High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

W K CY1RG50/63 HB HC N X MX H MTS CB HA 2-P (Piping port) 4-J x E (Depth) 4-Counterbore dia.

One-touch Fittings Series KQ2

O e b u t ) m m ( . n i M e l o h . a i d t h g i e W ) g ( d a e r h T ) T P ( R . o N t r a P H ) . x e H ( D 1 D 2 L1 L2 * A M M5 6 1 / 3 8 / 1 S 1 0 5 0 L 2 Q K 0 1 4 . 1 1 0 1 5 . 9 1 8 3 0 4 5 . 6 1 5 . 3 9 1 4 / 1 S 2 0 5 0 L 2 Q K 4 1 4 4 5 . 3 4 1 4 8 / 1 S 1 0 7 0 L 2 Q K 0 1 2 . 3 1 0 1 5 . 0 2 5 . 0 4 3 4 7 1 6 . 4 0 2 4 / 1 4 / 1 S 2 0 7 0 L 2 Q K 4 1 5 . 6 4 7 4 5 4 8 / 3

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

WB WA View E GC GA Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface GB Piping port M5 x 0.8 D LY LB LH LZ LX Head cover port location Axial direction (R) NB LT H NA A 2 x LC Mounting hole Y X The overall cylinder length does not change.

C85

+ 2 x Stroke Wh KK With rod boot C e K 9 9 I f AM h (mm) ND h8 BE KK EE N1 G1 KW NA D F KV HR K ZZ Bore C AM WA SW S WB H WH 12 10 M4 x 0.7 M5 x 0.8 M12 x 1.25 4 16.7 15 12 19 6 28 16 7 7 11.5 48{54} 104{110} 8 12 12 10.5 M4 x 0.7 M5 x 0.8 M12 x 1.25 4 16.7 15 12 4.5 19 6 10.5 28 16 7 48(53) 104(109) 7(5.5) 11.5(13.5) 10 12 16 14 M6 x 1 M5 x 0.8 M16 x 1.5 6 19.7 18.3 17 5.5 24 5 8 9.5

Tamper Proof and Flat Head Screw

M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32UNF NPT1/8 NPT1/4 NPT3/8 NPT1/2 01 02 03 04 U10/32 N01 N02 N03 N04 SMC Pneumatics, Inc. 5 Series ASIII1F-T Dimensions (mm) 1in=25.4mm L5 D3 Elbow type H (width across flats) Applicable tubing O.D. d A L4 D1 L3 M1 D2 T L1 L2 Metric sizes Inch sizes d T H D1 D2 D3 L1 L2 L3 L4 L5 A M1 Model A D1 Model T H D2 D3 L1 L2 L3

CL

Without rod boot With rod boot Bore size (mm) M MM N S W P H ZZ e f h ZZ l 51 58 58 71 72 110 110 120 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 40 50 63 80 100 125 140 160 11 11 14 17 17 27 27 30.5 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M30 x 1.5 M36 x 1.5 215 237 254 296 315 376.5 385 423.5

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

2, !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

2, !

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

2) 22.5 (Extension end adjuster) Bottom view of MXQ8L-30 13224 6.5 8 6.5 I J 5.5 8 3.5 Vacuum suction port M5 x 0.8 Max. 11 (Retraction end adjuster) 27 23 6 2 7 2 x M3 x 0.5 thread depth 4 Operating port 2 x M5 x 0.8 3H9 ( ) depth 3 +0.025 0 HA GA NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 3 +0.025 0 A B 1 14 7 7 3.2 3.2 6.5 A B H (NN 1) x H G 12.5 12.5 5.7 5.7 A-A B-B (mm) Model F 25

