ZSP1

x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5 10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11

ZPT/ZPX

A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96

NVKF

(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

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AW20 (K) ro 40 (K) * When more than one sperrcalDn s.equ red, ndrcate n as.ending nlhe callhe. a phabetica order Port size Nole 1)The on y d ibrence lbm the standard specil lions s fre adjusting spring joflhe regutarol [do6 not resl(cl lhe sen ng ol02MPa ormore sYmbot Pgrt 1 0 20 40 Nole 2) Wlhout a valle tufclon M5 a 1/8 a a a a 3/8 a a 1i2 a 314 a Nole 3) For M5 and NPT thread rype Accessories

Size: For AC10, Thread: Rc, Port Size: M5X0.8

Body Size: -, Thread: -, Port Size: -, Option: -, Semi-Standard 1: -, Semi-Standard 2: -, Made to Order: -

Actuation: Normally Closed, Body: Base Mounted, Port Size: M5 x 0.8 w/Sub-Plate, Bracket: -

Actuation: Normally Open, Body: Base Mounted, Port Size: M5 x 0.8 w/Sub-Plate, Bracket: -

Pressure: 0~1MPa, Port Size: M5X0.8

Pressure: -101~0kPa, Port Size: M5X0.8

Pressure: 0~100kPa, Port Size: M5X0.8

Size: For AC1000, Model: Branch Port, Bracket: L Bracket, Thread: M Thread, Rc(PT), Port Size: M5

Size: For AC1000, Model: Branch Port, Bracket: T Bracket, Thread: M Thread, Rc(PT), Port Size: M5

Size: For AC1000, Model: Branch Port, Bracket: None, Thread: M Thread, Rc(PT), Port Size: M5

Size: For AC1000, Bracket: T Bracket, Thread: M Thread, Rc(PT), Port Size: M5

Size: For AC1000, Bracket: None, Thread: M Thread, Rc(PT), Port Size: M5

Actuation Type: 3 Position Pressure Center, Body Type: Body Ported, Port Size: M5x0.8, Thread: -, Bracket: -

Series: 1 (VFA1000), Actuation: 1 (2 Position Single), Body: 30, A, B Port Size: M5 (M5 x 0.8)

Series: 1 (VFA1000), Actuation: 1 (2 Position Single), Body: 20, A, B Port Size: M5 (M5 x 0.8)

Sensor Range: 0 [Positive Pressure (0~1MPa)], Accuracy: ±2%F.S., Port Size: M5X0.8