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CXSJ6P-: 0.009 kg, CXSJ10P-: 0.014 kg 8-28-19 19 Series CXSJ Construction: Standard Piping CXSJM (Slide bearing) CXSJL (Ball bushing bearing) CXSJM6 CXSJL6 !5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 @9 !

CXSJ6P-: 0.009 kg, CXSJ10P-: 0.014 kg 8-28-19 19 Series CXSJ Construction: Standard Piping CXSJM (Slide bearing) CXSJL (Ball bushing bearing) CXSJM6 CXSJL6 !5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !

1144 (Double, 3P) VQC201-5 T Kit: Terminal block box C8 (for 8) S Kit: Serial transmission C8 (for 8) ( ) T Kit 1 to 10 stations 4150 S Kit (without unit) Solenoid weight is not included.

8@0!7 !9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

If the membrane air dryer,s body is cooled by the surrounding air, water drops may accumulate inside and reduce its dehumidification capacity. 14-19-8 5 Membrane Air Dryer Series IDG Precautions Be sure to read before handling.

8 Round head combination screw Blanking plate Manifold gasket Manifold gasket Applicable base VK3000-9-1 Sub-plate VV5K3-40(-Q) VV5K3-(S)41(-Q) Manifold base VV5K3-(S)42(-Q) Applicable base VV5K3-20(-Q) VV5K3-21(-Q) Manifold base Manifold gasket for blanking plate Applicable base: In common for all types of VV5K3 (-Q) models Mounting Screw Tightening Torques Mounting Screw Tightening Torques

15.5 34 13 26 8 13 4 60 75 10 41 20 RS Q G FX 25 Up to 700 22 19.5 40 17 32 10 13 4 60 75 10 45 26 32 Up to 1000 22 19.5 40 17 32 12 13 4 60 75 11 45 26 20, 25, 32 RS H A 40 Up to 1000 24 21 52 22 41 14 16 5 66 36 82 12.5 50 32 NA NN P S Z ZZ H1 H2 I K MM N RZQ Bore (mm) Stroke range 20 30 M20 x 1.5 Up to 700 1/8 146 37 200 M8 x 1.25 5 8 33.5 5 20 25 MI W S 34.5 M26 x 1.5 Up to 700 1/

6 Single axis type/MY2H w @2 t @1 @9 #8 MY2H16 MY2HT16 !3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !

Springless design (No poppet spring in the wetted area) How to Order Port Number q w e r SL55 S M FV4 FV4 02 2PW Delivery pressure Code Delivery pressure Connections (Inletq, Outletw) Bonnet option 1 to 30 psig (0.007 to 0.2 MPa) Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld Code

CIhm) . ... . , ."~" ." t LZ . '"' 17 M3 xO.5 M10 x l.0 7 6.5 10.5 11 6 7 9 14 14 3 10.5 8 6 6 3.4 1.6 20 28 7 Mi2 Xl,Q 12 8 , 12 4.5 13 ~ '1 .6 24 33 ..H i 17 ~ , 20 ,', 1V14 XO.7 10 ' ... " .. ~ , ~ . .. r. 13 & :1 .:, 7 . "" , ,5 M14 XlQ 24 M5XO.8 10 10 16.5 14 6 15.5 6 7 18 2.3 43 15 12 19 10 5.5 30 20 Clevis Mount: CJPD/ Without Auto Switch zz Q S .CD B 2-M5 XO.8 GB Built In flange

DC24V General purpose output block ( EX500-Q 02 only ) Single solenoid valve Single solenoid valve Relay output module ( 1-point output ) Max. 8 stations Max. 16 stations Max. 8 stations Max. 16 stations Max. 8 stations 24 25 Common to EX500-S 01/EX500-Q Communication LED Turns on: Receiving data from GW Turns off: No received data Power LED Turns on: Power to solenoid valves/output is supplied

For subsonic range Where P1 + 0.1013 = (1 to 2) (P2 + 0.1013) Formula based on Cv factor Q = 197.8Cv P (P2 + 0.1013) kg/h Formula based on effective area Q = 11.0S P (P2 + 0.1013) kg/h [650] (133) 0.2 [646] (120) 0.1 S = 2.8mm S = 5.9mm S = 9.2mm S = 11.7mm S = 6.3mm S = 9.7mm S = 14.4mm S = 10.8mm S = 15.3mm S = 24.8mm Flow rate Q kg/h VCS212 VCS213 VCS214 VCS215 VCS 13 VCS314 VCS315

10-3-8 20, 25, 32 0.05 0.5 RS Q G RS H A Bore size (mm) Minimum operating pressure (MPa) Minimum operating piston speed (mm/s) Compact Cylinder Series CQSX RZQ 0.03 1 12, 16 MI W S 0.025 0.5 20, 25 10-3-10 CEP1 CE1 Bore size (mm) Minimum operating pressure (MPa) Minimum operating piston speed (mm/s) Compact Cylinder Series CQ2X CE2 ML2B 32, 40 0.025 0.5 50, 63, 80, 100 0.01 0.5 C J G5-S

258-9200-www.stevenengineering.com Free Mount Cylinder Series CUX Minimum operating piston speed (mm/s) Bore size (mm) Minimum operating pressure (MPa) RHC 10, 16 0.06 1 MK(2) 10-3-8 20, 25, 32 0.05 0.5 RS Q G RS H A Minimum operating piston speed (mm/s) Bore size (mm) Minimum operating pressure (MPa) Compact Cylinder Series CQSX RZQ 0.03 1 12, 16 MI W S 0.025 0.5 20, 25 10-3-10 CEP1 CE1

For subsonic range Where P1 + 0.1013 = (1 to 2) (P2 + 0.1013) Formula based on Cv factor Q = 197.8Cv P (P2 + 0.1013) kg/h Formula based on effective area Q = 11.0S P (P2 + 0.1013) kg/h [650] (133) 0.2 [646] (120) 0.1 S = 2.8mm S = 5.9mm S = 9.2mm S = 11.7mm S = 6.3mm S = 9.7mm S = 14.4mm S = 10.8mm S = 15.3mm S = 24.8mm Flow rate Q kg/h VCS212 VCS213 VCS214 VCS215 VCS 13 VCS314 VCS315

If the leakage volume is 30 /min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

NN P S ZZ Bore size Stroke range 0 -0.033 0 -0.033 0 -0.033 0 -0.039 1 8 1 8 1 8 1 4 20 M20 X 1.5 M8 X 1.25 150 to 700 18 15.5 13 26 8 20 13 10 41 5 8 33.5 5 20 30 146 200 M26 X 1.5 25 M10 X 1.25 150 to 700 22 19.5 17 32 10 26 13 10 45 6 8 37.5 5.5 20 34.5 146 204 M26 X 1.5 32 M10 X 1.25 150 to 1000 22 19.5 17 32 12 26 13 11 45 6 8 46.5 5.5 22 42.5 159 217 M32 X 2 40 M14 X 1.5 200 to 1000

8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.