The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted. 4/5 PORT SOLENOID VALVE. 5 port solenoid valve. 103 lb. VVD.

Clean Air Module

58 70 SF 1 A Valve open and locked position 508 10 10 SFD 95 (Lever operating direction) Max. 132 Connection part Rc 3/8 (NPT 3/8) LLB LLB A Hand valve Valve closed position AD Air operated valve 3.5 GD Clean regulator With flow adjuster Pressure outlet port Rc 1/8 One-touch fitting 12 Digital flow switch PA pilot port Rc 1/8 Restrictor (36.5) Clean air filter Note) One-touch fitting 12 103

Refrigerated Air Dryers

Applicable transformer A B C D E F G Unit weight [kg] Reference weight (including air dryer and transformer) [kg] IDF-TR500-1 51.5 IDF-TR500-2 208 56 IDF-TR500-3 284 65 IDF-TR500-4 72 171 IDU8E-10 934 IDU-TB407 370 340 45 475 605 6 IDF-TR1000-1 199 57 IDF-TR1000-2 220 63 IDF-TR1000-3 284 68 IDF-TR1000-4 75 IDU11E-10 984 IDF-TR1000-1 85 IDF-TR1000-2 220 91 IDF-TR1000-3 284 96 IDF-TR1000-4 103

0.01

Throttle needle SUP port SUP port Rc, NPT, G 1/4 P U L L Rc, NPT, G 1/4 6 118 143 144 0.1 0.1 0 MP 0 178 162 DIN connector 64.4 Manual lock DIN connector 25 43.6 41.6 Conduit terminal 82 Conduit terminal 97 With regulator + 2 port solenoid valve With 2 port solenoid valve SUP port on the right 97 Conduit terminal 82 Conduit terminal DIN connector DIN connector 0 T E S 9 0.3 133 128 0.4 103

0.5

Fine particles are generated due to wear of emitters and motor sliding during operation. 26 IZF10/IZF10R Series Dimensions 96 82 80 79 39 37 110 121 96.5 94 103 Holding bolt Bracket 60.3 6.5 46 1 Power supply switch LED indicators Balance adjustment trimmer IZF10R 98.9 Air flow adjustment switch 64.1 Without bracket (39) 30 3 x 5.5 through 33.5 1.5 4 23 25 24.5 (46) 50 12.5 66.8 5.5 5.5 30

Nozzle Type Ionizer

120 40 60 20 80 100 Flow rate [L/min (ANR)] Ionizer 21 Made to Order IZN10E Series Dimensions Energy saving static neutralization nozzle IZN10E-01-X367 (107) 16 92.5 5 9.5 12 Variable nozzle direction 46 3.5 A 18.5 6 11 6 A 12.4 8 5 6 A-A 27.7 40 M3 x 0.5 thread depth 4 (Ground terminal) 86.4 Air blow port 8 6 2 x M3 x 0.5 thread depth 10 26 34.7 11 High flow rate nozzle IZN10E-02-X367 (103

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

Relation between Operating Temperature and Maximum Operating Pressure Particulate Generation Classifications 105 1.2 Particle concentration (Particles/m3) Maximum operating pressure MPa ISO class 6 1.0 104 ISO class 5 0.8 103 ISO class 4 0.6 102 ISO class 3 0.4 10 0.2 0.1 0.5 1 1 0 -5 0 20 40 60 Operating temperature C Particle diameter (m) Note) Refer to SMC Pneumatic Clean Series (CAT.E02

KT10

MPa) 100 to 10 psig (0.7 to 69 MPa) Operating Parameters Delivery pressure Gas Source pressure Select compatible materials of construction for the gas SS body (Material code C or S): 69 MPa (10 psig) 2), Brass body (Material code B): 41.4 MPa (6000 psig) 750 psig (5.1 MPa) 1200 psig (8.2 MPa) 2250 psig (15.5 MPa) 3750 psig (25.8 MPa) 6000 psig (41.4 MPa) 9000 psig (62.1 MPa) 15000 psig (103

Industrial Filters

1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 500 20 150 54 445 318.5 240 560 935 1290 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 750 20 175 73 445 318.5 240 560 1195 1550 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 1000 20 200 92 445 318.5 240 560 1460 1815 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 500 24 260 103

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 5 213 57 275 156 80 50 1.8 96 105 2 x M8 x 1.25 19 0 236 61 340 175 60 65 2.5 120 136 2 x M10 x 1.5 15 0 1 0 1 32 (1 1/4B) 32 36 46 16 20 25 32 36 46 60 70 16 20 25 32 36 46 16 20 25 32 36 46 17 20 20 12 12 17 17 20 20 27 27 12 12 17 17 20 20 22 22 22 22 30 30 56 65 73 36 40 48 56 65 73 92 103

