Rotary Table/

34 18.5 12.6 9.2 35 4.5 29h9 29.5h9 14H9 3.8 5.3 2.5 4.2 10 3.3 6 3.5 M4 x 0.7 2.2 5.3 M4 x 0.7 4 34h9 6H9 5.5 38 23 15.5 10.5 40 4.5 33h9 17H9 5 5.3 2.5 4.2 10 4.2 7.5 4.5 M5 x 0.8 2.5 6 M4 x 0.7 4 40h9 7H9 5.5 45 30 18.4 12.2 50 5 39h9 20H9 6 6.5 2.5 4.5 11.5 4.2 7.5 4.5 M5 x 0.8 2.5 6 M5 x 0.8 5 (mm) JJ JK JU P Q S SD SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 1 2 3 7 M3 x 0.5

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Coordinates and Moments z M3: Yawing MX MTS MY CY M1: Pitching y x MG CX M2: Rolling DStatic Moment -X Ceiling mounting Horizontal mounting Wall mounting 20Data M1 M2 M2 M1 M2 M3 y X x Y y z X x Y X x Z m1 x g m2 x g m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2

Micro Mechanical Valve Series VM1000

VM131U-01-35A VM151U-01-35A 10.5 25 1.6 35.6 VM1-B Component parts Qty Bracket 1 Hexagon socket head cap screw M4 x 25 2 Hexagon nut M4 2 3.2 A-A A A 17 25.4 4 x M4 x 0.7 (Bottom mounting thread) 7 2/3 Port Mechanical Valve Series VM100 Series VM100/Bottom Ported Basic VM122-M5-00A VM132-M5-00A VM123-M5-00A VM133-M5-00A Symbol 2 port (A) 2 2 x M3 x 0.5 Actuator mounting hole 12 10 1 (P) (

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Each valve is fixed to the manifold base with two M4 mounting screws. Tighten the screws evenly when re-mounting. Tightening torque of the mounting screw (M4): 1.4 Nm 2. For mounting, tighten M4 or equivalent screws evenly into the mounting holes of the manifold base. Individual exhaust Changing from N.C. to N.O. This product is delivered as N.C. valve.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z y z M2 z Y m3 x g x X m4 x g x Y M3 m4 x g g: Gravitational acceleration Dynamic Moment z Mounting orientation Horizontal Ceiling Wall Vertical M1 x a x mn x g 1.4 100 Dynamic load FE 1 3 a Dynamic moment M1E x FE x Z a M2E Dynamic moment M2E is not generated. 1 3 M3 M3E Note) Regardless of the mounting

MTS

4-3.5 through 2 x 4-6.5, counterbore depth 3.5 (Opposite side also) 15 12 4-M4 x 0.7, effective length 7 4 8h7 0 0.015 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 24 0.2 24 0.2 32 31 40.5 M4 x 0.7 21 22 80.5 + Stroke 16 96.5 + Stroke 14 0.2 4-M4 x 0.7, effective

Compact

Size 25 Top mounting LEMHT25T-(Stroke + 220) 4.5 60 77 Stroke + 6 (77) B LEF 2 x 4 x Square nut M4 x 0.7 7.3 4.5 Origin Note 2) Origin Note 2) [Origin] Note 1) When LECP1, LECP6 or LECPMJ is used. When LECP2 is used. When LECP2 is used. LEJ 3 4.7 LEL 80 Stroke (80) Origin When LECP1, LECP6 or LECPMJ is used.

Floating Joint

force (N) Basic type Flange type Foot type Allowable Model Applicable bore size (mm) Rotating Ambient eccentricity U (mm) Operating pressure angle temperature Standard/Thread nominal size JA6-3-050 JA10-4-070 JA15-5-080 JA15-6-100 JA20-8-125 JA30-10-125 JA40-14-150 JA63-18-150 JA80-22-150 JA100-26-150 JA140-30-150 JA160-36-150 6 10 10, 15 15 20 25, 32 40 50, 63 80 100 125, 140 160 M3 x 0.5 M4

1

x 0.7 depth 7 M4 x 0.7 depth 5.5 Width across flats 6 length 3.5 M8 x 1.25 24 20 8 6.5 M4 x 0.7 25 17.5 15 17 16.5 10 14 0 0.1 2 24 6 M5 x 0.8 depth 7.5 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24

48

B 0.2 A 0.2 Bore size A [mm] B [mm] Hexagon socket head cap screw 12 (10 x 2) 52 11 M3 x 0.5 16 (12 x 2) 57 11 M4 x 0.7 20 (16 x 2) 75 14 M4 x 0.7 25 (20 x 2) 84 17 M5 x 0.8 32 (25 x 2) 98 21 M6 x 1.0 40 (32 x 2) 107 27 M8 x 1.25 50 (40 x 2) 135 37 M8 x 1.25 63 (45 x 2) 146 40 M10 x 1.5 80 (56 x 2) 184 50 M12 x 1.75 100 (71 x 2) 219 62 M14 x 2 8.

