High Vacuum Angle Valve, XL Series

XLCV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L With single solenoid Port P (pressure port) (mm) N 3 3 3 3 6.5 6.5 M 6.5 6.5 6.5 6.5 11 11 L 9 9 9 9 11 11 K 14 16 29 42 32 45 P 17 15 2 6 Q Model XLCV-16 XLCV-25 XLCV-40 XLCV-50 XLCV-63 XLCV-80 16.5 16.5 17.5 17.5 29 29 Other dimensions are the same as XLA. 11 Series XLF Normally Clossed/O-ring Seal Air

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

39 (40) AS32l1FSl-U03-12 12 18.5 29.7 40 26.8 17 41 (42) AS42l1FSl-U04-10 10 1/2 24 (23.8) VCHC 3/8 19 16.6 55.4 54 50.2 48.8 ASR ASQ 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 60 (59) AS42l1FSl-U04-12 12 18.5 30.8 43.7 (43.6) 35.1 17 62 (61) AS42l1FSl-U04-16 16 23.8 34.8 47.7 (47.6) 32.7 20.6 66 (65) Note 1) Reference dimensions Note 2) Reference dimensions of threads

Round Type Hydraulic Cylinder

19 18 23.5 A 13.5 11.5 18.5 23 B 12.5 14.5 13.5 19 B 9 11 10 15.5 B 7 9 8 13.5 A 14 12 19 23.5 B 13 15 14 19.5 A 14.5 12.5 19.5 24 B 13.5 15.5 14.5 20 B 7.5 9.5 8.5 14 B 10.5 12.5 11.5 17 B 7 9 8 13.5 20 25 32 40 Note) When setting an auto switch, be sure to check its operation before adjusting.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

) 18.5 (17) 20 20 12.5 12.5 22.5 22.5 2026.5 (25) 20.5 (19) 28 22 20.5 14.5 24.5 30.5 34 (32.5) 23 (21.5) 36 24.5 28 17 27 38 Data 34 (32.5) 30 (28.5) 36 31.5 28 24 34 38 44 (42.5) 35 (33.5) 46 6.5 38 29 39 48 As for auto switch mounting dimensions, auto switch mounting method and its operating range, those are the same as basic type.

Ionizer

L KJH04-M5-X34 14 14 16 36 20 30 19 14 4 x M4 x 0.7 depth 5 (For mounting, opposite side: Same) 16 20 17 52 58 Emitter cartridge Maintenance detection level selection switch Frequency selection switch Balance adjustment trimmer n (Number of emitter cartridges), L Dimension, Weight Part no. n L (mm) IZS31-460--X10 IZS31-540--X10 IZS31-700--X10 IZS31-860--X10 IZS31-940--X10 IZS31-1020--X10

JXCx-OMT0028CN

065500 mm/s 5 L 6 H 7 4 2147483647 0.01mm 8 9 L 10 H 2 065500 mm/s2 11 L 12 H 2 065500 mm/s2 13 L H=L= (LECP6)(LECA6) 42 - Bit/Byte / Address ID No. 14 1 030 10% 15 1 030 10% 16 1 0255 mm/s ID1 17 1 030 10% 18 H 2 065500 0.01mm 19 L ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ID9 160179 ID1 ID10 180199 ID1 ID11 200219

CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

MY2HT-A16L MY2H-A16L X417 Combination Symbol Stroke adjusting unit Holder mounting bracket + Nil N Holder mounting bracket only Holder mounting bracket X416 X417 Holder mounting bracket 1 Holder mounting bracket 2 Stroke adjusting unit model Note) Refer to the options table of "How to Order" on page 1. 17

Sine Rodless Cylinder Series REBR Direct Mount Type

8 5 33 31.5 32 30 17 31 30 8.5 REBR25 12.5 9.5 5.2 3 1 27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8 REBR32 13 76 7 7 8.5

Aluminum High Vacuum Angle Valve

23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for models XLA, XLC, XLD, XLF, XLG and XLH.

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

(inch) Connection thread UNF NPT Min. port size Weight (g) A D1 D2 L M Model Applicable tubing Nylon Urethane KSH03-34S KSH03-32 9 14 17 23 23 29 55 63 8 10-32 UNF 36.5 37.6 38.6 42 43.1 46.5 53.5 53.9 33 34.5 35.5 36.5 40 41 48 48.5 16 2.5 5 32 10.4 4.0 4.0 12 1 8 12.7 KSH07-34S 14.29 17 1 8 1 4 13.4 10.4 4 13.2 1 4 14 KSH07-35S KSH09-34S KSH09-35S KSH11-35S KSH11-36S 1 8 18.5

SFOD-OMT0005CN

(P.52) 8.3 / 8.4 () JXC91 ( 12) (ON )No 13.3 (P.57) -31- 9 9.1 (1) Offset (Word) 0 1 2 () 3 () 4 5 6 () 7 () 8 12 9 34 10 11 12 13 14 15 16 17 -32- (2) Word0 Word Bit 0 OUT0 DRIVE OFF No. Bit No.

Angular Air Gripper Series MHC2/MHCA2/MHCM2

Note Main parts 16, 17, 18, 19 MHC6-PS Seal kit MHCA2-6 (Short body) Double acting/with fingers closed Single acting Double acting/with fingers open o i e q t !1 !6 w !0 r !4 u !5 !7 y !3 !2 Parts list No. Description Parts list No.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

thread H2 H N GA F Rc P Rc P 2-NN Width across flats B1 H1 D I 4-LD LH MM A K NC Width across flats NA Y X NB LT Y X S + Stroke LS + Stroke ZZ + Stroke LX LZ (mm) Effective thread length (mm) Stroke r-ange (mm) Bore size (mm) A B1 B2 D F GA GB H H1 H2 I K LD LH LS LT LX LZ MM N NA NB NC 20 to 800 18 13 26 10 16 12 8 41 5 8 30 5 7 25 121 5.5 40 55 M8 x 1.25 13 26 19 15 15.5 25 to 800 22 17

33

5.7 4.3/5.4 For option -T: 4.7/5.8 Rated power consumption (50/60 Hz) Note 3) kVA 0.58/0.74 For option -T: 0.66/0.82 0.73/0.86 For option -T: 0.81/0.94 0.85/1.02 For option -T: 0.93/1.10 Dimensions Note 8) mm W377 x D435 x H615 For option -T: W377 x D500 x H615 Accessories Fitting (for drain outlet) 1 pc., Operation Manual (for installation/operation) 1 Weight Note 9) kg 35 For option -T: 42

180

. 709 MHY2 Series Dimensions MHY2-25D 2 x M6 x 1 thread depth 10 Pin hole positioning (Mounting thread) 16 5 23 50 4H9 + 0.030 depth4 0 4 x M5 x 0.8 through (Thread for mounting attachment) 10 4 x M6 x 1 thread depth 12 12 0.005 0.025 (Mounting thread) 6 12 2 x 6.6 through 2 x M6 x 1 thread depth 12 22.5 (Mounting hole) (Mounting thread) (Limted area for mounting attachment) 46 58 45 45 42

A

3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5

Soft Start-up Valve AV2000/3000/4000/5000

3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5

SFOD-OMT0012

(1) Parallel I/O forced output . 42 4.8.