CLS

n = 2, 4, 6, 8 n 150 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 CNA 1 15 110 150 Different sides CNS 110 150 35 2 Same side 110 150 55 CLS D-A44 150 + 30 (n 2) n = 2, 4, 6, 8 150 + 50 (n 2) n = 2, 4, 6, 8 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n Same side 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) CLQ 1 110 150 15 MLGP D-Z7/Z80

LJ1H

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

Sine Cylinder Series REC

40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm) 20 M20 x 1.5 1/8 146 20 8 21 215 Individual -X 25 M26 x 1.5 1/8 146 20 8 25 219 32 M26 x 1.5 1/8 159 20 8 25 232 40 M32 x 2 1/4 181 23 10 27 264 1031 Series REC

Sine Cylinder Series REC

40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm) 20 M20 x 1.5 1/8 146 20 8 21 215 Individual -X 25 M26 x 1.5 1/8 146 20 8 25 219 32 M26 x 1.5 1/8 159 20 8 25 232 40 M32 x 2 1/4 181 23 10 27 264 1031 Series REC

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

) I 5.5 12 6 12 12 9.5 10 5.5 10 5.5 21 K 5.5 KA 21 NA x M5 x 0.8 thread depth 5.5 Stroke adjuster at extension end Stroke adjuster at retraction end 37.5 (With stroke adjuster at extension end) 12 6 N x M5 x 0.8 thread depth 6 (Insert) 6 4 x M5 x 0.8 thread depth 7 1 (With stroke adjuster at extension end) 3.5 (With stroke adjuster at retraction end) 26 58 35 62 48 5H9 ( ) depth 4 +0.030

HRX-OM-M090

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-M090 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Drain pan

CLQ

L D d m t d H B C C type 8 for shaft C type 10 for shaft C type 10 for shaft C type 14 for shaft C type 18 for shaft C type 22 for shaft 20 25 32, 40 50, 63 80 100 21 25.6 41.6 50.6 64 72 7.6 9.6 9.6 13.4 17 21 16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.55 1.55 2.05 2.55 2.55 0.9 1.15 1.15 1.15 1.35 1.35 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 5 6 8 11 13 16 13 17 22 27 32 41

High Power Cylinder Series RHC

51 6 7 16 14.5 10 32 18 8 200 to 700 20 19.5 6 49.5 56.5 70 44 27 53 9 7 16 18 12 36 22 8 200 to 700 25 19.5 6 51.5 55 72 50 33 55 9 7 19 18 12 44 22 9 200 to 1000 32 21 8 51.5 56 84 60 36 66 9 9 21 20.5 16 53 24 11 200 to 1000 40 NN ND NF NE NC K NB JD NA JC WH N ZZ P 1/4 I MM S H Bore size (mm) M22 x 1.5 15.0 13 33.5 5.5 5 30 30.5 26 43 22 252 26 44 M8 x 1.25 192 20 1/4 M24 x 1.5 19.6

HRX-OM-R005

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R005 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [Electric resistivity /conductivity sensor set] . 6-2 6.3.1 Optional Accessories [Electric resistivity/conductivity

HRX-OM-O021

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-O021 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [Electric resistivity /conductivity sensor set] . 6-2 6.3.1 Optional Accessories [Electric resistivity/conductivity

SMC Basic Pneumatics

l 13.8 27 .6 dla. mm 8,10 12,16 20 25 32 40 50 63 80 100 125 140 160 0.6 0.8 1 I 1.3 1.2 1.6 2 2.7 3.7 4.4 5 6.8 8.1 10.8 12.6 16.8 20.4 27.2 3.4 c.c 8.5 13.5 21 2.4 4.3 6.8 10.5 1 7 27 2.2 3.4 5.4 8.4 13.6 21 .6 2.6 4 A E 10.2 16.2 za.z Equlvalent Flow Sectlon in mmZ Table 7.31 Eguiyalent Section S in mm2 for the valve and the tubing, lor 6 bar working pressure and a pressure drop ol 1 bar

%silltr

l 13.8 27 .6 dla. mm 8,10 12,16 20 25 32 40 50 63 80 100 125 140 160 0.6 0.8 1 I 1.3 1.2 1.6 2 2.7 3.7 4.4 5 6.8 8.1 10.8 12.6 16.8 20.4 27.2 3.4 c.c 8.5 13.5 21 2.4 4.3 6.8 10.5 1 7 27 2.2 3.4 5.4 8.4 13.6 21 .6 2.6 4 A E 10.2 16.2 za.z Equlvalent Flow Sectlon in mmZ Table 7.31 Eguiyalent Section S in mm2 for the valve and the tubing, lor 6 bar working pressure and a pressure drop ol 1 bar

4/5 Port Air Operated Valve Series SYJA3000 1

M5 x 0.8 (Piping port) (Piping port) With fiflter (80 mesh) 21.5 R1 P 8.5 6 6 2-1.8 (Bleed port) 17 17 15 R2 21 With fiflter (80 mesh) 24 32 45.5 3 position closed center/exhaust center/pressure center SYJA5 20-M5 3 position closed center/exhaust center/pressure center SYJA5 40-01 3 4 5 3 4 5 28 2-4.3 2-M5 x 0.8 2-M5 x 0.8 37.5 23 (Pilot port) (For mounting) (Pilot port) A B 11 20 23 5 3

Shock Absorbers and Rate Controls

N/A 6. +0. 6. +0.t3/0 6.02 38.1 6.0 8.3 5.9 t0.0 861 .S !

Digital Gap Checker

for centralized lead wire ISA-20 Stations Model 2 ISA-21-2 3 ISA-21-3 4 ISA-21-4 5 ISA-21-5 6 ISA-21-6 Regulator AR20-02-1-B -12No.PS-OMT0002-E 2 About this product 2 port solenoid valve VX210X276 Bracket (when control unit fitted) (Nominal size:3 x 8, 2 screws) ISA-17 Spacer with bracket Y200T-A Modular adapter E210-U01 Spacer ISA-18 With O-ring : When a 2 port solenoid valve is connected

High Power Cylinder:

Bore (mm) 20 25 32 40 H1 5 6 6 8 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 FZ 68 70 72 84 FW 38 44 50 60 FY 21 27 33 36 FX 51 53 55 66 FT 6 9 9 9 FD 7 7 7 9 F 16 16 19 21 E 14.5 18 18 20.5 D 10 12 12 16 C 40.5 45.5 51.5 61.5 B 32 36 44 53 A 18 22 22 24 Bore (mm) 20 25 32 40 S 192 193 195 201.5 Rc(PT)P 1/4 1/4 3/8 3/8 NN M22 X 1.5 M24 X 1.5 M30 X 1.5 M33 X 2.0 ND 15.0 19.6 19.6 25.4 NF 13

VFS

Applicable cable: O.D. 6 to 8.

Table of Contents

6 Seal kit includes !4, !5, !6.

Electric Actuator with Integrated Guide

Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5 5 4 64 87.5 98 6 7 8 11 9 10 12 29 18 VFS