Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K D L C E M I H P M5 x 0.8 A A B F 5.5 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 33 7.5 Rc 1/8 14 10.5 16 7 13 45 34 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 8 Rc 1/8 14 11 16 7 13 52 40 69 11 8 M10 x 1.5 50 Rc 1

Process Valve Series VNA

Note 3) Vacuum pilot type CE compliant pilot solenoid valves will become VO307V--Q. 367 Series VNB How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 and vacuum pilot type SF4 5 D 23 Q VO307 Q CE compliant CE compliant SF4 5 D 23 VO301 00 * Electrical entry: D or DZ only * Electrical entry: D or DZ only Body option With surge voltage suppressor Standard Vacuum pilot Nil

One-touch Fittings

Q 2 x O Oval type Round type 4, 6 8 to 16 2 x N M Q L1 L2 Q D D 1: D is maximum diameter.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No. Note Note Description Material Description Material 40 to 63 Wear ring Resin Aluminum alloy Cylinder body q !8 CE2 12 to 20 Carbon steel Brass Rod end nut !

VK3000

VV5K3-20-06 [Option] Note) CE-compliant: For DIN terminal only VV5K3-40-06-M5 Common SUP/Common EXH How to Order Type 20: Body ported (A, B port top ported) 20 05 VV5K3 Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) A port: Rc 1/8, M5 x 0.8 A, B port Rc 1/8, M5 x 0.8 VK3120 Valve stations VK332 Thread type Q CE-compliant Nil CE-compliant 01 1 station

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F|drinser rype Fighr angle lhgd q! ffiffi Key connection is ideal tor impact resistance.

CM2

NT-02 NT-03 NT-04 13 5 15.0 12.5 M8 x 1.25 17 6 19.6 16.5 M10 x 1.25 22 8 25.4 21.0 M14 x 1.5 Mounting Nut Applicable pin part no. Part no.

CM2

B H C D d NT-02 NT-03 NT-04 M8 X 1.25 13 5 15.0 12.5 CJP M10 X 1.25 17 6 19.6 16.5 M14 X 1.5 22 8 25.4 21.0 CJ2 Mounting Nut (mm) CM2 Material: Carbon steel C85 Applicable pin part No. Part No.

AR20-B to AR60-B

IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

VK300

S) 42 (-Q) VV5K3-40 (-Q) (S) 41 (-Q) (S) 42 (-Q) VV3K3-20 (-Q) 21 (-Q) VV5K3-20 (-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.

Vacuum Ejector Series ZM

ZM131H-K5LZ (-Q) ZM051H-K5LZ-E15 (-Q) ZM131H-K5LZ-E15 (-Q) ZM071H-K5LZ (-Q) ZM131M-K5LZ (-Q) ZM071H-K5LZ-E15 (-Q) ZM131M-K5LZ-E15 (-Q) ZM101H-K5LZ (-Q) ZM101H-K5LZ-E15 (-Q) 987 Series ZM Model Nozzle dia.

Auto Drain Valve Longer life & Higher resistance to foreign matter

0 in place; thus, the inside of the bowl q is shut off from the outside air. Therefore, even if there is an accumulation of condensate in the bowl q, it will not drain out. When pressure inside the bowl is released: When pressure is released from the bowl q, the diaphragm u is lowered by the spring y. The seal at the main valve !

Series VQ Metal Seal/Rubber Seal Body Ported

Description Note q Material No.

%silltr

They are as tollows: r_.013) C = 4 0 0 ' C v ' Q=21.94'kv Q = 2 2 . 2 ' s ' t-=---:-=-;;-| LtJ .t(Dz + ruJ.s,| . Ap.1l;;-v s ' . ' \ t n !

SMC Basic Pneumatics

They are as tollows: r_.013) C = 4 0 0 ' C v ' Q=21.94'kv Q = 2 2 . 2 ' s ' t-=---:-=-;;-| LtJ .t(Dz + ruJ.s,| . Ap.1l;;-v s ' . ' \ t n !

Shock Absorbers and Rate Controls

* O . b 3 z o 1 0 0 6 o u o q ; N q * E 9 . " o . 5 " > 2 4 ' ;l l.:, . . o o o 2 4 6 8 1 0 1 2 1 4 1 6 1 8 2 0 TOTAL ENERGY ( nrbtc) (Tho!ends) Note: Minimum impact velocity tor PM nlodels it 4 itr/*c. 9k**k &"bs*rbers Non-Adjustable Hydraulic Series 49rc.

Series AP3500

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.