Slider Type Ball Screw Drive/11-LEFS Series

16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load

XL-OMV0005

Bolt and Nut size Valve size Bolt size Nut size 16 M4 M4 25 M5 M5 40 M6 M6 50 M8 M8 63 M10 80 M10 6 XL-OMV0005 2-4.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

Platform Cylinder Series CXT

Q + Stroke (NA) Cylinder form 12 16 (mm) d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 x 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 x 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 x 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

x 0.8 Rc 1/8 (A port) M5 01 Body ported (Single type) VKF332 (With bracket) 5 G M5 Body ported (For manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Port size Light/Surge voltage suppressor Valve option 01 Nil For vacuum For low power consumption For vacuum/low power consumption Continuous duty type Rc 1/8 (With sub-plate) Without sub-plate Nil S None With surge voltage suppressor With

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

-21 05 Port A: Rc(PT) 1/8, M5 x 0.8 Valve stations Applicable blanking plate assembly VK300-42-1A 01 1 station 20 20 stations Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Base Mounted Type Common SUP, Common EXH Type 40/for base mounted type (Port A bottom ported) How to Order Applicable solenoid valves VKF334VV3KF3-40 05 01 Applicable blanking plate assembly VK300-42-1A Option Port P: Rc(PT)

CXT

Q + Stroke (NA) Cylinder form 12 16 d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 x 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 x 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 x 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54 9

SJ3A6

fitting [1(P) release pressure port] Applicable tubing O.D: 8, 5/16" One-touch fitting (X: External pilot port) Applicable tubing O.D: 4, 5/32" 20.5 6.2 One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D: 4, 5/32" 46.5 (with plug) F1 release pressure side Filter body assembly Connector entry upward M5 x 0.8 (with plug) 43.5 [PS pressure detection port] F2 vacuum pressure side Filter

212

140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator

VDW Series

, 1/8 M5 1 (IN) port 1 (IN) port M5, 1/8 M5 2 (OUT) port 2 (OUT) port 15 2-M2.5 x 0.45 Thread depth 3.5 2-M3 x 0.5 Thread depth 5 VDW31 36 (27.6) Lead wire l approx. 300 SMC SMC 30 40 1 1 Rectifying device AC type 45 25 34 28 Bracket assembly part number.

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

IZx-OMT0049

34 22 16 64 58 46 40 34 22 16 64 58 46 40 34 22 16 40 200 100 20 100 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0 0.1 0.2 0.3 0.4 0.5 0 0.1 0.2 0.3 0.4 0.5 Pressure [MPa] Pressure [MPa] Pressure [MPa] MPa MPa MPa a) Air supply from one side IZT4-16,22,34,40,46,58 Tube: O.D. 6 I.D. 4 b) Air supply from both sides IZT4-64,82,112 Tube: O.D. 6 I.D. 4 Measures pressure Measures Air supply 10mm IZT4-130,160,190

VP300/500/700

Common exhaust: VV3P5-41Stations 1-03 (G) (E) (T) (D, Y) (X port) (M5 x 0.8) N.C.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

, 1/8 M5 1 (IN) port 1 (IN) port M5, 1/8 M5 2 (OUT) port 2 (OUT) port 15 2-M2.5 x 0.45 Thread depth 3.5 2-M3 x 0.5 Thread depth 5 VDW31 36 (27.6) Lead wire l approx. 300 SMC SMC 30 40 1 1 Rectifying device AC type 45 25 34 28 Bracket assembly part number.

SMC Pneumatic Clean Series

C D E GA GB H H1 J K KA MM N P M S ZZ A Up to 1000 30 27 60 22 44 16 32 33 15 51 8 M8 x 1.25 M14 x 1.5 6 14 11 1/4 27 102 164 40 Up to 1000 35 32 70 27 52 20 40 35 17 58 11 M8 x 1.25 M18 x 1.5 7 18 11 3/8 30 108 177 50 Up to 1000 35 32 85 27 64 20 40 35 17 58 11 M10 x 1.25 M18 x 1.5 7 18 14 3/8 31 116 188 63 Axial Foot Style (L) / CA2L, CA2L 10112122Relief port M5 x 0.8 2-cushion valve H

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Series 12-CY3B Magnetic rodless cylinder 15, 20, 25, 32, 40 How to Order Clean series 12 Special treatment on sliding part Bore size (mm) 300 15 12 CY3B Cylinder stroke (mm) Type Bore size Port type Symbol 15 M5 x 0.8 Rc NPT G Nil 20, 25, 32, 40 TN TF Model Maximum manufacturable stroke Cushion Standard stroke (mm) Bore size (mm) Port size Lubrication Model Rubber Air 15 1000 M5 x 0.8 Rc1

VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4.5-6 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

E-MY2B_E_A

Front view Mounting holes on the top Mounting holes Theread size Name Type Mounting hole Main body M5 Side Support A Mounting hole M5 Side Support B Mounting Tap M6 x1 Side support A Side support B MY-S25A MY-S25B Mounting holes Mounting taps Installation of work Use 4 threaded holes on the top of slider for installation of work.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40

MXW Non-rotating accuracy Rc 1/8 M5 x 0.8 Rc 1/8 M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 MXJ Symbol Specifications Piping port size NPT 1/8 NPT 1/8 XC8 Adjustable stroke cylinder/Adjustable extention type G 1/8 G 1/8 MXP XC38 Vacuum (Rod through-hole) Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.

Hydraulic Cylinders

Body mounting bolt tightening torques Bore size (mm) Mounting bolt size Tightening torque (Nm) 20 25 32 40 50 63 80 100 2.5 4 7 16 30 40 70 100 M5 M5 M6 M8 M10 M12 M14 M16 Magnetic body (steel plate, etc.) 5 Compact Hydraulic Cylinder: 10MPa Series CHKDB Construction 20 to 25 32 to 100 Without auto switch Replacement parts: Seal kits Parts list Description Note Kit components Material No