Soft Start-up Valve AV2000/3000/4000/5000 1

10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

ASP-X352

Body size Metric size Inch size 3 4 5 6 1/8 1/4 3/8 1/2 07 09 11 13 06 08 10 12 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 01 02 03 04 1/8 1/4 3/8 1/2 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-H7 D-G59F 5 5 5.5 6 7 7.5 8 7.5 D-B5/B6 BA -04 BA -05 BA -06 BA -08 BA -10 BA -32 BA -02 BA -01 CX D-G5NBL 35 40 45 45 45 40 50 45 D-G5/K5 D-B7/B8 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 BM1 -06 Since this is a guideline including hysteresis, not meant

KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

S Couplers Series KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

Nozzle Type Ionizer IZN10E Series ®

Nozzle Type Ionizer IZN10E Series How to Order Energy saving static neutralization nozzle 01 P IZN10E 06 Z B1 High flow rate nozzle Female threads for piping High frequency AC nozzle type Bracket Nozzle type Symbol Type Part no.

PFA/PFW

Panel adapter B ZS-22-02 Thread type Piping port size Rc NPT G Nil N F 01 02 1/8 1/4 Specifications PFA301-m PFA300-m Model Specifications Note 1) 1 to 10, 5 to 50l/min (0.04 to 0.35, 0.18 to 1.77SCFM) Flow rate range measurement & setting Minimum setting unit 1% of maximum flow rate range Model PFA510-m PFA550-m Real-time flow rate l/min, CFM x 10-2 Display units Measured fluids Dry air,

A

10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

VHS20/30/40/50

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

Soft Start-up Valve AV2000/3000/4000/5000

10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

/40-06/50 2-10 I 10 I G H F E X H .

Power Valve: Economy Valve Series VEX5

Basic type Select type Model VEX5504 06 10 VEX57-10 12 VEX59-14 20 P1 P1 VEX VEX Description Bracket (With bolt and washer) G46-10-01 VEX7-32A VEX5-32A VEX9-32A Air operated External pilot solenoid valve 3(R) 3(R) Pressure gauge 1(P) 3(R) 3(R) 1(P) P2 P2 P3 P1 P1 3(R) 3(R) 3(R) 3(R) 1(P) 1(P) P2 P2 Note) With this valve, the port 3(R) is a supply port and port 1(P) is an exhaust port. 2441

D. P. Lube ALD600/900 Series

Lube/ALD600-06 to 10, ALD900-12 to 20 Float switch mounting position (Connection port center) AL800 AL900 ALF ALT ALD ALD ALB (Connection port center) LMU F (Bracket mounting dimensions) ALIP AEP HEP Bracket (Option) Bracket dimensions A B C D E Model Port size F 344 416.5 G 32.5 0 H 95 120 J 14 14 K 55.5 48 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 175 250 87.5 125 487 639 135 210

Silencer Metal Case Type Series 25

Silencer Metal Case Type Series 25 How to Order Exhaust in only one direction Prevents scattering of mist and noise. 25 10 002 Port size Thread type Body size 002 003 004 006 010 1/4 3/8 1/2 3/4 1 R NPT Nil N 04 05 06 07 08 10 11 Specifications Max. operating pressure (1) Fluid Compressed air 1.0 MPa 19 dB (A) JIS Symbol Noise reduction Ambient and fluid temperature 5 to 60C (2) Note 1) It

PFxx-OMS0001CN

OUT1 [CoL] [] , ON OFF ON OFF [F 1] OUT1 -36No.PF-OMS0001CN-A [F 2] OUT2 OUT2 (29 )(30 ) OUT2()[---] <>OUT2 [F 2] [oUt2][]() OUT2 [---] [oU2] [] [2ot] [] 38 39 40 41 -37No.PF-OMS0001CN-A a.

AMPSeries

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(Manifold specification sheet on page 41.)

VH Series, 4 Way Hand Valve

3 4 2 1 VH422-N02 to N06 VH432-N02 to N06 2 (Position) Flow direction 2 Flow direction 4 Flow direction 2 Flow direction 4 90 45 45 3/4" 185(10.2) 1 2 21.34 (9.7) VH6 VH600-N06,N10 3 (Closed center) 3/4", 1" 1" 194(10.5) 3 4 2 How To Order Series VH How to Order VH 2 0 1 02 N Options Hand valve R In/Out Reverse Valve model (Cv) Port size (NPT) 2 3 4 6 (0.4) (1.1) (3.2) (10.5) 02 03 04 06

(kg)Air filterRegulatorAC40B-06AF40-06AR40-063/41/4Air?