Suction Filter with Case FH99 Series

M16 x 2 Thread depth 30 M16 x 2 Thread depth 30 280 145 140 273 210 80 120 130 78 78 130 20 5 20 4B Weight (kg) S T U V W X Model Threaded without flange With flange FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 23 M8 x 1.25 Thread depth 8 35 6 84 180 2.4 3.4 28 35 M8 x 1.25 Thread depth 8 50 8 91 240 3.6 5.0 44 50 M8 x 1.25 Thread depth 9 62 10 103

Modular F.R.L. Units

AW30(K)-B to AW40(K)-06-B Bracket (Option) N T J M D U T N S U D M J S C R Bracket (Option) F R C B Q Q V K K IN OUT IN OUT 2 x P1 (Port size) P2 (Pressure gauge port size) B E Clearance for maintenance G Drain Panel mounting dimensions A Y W P2 2 x P1 (Port size) (Pressure gauge port size) IN OUT Z E Clearance for maintenance G Plate thickness AW30(K)-B: Max. 3.5 AW40(K)-B: Max. 5 Drain A 103

Modular Design with Uniform Body Style

maintenance G B C Q V K IN OUT IN OUT Z 2 x P1 (Port size) Plate thickness AW20-D to AW30-D : Max. 3.5 AW40-D to AW40-06-D : Max. 5 Drain A E E1 E2 E3 E4 -D to AW40-mmm E E1 E2 E3 E4 -D AW30-mmm D U M J N T S F R C Q V K IN OUT 2 x P1 (Port size) B Clearance for maintenance G Drain A E E E1 E2 E3 E4 -D AW60-mmm T N J M D U S R C B Q IN OUT 2 x P1 (Port size) Clearance for maintenance G Drain A 103

Intrinsically Safe Valve

71.7 Max. 10 L (Lead wire length) L (Lead wire length) 39 41.7 67 67 Stations n 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations 11 stations 12 stations 13 stations 14 stations 15 stations 16 stations 17 stations 18 stations 19 stations 20 stations 388 L1 L2 55 74 93 112 131 150 169 188 207 226 245 264 283 302 321 340 359 378 397 46 65 84 103

Series AP3500

Vespel is a registered trademark of DuPont. 103 Air operated type (For high pressure) Diaphragm Valve for Ultra High Purity Series AP3000 Suitable for UHP gas supply line Body material: 316L SS secondary remelt Pneumatically actuated normally closed High pressure type: Max. 3000 psig (20.7 MPa) LOTO option available as an option Indicator switch available as an option How to Order (Inlet)

Manifold Regulator ARM1000/2000 Series

plug) IR IRV VEX SRH (Pitch) IN (Individual IN) IN (Common IN) SRP SRF Symbol Model Dimensions ITV C 34 43 D 21 28 E 18 27 F 56 70 G 16 20 H 9 11.5 J 18 24 K 19 28 M 52 66 P 9 11.5 Q 11.5 16.5 R 4.8 4.8 A 4.5 4.5 B 25 34.5 ARM1000 ARM2000 IC ITVH Dimensions by the Number of Stations Manifold stations (n) ITVX Model Symbol 1 36 27 48 39 2 55 46 76 67 3 74 65 104 95 4 93 84 132 123 5 112 103

The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, 2/3 Port Mechanical Valve, MECHANICAL VALVE, 103 lb

With abrasion resistant packings and replaceable nose seals, the C85 offers exceptional service life.ISO cylinder, double acting, single rod, Bore sizes *: 8, 10, 12, 16, 20, 25, Type: non-rotating, Cushion: rubber bumper only, Strokes *: up to 300 *, Auto switches available *, Cylinder, ISO, Dbl Acting, ISO ROUND BODY CYLINDER, C82, C85, 103 lb

With abrasion resistant packings and replaceable nose seals, the C85 offers exceptional service life.Double acting, single rod, crimped cylinder, Conforms to ISO 6432 and CETOP RP52P, Bore sizes *: 8, 10, 12, 16, 20, 25, Standard strokes up to 300mm, Auto switch capable, Cylinder, ISO, Dbl Acting, ISO ROUND BODY CYLINDER, C82, C85, 103 lb

Spring extend or spring return, Bore sizes in mm: 12, 16, 20, 25, Strokes: 5mm and 10mm, Mounts: through hole, both ends tapped, foot, front or rear flanges, Variety of switches and a variety of lead wire lengths, Cylinder, Compact, COMPACT CYLINDER, 103 lb