Electric Actuator/Slider Type

[mm] Size Stroke range (mm) A B C D EH EV F G H J K L M O1 25 15 to 100 130.5 116 13 20 44 45.5 2 4 M8 x 1.25 24 17 14.5 34 M5 x 0.8 105 to 400 155.5 141 32 20 to 100 148.5 130 13 25 51 56.5 2 4 M8 x 1.25 31 22 18.5 40 M6 x 1.0 105 to 500 178.5 160 63 Up to 200 192.6 155.2 21 40 76 82 4 8 M16 x 2 44 36 37.4 60 M8 x 1.25 205 to 500 227.6 190.2 505 to 800 262.6 225.2 Size Stroke range (mm)

Series KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g P M P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02 KPGU10-02 KPGU10-03 KPGU12-03 KPGU12-04

Series KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g P M P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02 KPGU10-02 KPGU10-03 KPGU12-03 KPGU12-04

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Relief port (10-, 21-) Vacuum port (11-, 22-) Width across flats B1 H1 2 x NN MM MM NA 2 x Eh8 20, 25 D D Standard port Width across flats KA 45 45 1.5 A AL K Relief port (10-, 21-) H + Stroke A AL K 1.5 Vacuum port (11-, 22-) ZZ + 2 x Stroke S + Stroke F H F (mm) Female Rod End Female rod end 2 x M5 x 0.8 Relief port (10-) Vacuum port (11-) A1 20 20 20 21 H M4 x 0.7 M5 x 0.8 M6 x 1 M8 x

KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04

smcmaintenancepartslist

Recommended length Part No. st + 118 0 2 st + 145 0 2 st + 174 0 2 st + 221 0 2 st + 272 0 2 st + 305 0 2 st + 352 0 2 st + 106 0 2 st + 125 0 2 st + 146 0 2 st + 189 0 2 st + 236 0 2 st + 270 0 2 st + 316 0 2 MY3A16-16B-st MY3A20-16B-st MY3A25-16B-st MY3A32-16B-st MY3A40-16B-st MY3A50-16B-st MY3A63-16B-st MY3B16-16B-st MY3B20-16B-st MY3B25-16B-st MY3B32-16B-st MY3B40-16B-st MY3B50-16B-st

KJ

(inch) Connection thread M R Model H (Width across flats) L A M Min. port size KQ2H01-M5 KQ2H07-M5 KQ2H01-M5 M5> Weight (g) D Note) Applicable tubing KQ2H01-M5 2 9 16 6 11 12 3.3 10 15 M5 x 0.8 13.6 18 7 16.7 22 12.7 KQ2H01-01S 1 8 1 8 10 15.5 2.5 1 4 KQ2H01-02S 19.5 13.5 14 2.5 M5 x 0.8 KQ2H05-M5 10.3 20.5 18 15 15.3 18.5 17 10.7 11 14 11 24 22 21 18.4 22.5 23 16.5 1 8 3 16

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

9 8.5 4.2 B A 8.5 18.5 8.5 18.5 H (NN 1) x H G Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 NA 2 2 2 2 2 4 4 N 4 4 4 4 6 6 6 GA 15 15 15 42 51 61 111

CL

Without rod boot With rod boot Bore size (mm) M MM N S W P H ZZ e f h ZZ l 51 58 58 71 72 110 110 120 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 40 50 63 80 100 125 140 160 11 11 14 17 17 27 27 30.5 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M30 x 1.5 M36 x 1.5 215 237 254 296 315 376.5 385 423.5

Modular Design with Uniform Body Style

gauge (Semi-standard: Z) Round type pressure gauge (with color zone) Model Standard specifications Round type pressure gauge P1 P2 A B*1 C D F J K H J H J H J AR20-D 1/8, 1/4 1/8 40 66.8 26.5 21 M28 x 1 21 2 37.5 57.5 37.5 58.5 37.5 58.5 AR30-D 1/4, 3/8 1/8 53 86.5 30.5 26.5 M38 x 1.5 26.5 3.5 37.5 63 37.5 64 37.5 64 AR40-D 1/4, 3/8, 1/2 1/8 70 91.5 35.5 35.5 M42 x 1.5 35.5 42.5 73 42.5