MRHQ

50 66.5 4-M5 x 0.8 depth 8 30 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 -0.062 47h9 +2.2 -0.2 20.9 opened 0 -0.1 5 41 +0.03 0 3-4H9 depth 6 (one each on three sides) 4-M3 x 0.5 (attachment mounting screw ) M5 x 0.8 Finger closing port 0 -0.1 8 0 -0.7 14.9

AS-FG/ASD-FG

15.2 8 17.9 3/8" R(PT) 1/4 23 43.8 48.8 21.8 19 42.8 37.8 27.8 39.3 AS321FG-02-10 AS321FG-N02-07 67 21 31.8 43.3 18.5 10 13.2 1/4" 17 60 NPT 1/4 19 21.8 29.5 41 AS321FG-02-12 AS321FG-N02-09 69 22 32.8 44.3 20.9 12 15.2 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 31.8 43.3 AS321FG-03-06 AS321FG-N02-11 55 17 27.8 39.3 12.8 6 17.9 3/8" 21 67 27.8 39.3 AS321FG-03-08 AS321FG-N03-07 57 18.5 29.5 41 15.2

High Purity Fluoropolymer

Model (L) 3 E J M H W ( T ) L N LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 12 10 19 12 25 19 60 53 34 SMC 30 12 33.1 28 21 65.2 58 (M) W N J SMC 58 41 36 14 40 32 26 3/4 19 63.2 (E) (T) H 69 51 81.5 36 14 49 39.5 Class 4, 5 JIS 10K flange Inch sizes H Applicable tubing O.D.

MHF2

(mm) MHZ2-20D3 42 Height Bore size 19 25 33 41 8 12 16 20 MHF2-12D 72.8 52 25 50 The low profile design saves space and reduces bending moments. Improved accuracy with smooth operation Low profile design Reduced bending moment and vibration Stroke selection is available. 3 standard stroke lengths are available for each bore size.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 300 (53) 27.5 16.3 18 1.2 13.8 13.6 7 (24.5) (7.8) 23.4 mounting hole 41 Foot bracket For the bracket assembly model, refer to page 4-14-19.

SZ3000

double solenoid For 3 position type For 4 position type [SOL.B] () Coil : SX100-41-4DCOM (+) How to Order Lead wire length 2000 mm SZ3160-5MO-M5 SX100-40-4S-20 Include the connector assembly part number together with the part number for the plug connectors solenoid valve without connector.

VM

12 x 17 Miniature pneumatic indicator VR3200 Pneumatic-electric relay Dimensions VR3200: 17 x 49 x 71 VR3201: 25 x 86 x 89 VR3201 VR4151 Relay valve 7 5 Metal Spool Dimensions Side piping: 30 x 53 x 91 Bottom piping: 30 x 48 x 91 VR4152 INDEX Mechanical Valves Page Series VM1000 P . 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41

Cylinder with Lock Series CNG

I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 34 41 42 10.3 12.8 12 25 30 30 10.3 12.8 12 + 0.058 0 -0.2 -0.4 8 8 -0.2 -0.4 10 -0.3 -0.5 18 16 20 22 34 41 42 11.5 14 14 20 25, 32 40 8.5 10.5 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 16 20 22 8 10 10 16 20 36 21 25.6 41.6 11.5 14 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 25 30 30 8.5 10.5 16 + 0.4 + 0.2 8 IY-G02 IY-G03 IY-G04 20 25, 32 40 + 0.058 0 10 + 0.058 0 10

Compact Type Dual-Rod Cylinder Series CXSJ

Auto switch model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Dimensions D-M9 Auto Switch Internal Circuit Mounting screw M2.5 x 4 L Slotted set screw D-M9B, N, P D-M9N Indicator light DC (+) Brown 2.6 Switch main circuit Switch main circuit Switch main circuit OUT Black 2.7 2.8 4 22 DC () Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC (+) Brown 22 3.2 D-M9B (

Rotary Table Series MSU

2-5.5 through Angle adjustment bolt 6 Adjustment: Max.10.2 2-M5 x 0.8 1.5 7 +0.030 0 3-4H9 long groove depth 3 ( A , B , C ) 4-M5 x 0.8 depth 10 B port A port 0.5 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 7 Rotary Table High Precision Type Series MSUA These drawings indicate the condition when the B port is pressurized.

