Programless Controller Series LECP1 Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) Cable length (L)[m] 1 3 5 8 A B C (17.7) (17.7) 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 10 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 15 (14.2) Connector C (Terminal no.) 1 2 5 6 20 (5.5) (6.3) Actuator side (14) (18) (Terminal
Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.
Standard specifications C o Fear pressure gauge mounting R C) C c Connectron NPT 1/8 N01 C) Connection NPT 1/4 NM C o Connection NPT 3/8 NM C Note) Bfekels are shippedwiih thepack' ase (unassehbred) Port size Size ADolicable model Oplions Connection NPT 1/2 N04 Connection G 1/8 F01 o Connection G 1/4 FO2 a I a a 3ts a 1/2 a Connection G 3/8 F03 Connection G 1/2 F04 Accessory (Optional) Part
Standard specifications C o Fear pressure gauge mounting R C) C c Connectron NPT 1/8 N01 C) Connection NPT 1/4 NM C o Connection NPT 3/8 NM C Note) Bfekels are shippedwiih thepack' ase (unassehbred) Port size Size ADolicable model Oplions Connection NPT 1/2 N04 Connection G 1/8 F01 o Connection G 1/4 FO2 a I a a 3ts a 1/2 a Connection G 3/8 F03 Connection G 1/2 F04 Accessory (Optional) Part
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
Note 2) ( ): Denotes without sub-plate. 10-SV3000 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Weight (g) Note 2) Flow rate characteristics Note 1) Port Valve model Actuation type M12 waterproof connector (Cable length 300 mm) size C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv Single 250 (121) 4.1 0.41 1.1 4.1 0.29 1.0 2 position Double 253 (124) 10-SV300--02 Closed center 3.0 0.43 0.80 2.6 0.41 0.72
Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to
Note 2) Metal seal only Note 3) When -COM. is specified for the SI unit, select and mount the valve of negative common. Note 4) Dual 3-port type is not applicable. 2 2-position double (Rubber) 4-position dual 3-port valve (C) 2(B) 4(A) 2(B) (A)4 Note) C C: Locking type (Manual) (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C. N.O.
25 5 M4 x 0.7 21.5 O P Q R thread 8 to 18 S 20, 25 F E Oh9 0.1 100.2 25 L 2 x M5 x 0.8 (Piping port) M8 x 1.25 Effective thread depth 11 12 U K 2 x 5.5 through 2 x 2 x 9 counterbore depth 7 S 3 5.5 L K C 2 x 3.3 depth 3 +0.15 +0.05 R + Clamp stroke 3 4 B Q + 2 x Clamp stroke A Both ends tapped: MKA M6 x 1.0 10 10 R + Clamp stroke (Basic) (mm) B A C E F K L Oh9 Q R S U Model MKB20 MKB25 0
THREAD W M R C G J Q P K N 2 A Bowl Detail U (AF20) H L E IN OUT D Bracket (Optional) Note: Sight glass not applicable to AF20.
O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ
3 Mounting screw Finger assembly MHZL2-D MHZL2-S MHZL2-C MHZL-A1003 MHZL-A1603 MHZL-A2003 MHZL-A2503 Piston assembly wo!0!2!
O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)
Description 1 Piston seal 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 Mounting screw 6 12 7 Cover C assembly 1 Grease pack 1 2 1 2 1 The grease pack has 10 g of grease.
Density r: 1 [kg/dm3] (or, using conventional units, weight volume ratio c = 1 [kgf/L]) Specific heat C: 4.19 x 103 [J/(kgK)] (or, using conventional units, 1 x 103 [cal/(kgfC)]) 2. Values for density and specific heat change slightly according to temperature shown below. Use this as a reference.
Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S
SS Hastelloy C-22 PCTFE (Option: Vespel) Flow Characteristics 2.
tube 4/2.5) U4 (Soft tube 4/2.5) a e Y b c d Model 13.5 5 1.8 14.5 5 1.8 H: M6 x 1 H: M8 x 1 Model A B C D E Y F G F G ZPY2004U 2 1.2 0.3 4 2.6 4.6 U6 (Soft tube 6/4) U6 (Soft tube 6/4) 15.5 7 2.5 16.5 7 2.5 25 28 20 30 48 74 25 15 64 10 ZPY25D ZPY3507U 3.5 1.8 0.5 7 4.3 7.8 ZPY4010U 4 2 10 5 11 0.8 C Y A B Model ZPY10UT 10 11 1 ZPY13UT 13 14 1.5 ZPY16UT 16 17 2.5 ZPY10CT 10 11 0.8 ZPY13CT
Passage symbol (example) Passage symbol (example) 2 2 2 2 1 1 3 3 Passage: 1 2 Passage: 2 3 Operating pressure (MPa) Flow characteristics Max. system pressure (MPa) 3 1.5 Orifice diameter (mm) Model C[dm3/ (sbar)] Port 3 side Port 1 side Port 1 side C[dm3/ (sbar)] 0.08 0.20 b Cv Port 3 side b Cv VXV3131-00 VXV3133-00 VXV3241-00 VXV3341-00 VXV3243-00 VXV3343-00 0.29 0.82 0.32 0.20 0.20 0.08