Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 10 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 2 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 4 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 14 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 8 Stations, Symbol: 1, Port Size: 02 (1/4)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 3 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

Thermo-chiller

CH2: Stainless steel, Alumina ceramic, Carbon, Fluororesin, PP, PBT, POM, PU, PVC, PPS, AS, PS, EPDM, NBR, Ion replacement resin Electrical system Power supply 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) Allowable voltage range 10% (No continuous voltage uctuation) Earth leakage breaker Rated current [A] 30 40 50 Sensitivity current [mA] 30 Rated operating current4 [A] 17 32 41

High Pressure Coolant Valve

Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 217 (219) 246.5 (248.5) 282 (284) 301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41

Smooth Vent Valve

Model Valve type Piping size Orifice (mm) Internal External Fitting P.523 For VCR 1.3 x 10-11 XVD2-02V 50 0.2 MPa (G) to 1 x 10-6 5 x 10-9 1.3 x 10-11 Single acting (N.C.) 1/4 3 Main air supply: 4.6 Initial air supply: 0.2 to 4.6 Values at normal temperature, excluding gas permeation to For Swagelok 1.3 x 10-10 P.526 XVD2-02S 522 Smooth Vent Valve (Supply Line) XVD Series RoHS How to Order 02

48

Metric size*1 Inch size*1 Type 02 2*3 23 3.2*2 04 4 06 6 01 1/8" 03 5/32" 2 Elbow Control type*1 0 Meter-out 1 Meter-in *1 Metric size: Light gray Inch size: Orange *1 Meter-out and meter-in types can be visually identified by the color of the knob. Meter-out: Gray Meter-in: Light blue *2 Use 1/8" tubing. *3 Only polyurethane tubing is applicable for 2.

AR20-B to AR60-B

Example) AR30K-03BE-1NR-B w e V q Body size 20 25 30 40 50 60 Symbol Description V w With backflow function Nil Without backflow function K Note 1) With backflow function + V e Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 V r Port size + a Mounting Nil Without mounting option B Note 3) With bracket H With set nut (for panel mount) + Nil Without pressure

Series 10-, 21- AF-A Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size a Mounting Nil Without mounting option B Note 3) With bracket + Option r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

MGC

47 33 12 25 70 M8 X 1.25 40 38 188 Rc(PT)1/8 60 92 125 44 95 20 70 73 162 25 58 82.5 40.5 14 26 M8 X 1.25 45 50 241 Rc(PT)1/8 75 104 150 55 115 20 Without rear plate Long stroke Bracket mounting stroke Bracket mounting stroke Stroke range (mm) Bore (mm) Bore (mm) Bore (mm) Y R Z 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 100st or more 250 to 400 88 14 119 125st or more 350 to 500 88 14 131

-B80-NORYL F-2815-131-B85-NORYL .014 Orange F-2815-141-B80-NORYL F-2815-141-B85-NORYL .015 Black / Lt.

-B80-NORYL F-2815-131-B85-NORYL .014 Orange F-2815-141-B80-NORYL F-2815-141-B85-NORYL .015 Black / Lt.

-B80-NORYL F-2815-131-B85-NORYL .014 Orange F-2815-141-B80-NORYL F-2815-141-B85-NORYL .015 Black / Lt.

-B80-NORYL F-2815-131-B85-NORYL .014 Orange F-2815-141-B80-NORYL F-2815-141-B85-NORYL .015 Black / Lt.

-B80-NORYL F-2815-131-B85-NORYL .014 Orange F-2815-141-B80-NORYL F-2815-141-B85-NORYL .015 Black / Lt.

-B80-NORYL F-2815-131-B85-NORYL .014 Orange F-2815-141-B80-NORYL F-2815-141-B85-NORYL .015 Black / Lt.

-B80-NORYL F-2815-131-B85-NORYL .014 Orange F-2815-141-B80-NORYL F-2815-141-B85-NORYL .015 Black / Lt.