LEY-OM007

5 2.5 12 6 3 16 8 4 [m/s 2] 7) 50/20 + LEY* _ / R / L (LEY*D) [] 540 [%] 90 RH ) 28 42 56.4 (DC24V) A/B 800 / [V] DC2410% [W] 8) 23 40 50 [W] 9) 16 15 48 [W] 10) 43 48 104 11) [N] 20 39 78 78 157 294 108 216 421 [W] 12) 3.6 5 5 [V] DC2410% LEY 16 [ _ / R / L ] LEY 25 [ _ / R / L ] LEY 32 [ _ / R / L ] [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100

Pin Clamp Cylinder Series CKQ/CLKQ

2 r o t !1 i !3 u q !9 y @7 @0 @6 @5 @4 Auto switch !8 @1 @2 !6 !1 @3 !7 !0 !5 !

VQ5000

Indicate 10 to 12 stations on the manifold specification sheet.) One station is used for serial unit mounting.

CYPSeries

10-ASD330F-01-08 10-ASD230F-M5-06 2.

CYPSeries

10-ASD330F-01-08 10-ASD230F-M5-06 2.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Flow Rate and Sonic Conductance Model AS1002FS AS2002FSAS2052FS AS3002FS AS4002FS Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Tubing O.D.

CYP

Throttle valves and dual speed controllers for recommended speed adjustment of CYP cylinders Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Operation Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01

MRQ

Linear Motion/Standard Motion Size Standard stroke (mm) 32/40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 Refer to p.1.5-18 for other intermediate strokes.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

How to Order VHS 4 5 1 0 01 Paint color Nil X1 Standard color Handle, body: Red With locking holes Pressure relief 3 port valve Optional specifications Body size Flow direction: Right Left R 4 5 1/2 1 JIS Symbol (A) 2 Port size Double action 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Thread type 3 (R) 1 (P) Nil F N Rc G NPT OSHA standard (Occupational Safety and Health Administration Department of

ML2B

For details, refer to 3 point preset counter/CEU1 on page 10-12-30, and Multi counter/CEU5 on page 10-12-27 respectively.

ML2B

For details, refer to 3 point preset counter/CEU1 on page 10-12-30, and Multi counter/CEU5 on page 10-12-27 respectively.

3 Position Cylinder Series RZQ

P2 [MPa] 0.75P1 0.75P1-0.012m 0.75P1-0.0078m 0.75P1-0.0050m 0.75P1-0.0031m 1.5P1-0.024m 1.5P1-0.016m 1.5P1-0.010m 1.5P1-0.0063m Bore size (mm) 32 40 50 63 32 40 50 63 Orientation Circuit Horizontal A Graph 3 10 Line Circuit Orientation Movement Down A r e Extension 2 3 4 5 A Horizontal e r Retraction e Extension A Down Overrun (mm) e Retraction Up C w q Extension 1 B Up e Retraction q P1

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

24 16.2 16.2 17 36.7 34 34 B 2 B 2 B 2 B 2 B 2 2 B 2 2 B 2 B B R B 2 PE R 3 3 R 3 R 3 1 P 1 P P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 4-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n-One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 6 (L4) Applicable connector: 20 pin MIL type with strain relief

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15 How to Order Connecting port Body side R MHR 3 10 R Without auto switch R: Body side Port With auto switch (Built-in magnet) MDHR 3 10 R M9N S With magnet (For auto switch) Made to Order Refer to page 531 for details. Number of fingers Number of auto switches 3 3 fingers 2 pcs. 1 pc.

VDW

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.

LEF-OM007xx

6 1000 20 5 100 30 4 10 50 6 1000 5 5 100 15 4 10 30 6 1000 20 5 100 50 4 10 60 6 1000 10 5 100 40 4 10 50 6 1000 50 5 100 80 4 10 100 LEFS16 500 500 LEFS25 900 500 Please aspirate it from the port on both sides when aspirating 50 /min(ANR).

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Micro-Mist Separator with Prefilter Series AMH

Port size 01 1/8 B 06 3/4B 02 1/4 B 10 lB 03 3/8 B 14 1 1/2B 04 1/2B 20 28 Table" combination of accessories and made to order specifications Accessories Accessooos I~p~~Tii\,"aR6~~ Applicable models Made to order specifications C 0 J R T AMHl50 AMH2S0 AMH350 AMH450 AMH550 AMH650 AMH850 D C Drain Quide 1/48 -J Accessories N.C. auto drain N.O. auto drain IN-OUT reversal -R 10 0 Element service

VT317

Refer to the accessories on page 4-7-14. 4-7-9 10 Series VT317 Standard Specifications Type of actuation Direct operated type 2 position single solenoid Air Fluid Operating pressure range 0 to 0.9 MPa 10 to 50C (No freezing. Refer to page 4-18-4.)

Modular Type Lubricator Series AL

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H