Table of Contents

, 10, 16, 20, 25, 32 Long stroke Series CU Long stroke Series CU 35 Double acting Single rod Long stroke, Non-rotating rod Series CUK Long stroke, Non-rotating rod Series CUK Double acting Single rod 39 With air cushion Series CU-A With air cushion Series CU-A 20, 25, 32 Double acting Single rod 46 For vacuum Series ZCUK For vacuum Series ZCUK 10, 16, 20, 25, 32 Double acting Single rod 55

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

CXT

Stroke (NA) Cylinder form 12 16 d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 x 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 x 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 x 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54 9 23 55

CXWM/CXWL

-X 20Data 2 x 2-M5 x 0.8 Thread depth 10 4-4.3 through 4-8 counterbore depth 4.5 2 x 2-5H7 depth 6 +0.012 0 2-RB0805-X552 Shock absorber (mm) Model F ZZ Z SS S Q P L CXWM16-50 CXWM16-75 CXWM16-100 CXWM16-125 CXWM16-150 CXWM16-175 CXWM16-200 188 152 100 52 164 30 63 35 238 202 125 77 214 60 88 32.5 288 252 150 102 264 75 113 37.5 338 302 175 127 314 90 138 42.5 388 352 200 152 364 90 163 55

MGQ

M14 x 2 C dimension for a bore size of 32 to 100 is identical to the A dimension. 8-20-4 5 Compact Guide Cylinder Series MGQ Operating Conditions Allowable Lateral Load (Ordinary load) F (N) Stroke (mm) 40 13 21 22 37 38 78 53 77 Bore size (mm) MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL Bearing type 10 21 27 34 38 20 18 22 28 30 51 55

MXH

Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 18 21.5 46 47 20 23 5 20 6.5 6.5 5 NS 12.5 13 11 7.5 35 + Stroke 46.5 + Stroke 11.5 20 4-M4 x 0.7 Depth 6 5 + Stroke 12 (mm) Stroke (mm) NS LT J LA LB 5 14 10 49 4 10 49 14 10 4 15 59 24 4 20 20 24 59 4 20 25 30 30 69 4 30 69 30 30 4 40 79 45 20 6 20 50 55

10-cns-e

.: GR-S-010 (10 g), GR-S-020 (20 g) Piston seal NBR 47, 50 to 52, 55 and 56 are non-replaceable parts, so they are not included in the seal kit.

Please contact us for the latest version.sales@ocaire.com VV5Q51/55 MANIFOLD. MFLD, PLUG-IN, VQ5000. VALVE. VV5Q51/55 BASE MT 1/2. 15.70184 lb. RM.

Please contact us for the latest version.sales@ocaire.com VV5Q51/55 MANIFOLD. MFLD, PLUG-IN, VQ5000. VALVE. VV5Q51/55 BASE MT 3/8. 11.50077 lb. QM.

Base mounted plug-in manifold for VQ5*0* valve, Individual terminal block connection, Maximum 12 stations available as standard, 6 port sizes available, Several options offered VV5Q51/55 MANIFOLD. MFLD, PLUG-IN, VQ5000. VALVE. VV5Q51/55 BASE MT 1/2. 13.44819 lb. RM.

Please contact us for the latest version.sales@ocaire.com VV5Q51/55 MANIFOLD. MFLD, PLUG-IN, VQ5000. VALVE. VV5Q51/55 BASE MT 1/2. 6.91245 lb. RM.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

2.4) (94) (73.5) 5H9 (+0.030 +0 ) depth 8 (Depth of counterbore 3) C-C Lock cable Cable length 400 65 Body mounting reference plane Cable length 250 4 x M6 x 1 thread depth 12.5 (Depth of counterbore 3) (8.5) (B dimension range)1 (137) (2.4) (116.5) 44 (8.5) 5H9 ( +0.030 C C 5.5 +0 ) depth 8 60 (Depth of counterbore 3) Motor cable 42 70 (122) L (62) A (Table traveling distance)2 10 62 55

