Large Type Vacuum Unit Series ZR

SMC PRESSURE SWITCH PD PV 57 1 67 1 32.4 109 Approx. 300 Ejector RESET SET Supply valve Release valve V 21.2 Manual override Suction filter 1 2-4.6 (mounting hole) 1 5.6 1 8 1 10.2 123 1 4.6 1 8 SOL. c SOL. a Silencer SOL. b Interface A Light Suction filter Manual override Interface B Digital vacuum pressure switch M5 port PE (pilot valve exhaust port) M5 port PD (vacuum breaking pressure

IC

Purple LSB 1bit Gray 2bit Orange Output power supply voltage to pressure sensor Brown Black Input signal from pressure sensor Pressure sensor 10bit input Blue Blue Pressure sensor DC (GND) Common(GND) Note 1) IC1 (PNP open collector output type) Note 1) Connection to the pressure sensor is required only when using the external sensor type. 207 Series IC Dimensions Built-in sensor type 123

Environment

to 100 130.5 116 13 20 44 45.5 57.6 56.8 66.2 139.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 101 to 400 155.5 141 LEC SS-T 32 20 to 100 148.5 130 13 25 51 56.5 69.6 78.6 76.2 173.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 101 to 500 178.5 160 LEC Y Size Stroke range [mm] R OA OB PA PB Q S T U PC W X Y Without lock With lock Without lock With lock Motorless 25 15 to 100 8 37 38 15.4 8.2 28 46 92 1 15.4 123

C95Series

'(mm) dirEH;tion (inch2) 25 50 75 100 125 145 OUT 1.25 31 62 93 125 156 181 , 32 . 12 IN 1,07 27 54 80 107 134 155 i (2) Load of piston rod should always be aligned OUT 1.95 49 97 146 195 244 283 40 16 IN 1.64 41 82 123 164 205 237 parallel with rhe cylinder axis. Cll Avoid damaging (scratches, nicks) on the piston rod, which would lead to damage of rod seal, resulting m air leakage.

CG5-S

(mm) Bore size (mm) Stroke range A P AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA S ZZ 20 to 350 1/8 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 83 118 25 to 400 1/8 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 83 123 32 to 450 1/8 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

5H9 ( ) depth 5 +0.030 0 NN x M6 x 1 thread depth 12 A B 1 24 5.1 5.1 10.5 9.5 10.5 A B G (NN 1) x H H 21 9 21 9 A-A B-B (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123

7

P. 123 For Oil VXE Model/Valve Specifications, Fluid and Ambient Temperature, Valve Leakage Rate ...P. 124, 125 VXP How to Order . P. 126 VXR For Heated water VXH Model/Valve Specifications, Fluid and Ambient Temperature, Valve Leakage Rate ...P. 127, 128 How to Order .

Aluminum High Vacuum Angle Valve

For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1

High Vacuum Angle Valve

For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

MU

MUB32 MUB40 MUB50 MUB63 Model MUB25 MUB32 MUB40 MUB50 MUB63 M8 x 1.25 depth 13 M8 x 1.25 depth 13 M10 x 1.5 depth 15 M10 x 1.5 depth 15 7-8-6 7 Plate Cylinder Double Acting, Single Rod Series MU Dimensions of Each Mounting Axial foot style (mm) ZZ 109 122 133 159 169 Y 6 8 10 11 14 X 12 16 18 21 24 LZ 23 27 31 37 48 LY 56 71 89 109 129 LX 11 12 15 18 22 LT 3.2 4.5 4.5 5 6 LS 79 90 96 116 123

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 2-5.1 8 6 22.5 22.5 (mm) 4-M5 x 0.8 thread depth 4.5 W Z ZZ SS S Model CXSW6-10 CXSW6-20 CXSW6-30 CXSW6-40 CXSW6-50 (Piping port) (Opposite side: Same) 66 103 46 40 10 (Z) (13) (13) 76 123 56 50 20 86 143 66 60 30 96 163 76 70 40 106 183 86 80 50

MG

to 400 st 50 st 32 40 50 63 97 102 140 17.5 55.5 127 12.5 42.5 20 97 102 140 11 49 127 6 36 20 106.5 118 161 21 64 131.5 9.5 34.5 25 106.5 118 161 16 59 131.5 4.5 29.5 25 MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB Bore size (mm) 25 st 50 st 25 st 125 to 200 st 75 st 100 st 125 to 200 st 250 to 400 st 250 to 400 st 50 st 75 st 100 st 32 40 50 63 84.5 98 118 140 13.5 33.5 55.5 123

MGQ

25 196 88 196 88 294 137 294 137 353 235 539 470 30 15 17 25 26 44 47 60 61 50 12 19 19 33 34 69 47 72 167 59 167 59 255 88 255 88 304 157 470 313 75 9 15 15 28 57 53 77 59 137 275 137 275 215 392 215 392 255 863 412 1370 100 8 13 13 23 49 44 65 51 108 216 108 216 176 313 176 313 206 686 343 1070 125 42 30 56 42 87 156 87 156 138 207 138 207 168 465 278 708 150 37 26 49 36 77 136 77 136 123

MNB

51 24 247 M6 x 1.0 64.5 9 41.5 16.5 39.5 27 M14 x 1.5 55 9 6 8 50 183 11 1/4 40 237 3.2 46 58 27 279 M8 x 1.25 77.5 10.5 20 47.5 47 31.5 70 M18 x 1.5 9 7 9 63 197 14 3/8 48 251 3.6 56 58 27 296 M8 x 1.25 93 12 23 55 55.5 31.5 M18 x 1.5 80 12 7 8.5 80 245 14 3/8 55 305 4.5 72 72 30 361 M10 x 1.5 106 14 33 61 61.5 38 100 M22 x 1.5 12 10 10.5 100 265 16 1/2 65 329 4.5 89 72 32 385 M10 x 1.5 123

Stations: 11 Stations, Piping: 1 (P Common, R Common, A Side), Thread: F [G (PF)], Option: A (Mounting Adaptor)

Stations: 6 Stations, Piping: 1 (P Common, R Common, A Side), Thread: T (NPTF), Option: A (Mounting Adaptor)

Stations: 15 Stations, Piping: 1 (P Common, R Common, A Side), Thread: T (NPTF), Option: A (Mounting Adaptor)

Stations: 16 Stations, Piping: 1 (P Common, R Common, A Side), Thread: T (NPTF), Option: A (Mounting Adaptor)