ChemicalThermo-con

Terminal block 5 External sensor: Terminal B of resistance temperature detector 6 External sensor: Terminal B of resistance temperature detector 7 FG D A Pin No. Signal contents A short pin is installed between No. 1 and No. 2 pins to short-circuit it (Remote ON) when shipped.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

How to Order 11 LEFS 100 B 1 1 S K 6N 16 w e r t u y o i !0 !1 !2 !

Air Fittings Fitting Series For Special Environment

Male elbow: KRL Inch e l b a c i l p p A . D .

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

side Model Traveling parallelism [mm] (Every 300 mm) q C side traveling parallelism to A side w D side traveling parallelism to B side D side w q LEJl40 0.05 0.03 C side LEJl63 0.05 0.03 Note) Traveling parallelism does not include the mounting surface accuracy.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

Manifold Specifications

Cv C [dm3/(sbar)] b Cv 1.3 0.12 0.31 1.5 0.12 0.37 1.4 0.12 0.33 1.6 0.11 0.36 1.4 0.12 0.33 1.6 0.11 0.36 1.4 0.12 0.35 1.6 0.10 0.36 1.4 0.14 0.36 1.5 0.11 0.35 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Manifold Option Parts Assembly Individual SUP spacer An individual SUP spacer set on manifold block can form SUP port for every valve.

Manifold Specifications

Flow Characteristics at the Number of Manifold Stations (Operated single/double type individually) Passage/Stations Station 1 Station 5 Station 10 Station 15 Station 20 2.7 0.15 0.62 2.8 0.10 0.65 C [dm3/(sbar)] b Cv 2.7 0.16 0.61 2.8 0.12 0.66 2.7 0.16 0.61 2.9 0.12 0.66 2.7 0.15 0.61 2.9 0.12 0.66 2.6 0.20 0.63 2.9 0.12 0.66 1 4/2 (P A/B) C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Manifold

Compact Cylinder with Solenoid Valve/

Proper Mounting Position (Detection at Stroke End) and Mounting Height 32, 40, 50, 63 D-M9/D-M9W/D-A9 D-M9V/D-M9WV/D-A9V Hs B W A A A B (mm) D-A9V D-A9 D-M9 D-M9W D-M9V D-M9WV A B A B Bore size (mm) W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 42 10 <15> 10.5 8.5 (6)

ISG

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

3 Port Solenoid Valve Metal Seal Series VZ200 1

Cv C[dm2/(sbar)] b Cv Flow characteristics 1 2 (P A) 2 3 (A R) Body ported Max. operating frequency (c/s) (AC/DC) (1) 15 21/21 or less 0.125 15 21/21 or less 0.250 Response time (ms) (AC/DC) (2) Weight (kg) (3) Note 1) Minimum operating frequency: As per JIS B 8373 (Once in 30 days) Note 2) Based on JIS B 8375-1981 (Supply pressure; 0.5 MPa; without surge voltage suppressor) Note 3) Value

Ejector Valve Unit Series ZYY/ZYX 1

3 i w u o y q Section B-B' (Solenoid valve) Component Parts Replacement Parts Note Description Material Description Part no. No. No. SY114Urban white Resin Manifold block 3 port solenoid valve q o ZSE1-00--X130 Urban white Zinc die-casted Body Vacuum switch w !0 Urban white Resin Silencer cover P44027A End plate assembly e !1 Aluminum Nozzle AN203-KM8 Silencer r !

CG1

16 (24) 16 (24) 17 (25) 19.5 (28.5) 24 (36) 24 (36) 32.5 (46.5) 32.5 (46.5) B 20.5 (28. 5) 20.5 (28.5) 21.5 (29.5) 24 (33) 28.5 (40.5) 28.5 (40.5) B 17.5 (25.5) 17.5 (25.5) 18.5 (26.5) 21 (30) 25.5 (37.5) 25.5 (37.5) 34 (48) 34 (48) B 18 (26) 18 (26) 19 (27) 21.5 (30.5) 26 (38) 26 (38) A HS A A A B 19.5 (27.5) 19.5 (27.5) 20.5 (28.5) 23 (32) 27.5 (39.5) 27.5 (39.5) A HS A HS B 15 (22.5) 15

Support Guide/11-LEFG Series

side LES LEPY LEPS q 0.08 C side LER w LEFG32 (L = 30 mm) Displacement [mm] 0.06 LEFG25 (L = 25 mm) D side LEH LEFG16 (L = 20 mm) 0.04 LEY -X5 Model Traveling parallelism [mm] (Every 300 mm) LEFG40 (L = 37 mm) q C side traveling parallelism to A side w D side traveling parallelism to B side 11LEFS 0.02 LEFG16 0.05 0.03 LEFG25 0.05 0.03 11LEJS LEFG32 0.05 0.03 0 0 100 200 300 400 500 25ALEFG40

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

How to Order B 32 30 D C CQ2Y Standard B F9BW S 32 30 D C CDQ2Y With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

Compact Guide Cylinder

a e d c T-slot dimensions 2 x P XAH9 depth XL 2 x P (Plug) XAH9 depth XL S Q G J K PB GB GA [mm] FA PA + Stroke Bore size [mm] a b c d e FB A + Stroke B + Stroke C + Stroke 32 6.5 10.2 5.5 3.5 9.5 40 6.5 10.5 5.5 4 10 50 8.5 12.5 7.5 4 12.5 E The use of a slot (width XA, length XB, depth XC) allows for a relaxed pin pitch tolerance, with the pin hole (XAH9, depth XL) as the reference, without

CU

D-A9V D-F9V D-F9WV A 22 (20) 5 (7) W B The dimension in ( ) is for D-F9V and D-F9WV. (mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

CRB1/Size: 10, 15, 20, 30

Note) Depths of mark Q1, Q2 indicate that the body(A)/(B) are penetrated respectively.

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Air Cylinder NCQ7 Series Compact Cylinder

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Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

B B For D-F8 Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch (Lm) 11-6-10