Compact

Application Example Application Example Mounting direction w (to minimize the installation width) Mounting direction q (to minimize the installation height) LEF Workpiece Workpiece LEJ Guide Guide LEL Floating bracket LEMB series LEM LEM LEMB series Floating bracket Mounting Example Mounting Example LEY 55 40 55 24 Za1 Za2 1 1 1 1 1 1 1 1 LES 40 LEPY LEPS 45 80 92 112 90 Detail drawing of

240

Rated voltage [V] 24 VDC 10% Power consumption [W] Note 9) Basic 12 28 Compact 22 Model LEPY6 Electric specifications Stroke [mm] 25 50 75 Product weight [kg] Basic 0.24 0.29 0.34 Model LEPY10 Standby power consumption when operating [W] Note 10) Basic 11 22 Compact 16 Stroke [mm] 25 50 75 Product weight [kg] Basic 0.47 0.55 0.65 Max. instantaneous power consumption [W] Note 11) Basic 22 55

Digital Gap Checker

Lead wire color Description 1 Brown DC (+) 30.8 2 White N.C. 3 Blue DC () 4 Black OUT1 15 ISA-19-m (Centralized lead wire) 19 6 5 4 30.8 MADE IN JAPAN 3 2 1 15 23.5 33 70 108 43.5 146 5000 55 184 10 222 Unit: mm 260 10 Stations Part no. L L 2 ISA-19-2 139 3 ISA-19-3 177 4 ISA-19-4 215 5 ISA-19-5 253 6 ISA-19-6 291 M12 connector no. Pin no.

25

A 13 15 22 06 08 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 End bracket/IZS40-BE 35 22 4.5 30 44 2 x 5.4 18 105 33 L 33 Intermediate bracket/IZS40-BM 55 35 22 4.5 36 30 18 2 x 5.4 A 105 33 A A-A section 432 Ionizer IZS40/41/42 Series Dimensions Feedback sensor/IZS31-DF 2 x 3.4 Amplifier 2 x 3.4 Head 1500 3500 IZS IZS 9 16.6 13 SMC IZN 4.8 10.2 25 58 4.8 69 23 87.5 IZF 78 ZVB

44

KFG2T1008-03 KFG2T1008-04 KFG2T1209-02 KFG2T1209-03 KFG2T1209-04 KFG2T1210-02 KFG2T1210-03 KFG2T1210-04 KFG2T1613-03 KFG2T1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2 12.5 15.9 12.5 15.9 13.6 17 15.8 19.2 19.6 20.9 21.3 24.5 20.9 21.3 24.5 20.9 21.3 24.5 20.9 21.3 24.5 24 27.2 13.8 15.6 13.8 15.6 16 17.8 20.4 13 17 12 17 17 21 30 34 38 55

Integrated Controller

Options Specific Product Precautions EQFS32HH/Ball Screw Drive Horizontal/Lead 24 Vertical/Lead 24 5 4.5 4 3.5 3 2.5 2 1.5 1 0.5 0 45 40 35 30 25 20 15 10 5 0 200 400 600 800 1000 1200 3000 mm/s2 3000 mm/s2 Work load: W [kg] Work load: W [kg] 5000 mm/s2 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1200 Speed: V [mm/s] EQFS32HA/Ball Screw Drive Horizontal/Lead 16 Vertical/Lead 16 60 55

AR20-B to AR60-B

2.3 24.7 28.5 14 6 AR25(K)-B 30 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 AR30(K)-B 41 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 AR40(K)-B 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40(K)-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50(K)-B 70 66 65.8 11 13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

HRL

water, Deionized water1 Set temperature range [C] CH1: 15 to 25/CH2: 20 to 40 Cooling capacity2 [kW] 9 18 19 18 26 18 Heating capacity3 [kW] 1.5 1 4.5 1 6.5 1 Temperature stability4 [C] CH1: 0.1/CH2: 0.5 Rated flow (Outlet) [L/min] 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum flow rate [L/min] 120 16 130 16 180 16 Maximum pump head [m] 50 49 55