MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B B A W A B stroke 6 5 to 30 3.5 0 17 6.5 13 3.5 2.5(5) 17 4.5 5 to 20 17 13 17 10 25 7.5 3.5 20 16 2.5 7.5 20 1.5 0.5 30 19 15 19 (1) 5 27 23 27 10 22 18 22 15 27 23 27 16 8 4 2 8 2 0 B A 20 22 18 22 Bore (mm) 6 10 16 25 27 23 27 (0.5) 6.9 10 30 27 23 27 8.8 14 13.9 19 Note 1) Negative figures

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Tightening torque: AW10 AW20(K) AW30(K) AW40(K) AW60(K) 21 3 to 4 Nm 12 7 to 9 Nm 14 12 to 14 Nm 7. Pressure Gauge Adapter, Plug Assembly Process Procedure Tools Check item Applicable model Actuators Modular F.R.L. Pressure Control Equipment Disassembly Hexagon wrench key Nominal: AW20(K) AW30(K) AW40(K) AW60(K) 1) Remove the plug.

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B A B B W A stroke 6 5 to 30 0 13 3.5 3.5 6.5 17 2.5(5) 17 4.5 5 to 20 13 17 17 10 25 3.5 16 7.5 7.5 2.5 20 1.5 20 0.5 30 15 19 (1) 19 5 23 27 27 10 18 22 22 15 23 27 27 16 4 8 8 2 2 0 A B 20 18 22 22 Bore (mm) 6 10 16 25 23 27 27 (0.5) 10 6.9 30 23 27 27 14 8.8 19 13.9 Note 1) Negative figures

XM, XY

XMA series with KF (NW) flange A (mm) Model Weight (kg) Conductance (L/s) B (mm) CYV XMA-16 40 103 0.33 5 XMA-25 XMA-40 XMA-50 50 113 0.61 14 B 65 158 1.40 45 70 170 2.00 80 A 160 XMA-63 XMA-80 88 196 3.60 90 235 6.20 200 A : Common to all series. 479 Series Variations Operating pressure Flange size Shaft seal system Models Valve type Angle type In-line type Options Application Switch Indicator

80

C R E (AC type) [mm] Model Port size P B B1 C D E F B B1 2 x P Port size VDW1 M5(M6) 20 10 46.1 15 9.5 11 VDW2 M5(M6) 22 11 50.9 20 9.5 13.5 Mounting bracket dimensions Electrical entry Model Port size P U W X Y Grommet Q R VDW1 M5(M6) 28 11 34 17 15.5 30.35 VDW2 M5(M6) 33 14 39 20 17 33.9 464 A Compact Direct Operated 2 Port Solenoid Valve VDW Series Air Medium vacuum Water Dimensions

VNB

C.O. 1 2 1 4.1 4.2 Normally closed Normally open Double acting VNB0 VNB02 VNB03 VN 1 4 7.7 7.8 40 12 (P1) 12 (P1) 10 (P2) LVC 6.3 6.4 2 Air operated LVA 2 (B) 1 (A) 2 (B) 1 (A) 2 (B) 1 (A) 11.4 11.5 50 10 (P2) Note) The flange should be JIS B 2210 10K (ordinary style) or its equivalent.

3 Port Solenoid Valve Series SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

Process Pump

Symbol C[dm3/(sbar)] b Cv N.C.

Title not found

Cv = Area x Stroke x A x Cf Time x 29 Area = x Radius 2 or see table B below. Stroke = Cylinder Travel (in.) A = Pressure Drop Constant (see table A) Cf = Compression Factor (see table A) Table B Cylinder Area (Sq. In.)

Title not found

Cv = Area x Stroke x A x Cf Time x 29 Area = x Radius 2 or see table B below. Stroke = Cylinder Travel (in.) A = Pressure Drop Constant (see table A) Cf = Compression Factor (see table A) Table B Cylinder Area (Sq. In.)

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 40 285.5 21 273 No.

EXxx-OMV0017-D

[August 2018] B: Contents are added. [August 2018] C: Contents revised in several places.

Stainless Steel One-touch Fittings Series KG

(mm) Weight (g) A D M5 0.8 KGH04-M5 KGH04-01 14 13 9.5 8 17 22 4 4 2.4 9 16 5.6 1 4 KGH04-02 19.5 13.5 14 4 4 1 8 16 18 10 5.6 M5 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 15 18.5 17 11.5 18.5 22.5 23 4 10 12 14 1 8 1 4 6 13.1 13.1 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 24 20.5 15.5 26 27.5 28 26.5 22 30 33.5 14

CJ2X/CUX/CQSX/CQ2X/CM2X

For details about auto switches with pre-wire connector, refer to page 10-20-66. 10-3-14 14 Series CM2X Low Speed Cylinder Double Acting, Single Rod Specifications 20, 25, 32, 40 Bore size (mm) Type Pneumatic Action Double acting, Single rod Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa JIS Symbol Double acting Single rod Minimum operating pressure 0.025 MPa RE A B Without

CJ2X/CUX/CQSX/CQ2X/CM2X

For details about auto switches with pre-wire connector, refer to page 10-20-66. 10-3-14 14 Series CM2X Low Speed Cylinder Double Acting, Single Rod Specifications 20, 25, 32, 40 Bore size (mm) Type Pneumatic Action Double acting, Single rod Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa JIS Symbol Double acting Single rod Minimum operating pressure 0.025 MPa RE A B Without

Rotary Table

Round plate (Including column) Position of rotational axis: Through the center (A) Number of axis teeth =a (B) 1. Find the moment of inertia I for the rotation of shaft (B). B r 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teeth =b 5.

High Vacuum L Type Valve

Parts Replacement Procedure 14 1 XL-OMS0001-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Series MXP Precision Air Slide Table

Switch operating range Stroke (mm) 20 41 29 47 35 Type 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B MXP10 Auto switch MXP12 3 Screwdriver (Grip diameter 5 to 6mm) MXP16 2 Color indication solid state switch D-F9BW(V), D-F9NW(V), D-F9PW(V) mm Switch operating range Stroke (mm) 20 42 28 48 34 Type 25 47.5 33.5 30 56 46 10 32 18 15 37.5 23.5 A B A B A B MXP10 MXP12

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

ZZ + Stroke Allowable angle displacement of E to B is 1.5.

PSxx-OMR0001CN

of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4