Compact Guide Cylinder

B 0.2 A 0.2 Bore size [mm] A [mm] B [mm] Hexagon socket head cap screw 12 (10 x 2) 52 11 M3 x 0.5 16 (12 x 2) 57 11 M4 x 0.7 20 (16 x 2) 75 14 M4 x 0.7 25 (20 x 2) 84 17 M5 x 0.8 32 (25 x 2) 98 21 M6 x 1.0 40 (32 x 2) 107 27 M8 x 1.25 50 (40 x 2) 135 37 M8 x 1.25 63 (45 x 2) 146 40 M10 x 1.5 80 (56 x 2) 184 50 M12 x 1.75 100 (71 x 2) 219 62 M14 x 2 7.

Wireless System

For direct mounting EX600-ZMB1 For DIN rail mounting EX600-ZMB2 EX600-ZMA2 EX600-ZMA3 (Specialized for the SY series) Enclosed parts Round head screw with washer (M4 x 20) 1 pc. P-tight screw (4 x 14) 2 pcs. Enclosed parts Round head screw (M4 x 20) 1 pc. P-tight screw (4 x 14) 2 pcs. Enclosed parts Round head screw (M4 x 5) 2 pcs.

10

Axial Mounting Lateral Mounting Body tapped Body through-hole Model Applicable bolt Max. tightening torque [Nm] Max. screw-in depth L [mm] Model Applicable bolt Max. tightening torque [Nm] Max. screw-in depth L [mm] Model Applicable bolt Max. tightening torque [Nm] MHL2-10DmZ M4 x 0.7 2.1 MHL2-16DmZ M5 x 0.8 4.3 MHL2-20DmZ M6 x 1 7.3 MHL2-25DmZ M8 x 1.25 17.7 MHL2-10DmZ M4 x 0.7 2.1 8 MHL2

CY1F

m3 x g x X m4 x g x Y M3 m4 x g g: Gravitational acceleration Dynamic moment z Mounting orientation Horizontal Ceiling Wall Vertical M1 x a x mn x g 1.4 100 Dynamic load FE 1 3 a Dynamic moment M1E x FE x Z a M2E Dynamic moment M2E is not generated. 1 3 M3 M3E Note) Regardless of the mounting orientation, dynamic moment is calculated with the formulas above.

VFS

1 Hexagon socket head screw Steel M4 x 40 M4 x 40 M4 x 40 !2 Detent assembly VF4000-12A Refer to How to Order Pilot Valve Assembly on page 3-8-70. Pilot valve assembly !

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 M5 x 0.8 M3 x 0.5 10.5 16 M6 x 1.0 M4 x 0.7 11.5 20 M8 x 1.25 M5 x 0.8 13.5 25 M10 x 1.25 M6 x 1.0 16.5 30, 40 M14 x 1.5 M8 x 1.25 22.5 Clevis pin d Dd9 m m l t L t Applicable bore size (mm) Applicable snap ring Part no.

Precision Cylinder Series MTS

x 0.7, effective length 7 4-3.5 through 2 x 4-6.5, counter bore depth 3.5 (opposite side also) 14 3.5 13 0.2 10 0.2 3.3H7 +0.012 0 6h7 0 0.012 20 0.2 28 20 0.2 27 39.5 18 17 77.5 + Stroke 15 M3 x 0.5 92.5 + Stroke 10 0.2 4-M4 x 0.7, effective length 6 19 14 0.2 Rod end male threads 6h7 0 0.012 Width across flats 5 Width across flats 5 Width across flats 5 M4 x 0.7 M4 x 0.7 5.8 8.1 8 8 8

5 Port Solenoid Valve, Series VQC

How to remove terminal block cover Loosen the 4 mounting screws (M4) and remove the terminal block cover. Mounting screw (M4) Terminal block cover M3 screw Gasket 6mm Electrical entry 2-G3/4 Step 3. How to replace the terminal block cover Securely tighten the screws to the torque shown in the table below, after confirming that the gasket is installed correctly.

LEC-OM02704CN

EMC (2) EMC NFB MC L 1 1 4 L 2 ( 1 ) 2 5 L 3 3 6 L 11 E L 21 ( 2 ) 1 1 (RAV-781BYZ-2) () 2 3 ( 2 ) 2 ( RAV-781BXZ-4 ) 1 2 3 () 1.AC200230VL1L2L3AC100 120VL31.2 2. 13 29 13 (3) (a) EMC HF3010A-UN 3-M4 4-5.57 3-M4 M4 322 1104 852 IN (41) 2584 654 2732 2884 3005 13 30 13 (b) RAV-781BYZ-2 mm 5.51 111 4.20.2 28.51.0 281.0 UL-1015AWG16 20030 0 4.50.5 1 3 2 411.0 RAV-781BXZ-4 mm 5.51

Heavy Duty Stopper Cylinder

How to replace shock absorber during maintenance Loosen the shock absorber set screw (M4) on the stopper to incline the lever by 90 and pull out the shock absorber. Note) Cautions for assembly After replacing the shock absorber, tighten the set screw firmly and apply grease to the shock absorber rod end surface. Set screw (M4) tightening torque: 1.5 Nm Apply grease 4.