Modular Type Filter Regulator Series AW

.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S Accessory specification Standard specification Panel mount With auto drain With pressure gauge Bracket mounting size Port size Model C 48 73 86 92 93 A 25 40 53 70 75 D 25 52 59 75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N

e-Rodless Actuator

Auto switch part no. 8 7 8 0.5 Lead wire length (m) 41 38 41 3 68 63 68 5 Auto Switch Internal Circuit D-M9N, D-M9NV Unit: mm Dimensions DC (+) Brown Mounting screw M2.5 x 4l Slotted set screw D-M9 Switch main circuit Switch main circuit Switch main circuit Indicator light OUT Black 2.6 2.7 2.8 4 DC () Blue 22 500 (3000) D-M9P, D-M9PV 3.2 DC (+) Brown 6 Most sensitive position 22 500 (3000

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Example) D-A90L Contact protection box OUT () Brown [Red] Reed switch CD-P11 OUT () Blue [Black] CD-P12 Auto Switch Weights D-A93(V) (g) D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V LED Type Brown [Red] Contact protection box OUT (+) Brown [Red] Resistor Lead wire length 0.5m 7 7 6 7 8 8 Reed switch Zener diode Lead wire length 3m 35 35 30 35 41 41 CD-P11 OUT () Blue [Black] CD-P12 Blue [Black]

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Built-in pulsation attenuator Process Pump Series PAX1000 Automatically operated type (internal switching type) Built-in solenoid valve/ Air operated type (external switching type) Prevents spraying of discharge and foaming in tank Built-in pulsation attenuator saves space and makes separate piping unnecessary A solenoid valve operated pump that fits in the palm of the hand 60 x 60 x 41

Compact Cylinder with Air Cushion Series RQ

A A1 E1 L1 MM U1 L M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 16 Y-G02 Y-G03 Y-G04 Y-G05 34 41 42 56 8.5 10.5 14 18 16 20 22 28 25 30 30 40 10.3 12.8 12 16 11.5 14 14 20 34 41 42 56 8.5 16 25 30 30 40 M8 x 1.25 10.3 11.5 21 I-G02 I-G03 I-G04 I-G05 8 10 18 22 8 10 10 14 8 10 18 22 8 10 10 14 IY-G02 IY-G03 IY-G04 IY-G05 +0.058 0 +0.4 +0.2 0.2 0.4 +0.058 0 20 10.5 12.8 14 25.6 20 M10 x 1.25 +0.058

Refrigerated Air dryer Series IDU/IDF

Note 5) Spare part for auto drain INA-20-41-04 is AD44-x445. Operation Principles Compressed air inlet Compressed air outlet IDU11D, 11C, 15C Humid hot air entering the air dryer is cooled in the after-cooler. It then enters the reheater to creat an initial condensation with cooled and dehumidified air.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 40.9 40.3 27.6 27 15.5 15.2 1.5 1.6 13 17 23 22 KFH04-00 KFH06-00 KFH08U-00 KFH08N-00 KFH10U-00 KFH10N-00 KFH12U-00 KFH12N-00 2.5 4 5 6 6.5 7.5 8 9 4 6 8 10 10 12 6 11 17 21 30 35 45 3 4 5 5.5 6.5 7 8 8 16.2 41.3 28 12 14 36 10 18.8 17 17 44.6 30 42 41 12 19.3 17 19 45.5 32 Male elbow: KFL Applicable tube (mm) Thread R(PT) Part No. H1 (Hex.) H2 (Hex.)

Air Cylinder Series MB

41 19.6 25.4 31.2 37.0 47.3 47.3 16.5 21 26 31 39 39 79.5 69.5 Note 1) When using cotter pin, flat washer is used together.

LEC-OM02904

2.1 23 2.2 24 2.3 25 2.4 SSCNET 25 2.5 27 2.6 28 3 313-39 3.1 33 3.2 37 3.3 39 3.3.1 39 3.3.2 3-10 3.3.3 CNP1CNP2CNP3 3-12 3.4 3-19 3.5 () 3-20 3.6 3-23 3.7 3-24 3.7.1 3-24 3.7.2 3-25 3.7.3 3-27 3.8 3-28 3.9 SSCNET 3-29 3.10 3-31 3.10.1 3-31 3.10.2 3-32 3.11 3-33 3.11.1 3-33 3.11.2 3-34 3.11.3 (LE--) 3-37 3.12 3-38 3.13 3-39 1 - 4 41

AC Servo Motor Driver (SSCNET /H Type)

(SeeLECSS2-T Operation Manual (Simplified Edition),section 6.3.2 for uploading.) -41- 6.7.2 To Load saved Parameters From the Parameter Setting window in the setup software, select Open. Please specify location of the file. Please select the file from which you wish to import parameters [.prm2]. Click Open.