Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

MTS Air pressure supplied from A operates on both surfaces q and w. (Extension) MY q w A B Piping is concentrated in the head cover. CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Air pressure supplied from B operates on surfaces e.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

8 q y !0 !4 !9 r !1 @0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @2 @5 o @4 @3 !2 Component Parts No. Description Spring pin Seal ring Bearing Inner wiper No.

Slider Type Ball Screw Drive/11-LEFS Series

q Check the actuator label for model number. This matches the controller/driver. w Check Parallel I/O configuration matches (NPN or PNP). q w * Refer to the Operation Manual for using the products.

2–4

6 q e r t !5 w !4 !0 u y 32 to 50 With auto switch (built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 !0 u y Description No.

LX

Home position switch De-energized operating type 0.1 Nm 24VDC 5% 5W (at 75C) Model Static torque Rated voltage Power consumption Brake specifications LC6D-220AD-Q (Refer to page 306 details.) LC6D-507AD-Q (Refer to page 306 for details.) Applicable driver Holding plate: MB1(1 pc.), Phillips countersunk head screw M3 x 6l (1 pc.)

Check Valve Series AK 1

u r y e w e y q y u r y e w u i t q i t q i t q r y e w AS e w q w ASP o Free flow Female thread Male thread ASN Free flow One-touch fitting Male thread AQ ASV AK Component Parts ASS Description Material Note No.

Lubrication Equipment

Description Material Aluminum die cast Aluminum die cast Top cover Bottom cover q w No.

FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i PF2D540 o !0 u !0 !2ywr e !

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Compact Cylinder Series NCQ8

Q J E D-rod Dia.

Soft Start-up Valve AV2000/3000/4000/5000 1

How to Find the Flow Rate (At air temperature of 20C) Choke flow: (P2 + 0.1)/(P1 + 0.1) ) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q: Air flow rate [ /min (ANR)] S: Effective area (mm2) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t: Air temperature [C] Note 1) Formulas above are

ARM10/11

1 u q SMC o A Component Parts Replacement Parts Part no. No. Material No. Material Description Description q w e r t y u i o !0 !

Size: Port Size 1/2, Number of Ports: 2 Port, Valve Type: 3 [NC (Operating Pressure 7.0MPa)], Gasket: NBR Seal, Thread: G(PF), Port Size: 1/2, Voltage: 24VDC, Lead Wire: DIN Terminal, Bracket: Bracket, CE Compliant: -

Size: Port Size 1/2, Number of Ports: 2 Port, Valve Type: 3 [NC (Operating Pressure 7.0MPa)], Gasket: NBR Seal, Thread: G(PF), Port Size: 1/2, Voltage: 24VDC, Lead Wire: DIN Terminal w/Light & Surge Voltage Suppressor, Bracket: Bracket, CE Compliant: -

Compatible Fluid: Air / Oil / Gas, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Aluminum, Application: Individual Item, Connection Type: G, Plumbing Thread Nominal: 1/2, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 15, Voltage: 24 V DC, Sealing materials

Size: 2 (ø15), Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: A (NBR), Thread: F (G), Port Size: 15A (1/2), Voltage: 5 (24VDC), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

Size: 2 (ø15), Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: B (FKM), Thread: F (G), Port Size: 15A (1/2), Voltage: 5 (24VDC), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

Size: 2 (Port Size 1/2), Number of Ports: 3 (2 Port), Valve Type: 3 [NC (Operating Pressure 7.0MPa)], Gasket: A (NBR Seal), Thread: F (G(PF)), Port Size: 15A (1/2), Voltage: 5 (24VDC), Lead Wire: D (DIN Terminal), Bracket: B (Bracket)

Size: 2 (Port Size 1/2), Number of Ports: 3 (2 Port), Valve Type: 3 [NC (Operating Pressure 7.0MPa)], Gasket: A (NBR Seal), Thread: F (G(PF)), Port Size: 15A (1/2), Voltage: 5 (24VDC), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Bracket: B (Bracket)