . 15 42 Parallel I/O connection check . 18 43 Timing diagram (Example) . 19 44 Monitor mode . 20 2 - LAT3 Series/Card Motor 1.

(Nm) L(mm) MHM-16D M6x1 5.2 11.5 MHM-25D M8x1.25 12.5 12.4 MHM-32D M10x1.5 24.5 13.5 MHM-50D M12x1.75 42 16 3.