11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

QL 6 13.5 Prepared hole diameter 3.3 2-M3 x 0.5 (Plug: M-3P) 6 (fitting seat surface dimension) 170.05 M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port 2-M3 x 0.5 A 5 5.5 A 3.2 J 2.4 Z Section AA 3.5 Depth 2 2.5 +0.030 0 7 +0.030 0 Depth 2 2.5 Q QL 11-/22-MXPJ6-10 4M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51 30 35

LEC-OM02704CN

F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1 2 3 0() 1() 2() 3() PD20 0 S S S S () 0 r / m i n 0

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

0 q t r i S u y o !4 !8 !

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

RQ

Basic style (Through-hole/Both ends tapped common): RQB/RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H thread effective depth C E1 E2 Q F 4-5.4 through D M E 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Flat washer 4 pcs.

MRQ

When the cylinder is pressurized from port A, range F can be adjusted by regulating angle adjustment screw D.

Rotary Actuator

2 q w o r With air cushion Without air cushion With auto switch !9 @1 @3 !7 !6 !8 @0 @2 Component Parts No.

Bag Filter

F-91S F-87S FGFC5-60 FGFL3-40 Carbon steel F-88S FGFR5-60 FGFC5-60 150(6B) F-92S F-88S 280 240 166.6 23 22 FGFS5-60 FGFR5-60 Stainless steel F-89S AL-80S AI-18S FGFL5-60 FGFS5-60 F-93S F-89S FGFL5-60 Note) 2 pieces are required per filter unit. JIS10KFF is used for this flange. Foundation bolt L1 (mm) Nominal thread size d M16 L1 R Applicable model d1 S L Part No. (Approx.) (Approx.)

MHF2

Operating pressure: 0.4 MPa Model Selection Illustration When gripping a workpiece as in the figure to the left and with the following definitions, F: Gripping force (N) : Coefficient of friction between attachments and workpiece m: Workpiece mass (kg) g: Gravitational acceleration (= 9.8 m/s2) mg: Workpiece weight (N) F F the conditions under which the workpiece will not drop are mg F F

MHF2

Operating pressure: 0.4 MPa Model Selection Illustration When gripping a workpiece as in the figure to the left and with the following definitions, F: Gripping force (N) : Coefficient of friction between attachments and workpiece m: Workpiece mass (kg) g: Gravitational acceleration (= 9.8 m/s2) mg: Workpiece weight (N) F F the conditions under which the workpiece will not drop are mg F F

MHF2

mg F F Gripping force at least 10 to 20 times the work piece weight The "10 to 20 times or more of the work piece weight" recommended by SMC is calculated with the safety margin of a = 4, which allows for impacts that occur during normal transportation, etc. 2F mg Number of fingers and therefore, mg F 2 x With "a" as the safety margin, F is determined as follows: mg F = x a 2 x When

3 Port Solenoid Valve SYJ300/500/700 Series

N.O. 24 VDC 12 VDC Type 42 7 Q Q Q Specifications Series SYJ300/500/700 Low Power Consumption 0.5 W Q Q Q Q Q SYJ300.pages 10-12 Q Q SYJ500.pages 13-15 Q SYJ700.pages 16-18 Q Q Q Specifications Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q 9 Series SYJ300 3 Port Solenoid Valve Valve Specifications Model Weight g Valve model Type of actuation Port

ZX

unit (F) E P F Model ZX100 K6 Circuit diagram (Circuits other than those with vacuum switch are shown as below.)

Soft Start-up Valve

Simple Specials System Please contact your local sales representative for more details. 2 *1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) AV 00 20 02 B B 1 D q w e r t y u i o A *1 CE compliant Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V

SMC Pneumatic Clean Series

A 1.5 F H S + Stroke 20 Non-lock manual release type K (This drawing shows the cases of 20 and 25.)

Possible to transfer a workpiece at low-speed.

5 q r q w r y !5 !6 i CRQ2X MSQX CRQ2X MSQX MRQ Component Parts Component Parts Description Material No. Description Material No.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

8 q y !0 !4 !9 r !1 @0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @2 @5 o @4 @3 !2 Component Parts No. Description Spring pin Seal ring Bearing Inner wiper No.

5 Port Solenoid Valve Series SQ1000/2000

How to Order Applicable Valves B C6 SQ 1 3 5 1 Y 1 Series SQ1000 C H G B A D F E A A A A B A B 2.PUSH 2.PUSH 1.TURN 1.TURN D Coil voltage Type of actuation A 5 24VDC 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure center Dual 3 port valve N.C. + N.C. Dual 3 port valve N.O. + N.O.

PF2A/PF2W

.S. or less 3% F .S. or less Repeatability Note 1) 2% F .S. or less 1% F .S. or less Temperature characteristics 2% F.S. or less (15 to 35C based on 25C), 3% F .S. or less (0 to 50C based on 25C) Pulse output, N channel, open drain, output for display unit PF2W3.

WRF100

F Catchers F Catchers Clamping force (when 0.5 MPa supplied) A A 30,000 Clamping force F (N) 25,000 T-type arms S-type arms 20,000 15,000 Generated position of clamping force F (mm) 10,000 Arm type A T200, T240, T270 S200, S240 107 5,000 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 Distance H from clamp position (mm) 80 A Frame Clamp Cylinder WRF100 How to Order C T200 WRF100 Protective cover