Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

CXSJ10-10 21-/2211-/12CXSJ10-20 21-/2211-/12CXSJ10-30 21-/2211-/12CXSJ10-40 21-/2211-/12CXSJ10-50 21-/2211-/1279

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5

V

U06 6 7 2.5 7 12 0.8 ZP08U U08 8 9 2.5 7 12 1 Part No Type G C B D E F Y ZP10U U10 10 12 4 13 7.7 12 3 ZP10D D10 10 12 4 13 10.7 15 6 ZP13U U13 13 15 4 13 7.7 12 3 ZP16D D16 16 18 4 13 11.7 16 7 H Y Part No Type A B C D E F G ZP16U U16 16 18 4 13 8.2 12.5 3.5 ZP25D D25 25 28 4 15 15.5 20 10 ZP06B B06 6 7 2.5 7 13 3.3 9.1 4 ZP20U U20 20 23 4 15 9.5 14 4 ZP40D D40 40 43 7 18 24.2 29 17 ZP08B

Direct Solenoid

..p s y. itrdu.r* 6p,{r) res$dtsLdi.O oF .td d 16, (1) indaaiorrigtrtGdrbry.b r 7 a 1 8, (1) d.t 19, (21 dsi 13, l2l (H 121. and O )dol7 {valw tvDe'F1 1 3 2 1 5 AXT333-16 1 5 1 1 1 a E K l9 I oao) 4.aa t122) 3.25 (43) 136) L0a (23) en 1.09 (23) 06j 1.63 0) 136) axl3i,t12-2 2 Hold ddn bolls r'd bd(waBlm I&s2 !

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 Model L3 Model Weight (g) 6 7 8 12 13 26 31 Weight (g) 6 7 8 9 12 18 21 24 26 31 M1 d M1 D2 L2 D1 L1 L2 D2 D1 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 3.2 4 6 4 6 6 8 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

HRX-OM-Y098

Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily check . 7-2 7.2.2 Monthly check . 7-3 7.2.3 Inspection every 3 months. 7-4 7.3 Operation Stop for an Extended Period of Time . 7-5 7.3.1 Discharge of the circulating fluid . 7-5 7.4 Replacement of consumables . 7-8 7.4.1 Replacing Particle

15

Note 7) Each value is a guide. Use such value to select a motor capacity.

44

H1 H2 12 8 12 32.6 29 5 11 16 KQB2 14 17 10 14 14 17 36.6 40.4 32.2 35.8 5.8 6.6 13 15 25 43 69 68 71 68 122 d KS KX 21 17 21 44.8 39.4 7.6 18 M M L2 KM 21 17 21 48.1 41.7 8.5 19 L1 27 22 27 52.3 45.9 9.3 25 KF M Union Elbow: KFG2L H/DL L/LL Applicable tubing size (mm) O.D.

Compressed Air Preparation Filter

A B C D E EE F G H J K Applicable model Y200T-D 3.2 67 29 51 24 33 11.5 5.5 15.5 3.5 30 AFF/AM/AMD/AMK20 Y300T-D 4.2 85 42.5 67.5 35 14 7 20 6 41 AFF/AM/AMD/AMK30 Y400T-D 5.2 115 50 85.5 40 55 18 9 26 7 50 AFF/AM/AMD/AMK40 Part no.

SZ3000

Refer to page 1-7-4.)

VQ5000

Refer to How to Order Manifold. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 D-sub Connector Cable Assembly (Option) Electric Characteristics Multi-core vinyl cable 0.3 mm2 x 25C Item Characteristics Cable length (L) Assembly part no.

REC

13 26 40 8 13 10 41 5 8 33.5 5 6.8 25 186 40 55 20 30 25 M10 x 1.25 Up to 700 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186 40 55 20 34.5 32 M10 x 1.25 Up to 1000 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 40 M14 x 1.5 Up to 1000 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2 7 7 30 227 55 75 26.5 51 NN P S X Y Z ZZ Bore (mm) Stroke range 20 M20 x 1.5

10

MHL2-20DmZ M6 x 1 4.8 7 MHL2-25DmZ M8 x 1.25 12.0 7 How to Mount the Attachment to the Finger 1.

4/5 Port Air Operated Valve Series SYJA3000 1

M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2-1.8 2-M3 x 0.5 (Pilot port) A B 11 1.5 17.5 (For mounting) 2-3.2 equivalent (18.5) A B Manual override 14 36 (18.5) (21) Manual override 41.6 13.5 15 41.6 28.5 21 R2 P R1 13 R P R (11) (0.5) 10 5 5 2-1 (Bleed port) 10 10 7 7 2-1 (Bleed port) M3 x 0.5 (Piping port) 28 M5 x 0.8 (Piping port

PC Wiring System Series PCW

13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1 0 1 1 2 3 4 CN0 1 2 3 4 CN1 1 2 3 4 CN2 1 2 3 4 CN3 1 2 3 4 CN4 1 2 3 4 CN5 1 2 3 4 CN6 1 2 3 4

Magnetically Coupled Rodless Cylinder

51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26

OMU0023

Scope . 7 3.1 Scope . 7 4. Hardware Specifications . 9 4.1 Input Specifications . 9 4.2 Communication Connector Pin Assignment . 9 4.3 Communication Circuit . 9 4.4 Wiring Examples . 10 5.

REC

26 40 8 13 10 41 5 8 33.5 5 6.8 25 186 40 55 20 30 150 to 700 M10 X 1.25 25 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186 40 55 20 34.5 150 to 700 M10 X 1.25 32 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 150 to 1000 M14 X 1.5 40 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2 7 7 30 227 55 75 26.5 51 200 to 1000 NN P S X Y Z ZZ Bore size Stroke range

ISO Standard Hydraulic Cylinder

8 @7 #0 !7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !