VQ5000

VQZ SOL.A 8 () (+) Purple White SOL.B 21 () (+) Brown White 8 stations SOL.A 9 () (+) Gray Black VQD SOL.B 22 () (+) Pink Red 9 stations Connector terminal no. SOL.A 10 () (+) White Black Double wiring (connected to SOL. A and SOL. B) is adopted for the internal wiring of each station, regardless of valve and option types. Mixed single and double wiring is available as an option.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 68 2 x 3.4 68 28 [mm] 28 Model A C D P PF2M705/710W-C4(-L) 86.2 7.6 18.2 2.8 depth 8.4 PF2M705/710/725/750W -C6(-L) 86.2 8 18.2 2.8 depth 8.4 8 8 PF2M725/750W-N7(-L) 86.2 11.8 18.2 2.8 depth 8.4 PF2M711/721W-C8(-L) 88 12 20 2.8 depth 6.2 PF2M711/721W-N7(-L) 88 10.3 20 2.8 depth 6.2 2 x P 2 x P 21 2-Color Display Digital Flow Switch

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

66 246 17 50 25 9 73 53 20 50 28 17 17 M10 x 1.5 20 16 22 M16 x 1.5 30 3/8 43 116 11 10 9 73 262 19 63 28 8 80 60 22.4 55 30 17 17 M10 x 1.5 22 16 25 M18 x 1.5 30 3/8 47 120 11 12 10 80 280 21 80 32 8 100 75 28 65 32 22 20 M12 x 1.75 26 19 29 M22 x 1.5 35 1/2 57 132 11 16 13 90 312 26 100 38 6.5 118 90 35.5 80 35 27 19 M12 x 1.75 27 21 34 M27 x 2 35 1/2 66 140 12 20 16 100 340 34 125 38 6.5

MQQ

21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13 25 8.5 M20 x 1.5 M8 x 1.25 97.5

High Power Cylinder:

Bore (mm) 20 25 32 40 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 FZ 68 70 72 84 FW 38 44 50 60 FY 21 27 33 36 FX 51 53 55 66 FT 6 9 9 9 FD 7 7 7 9 F 16 16 19 21 E 14.5 18 18 20.5 D 10 12 12 16 B 32 36 44 53 A 18 22 22 24 H1 5 6 6 8 H2 8 8 9 11 REA REC Bore (mm) 20 25 32 40 S 192 193 195 201.5 Rc(PT)P 1/4 1/4 3/8 3/8 NN M22 X 1.5 M24 X 1.5 M30 X 1.5 M33 X 2.0 ND 15.0 19.6 19.6 25.4 NF 13 17

SYJA3000

) 64 3.2 269.5 14 (Non-locking) Manual override (Mounting holes) 35 89 (Non-locking) Manual override 3-Rc(PT)1/8, 1/4 (P, A, Bport) 29 28 25 21 1.6 14 89 18 21.8 (Bleed hole) With filter (80 Mesh) 55 2-1.8 (Bleed hole) With filter (80 Mesh) 40 25.5 20 R1 R2 P 11.5 12 18 22 22 27.2 (R1, R2 port) 2-Rc(PT)1/4 63 5-Rc(PT)1/8 (Piping port) 3.1-21

VQ4000

pilot port 19.5 (21) 19.5 (21) Rc1/8 PE port Rc1/8 PE port 19.5 (21) 19.5 (21) 31 31 5-Rc (PT)1/4, 3/8 P, A, B, R1, R2 port G1/2 Electrical entry 5-Rc1/4, 3/8 P, A, B, R1, R2 port 31 31 : 3 position ( ): Rc3/8 1.11-6 Single Unit Series VQ4000 Base Mounted Plug Lead Grommet G H 2 position single: VQ415 l 0 1 155.5 155.5 105.5 42.5 23.5 23.5 50 105.5 42.5 50 11 (B port) 11 (A port) Indicator

MK

8 !

JXCx-OMT0061CN

CN1: . 21 6.1 . 21 6.2 . 21 6.3 . 22 (1) (C24V,M24V,0V) . 22 (2) (EMG) . 22 1 - (3) (BL RLS) . 22 6.4 . 23 1 . 23 2 . 24 3() . 25 7. CN5: . 26 7.1 . 26 7.2 . 26 7.3 . 27 8.

SX

Applicable up to 8 solenoids.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Q 84 95 105 116 134 QW 19 20.5 21.5 24 26 P (Piping port) Model TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 8-15-21 21 Series CY3R Proper Auto Switch Mounting Position (Detection at stroke end) Opereting Range (Reference dimension) Bore size (mm) Auto switch model 15 20 25 32 40 D-A9

LJ1H

25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

MLGP

8 !

MLGP

8 !

HRX-OM-S004

. 8-7 8.2 Outline dimensions . 8-8 8.2.1 HRS100/150-A-20/40/46. 8-8 8.2.2 HRS100/150-W-20/40/46. 8-9 8.3 Flow diagram . 8-10 8.3.1 HRS100/150-A-20/40/46. 8-10 8.3.2 HRS100/150-W-20/40/46. 8-11 8.4 Cooling capacity . 8-12 HRS Series HRX-OM-S004 Contents 8.4.1 HRS100-A-20/40/46. 8-12 8.4.2 HRS150-A-20/40/46. 8-12 8.4.3 HRS100-W-20/40/46. 8-13 8.4.4 HRS150-W-20/40/46. 8-13 8.5 Pump capacity

HRX-OM-M090

4 to 8-8.

HRX-OM-X037

Control, Inspection and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months. 8-4 8.2.4 Inspection every 6 months. 8-5 8.3 Operation Stop for an Extended Period of Time . 8-6 8.3.1 Discharge of the circulating fluid . 8-6 8.3.2 Discharge of the facility

CXS

98 38 96 36 18 75 44 8 16 14 30 16 M8 x 1.25 x 23 76 2-M6 x 1.0 CXS32 PP Q QQ R T TT U W X Y Model UU V 2-M6 x 1.0 with depth 10 2-M8 x 1.25 with depth 12 2-M8 x 1.25 with depth 12 4-M5 x 0.8 with depth 4.5 4-Rc 1/8 with depth 6.5 4-Rc 1/8 with depth 6.5 8-M4 x 0.7 with depth 5.5 8-M5 x 0.8 with depth 7.5 8-M5 x 0.8 with depth 7.5 M6 x 1.0 7.75 12.5 45 9.5 6.5 8 M6 x 1.0 x 12 M8 x 1.25 x

HRX-OM-O021

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid and facility

HRX-OM-R005

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid and facility