MQQ

A B C D E F Part no.

MQQ

and Both ends tapped common): MQQTB 10, 16, 20 H thread effective depth C 2-M5 x 0.8 2 x 4-OA effective depth RA 2 x 4-OB Counterbore depth RB F Q Y I 4-N through 0.2 D E M L B + Stroke K 0.2 A + Stroke M E 25, 28 H thread effective depth C 2-Rc 1/8 F Q Y 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E Bore size (mm)

Integrated Controller

Weight [g] JX-CIS-E-1-S 88 JX-CIS-E-3-S 164 JX-CIS-E-5-S 265 JX-CIS-E-10-S 517 JX-CIA-E-1-S 88 JX-CIA-E-3-S 164 JX-CIA-E-5-S 265 JX-CIA-E-10-S 517 Power supply cable JX CD E S S 1 Connector type Cable length 1 1.5 m 3 3 m 5 5 m 10 10 m Symbol Specifications S Straight A Right angled Connector type: Straight Pin no.

JIS Standard Hydraulic Cylinder

F J K d Part no. +0.07 0 IH2-03B IH2-04B IH2-05B IH2-06B IH2-08B IH2-10B IH2-03B IH2-05C IH2-06C IH2-06B IH2-10C 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 CHQ +0.07 0 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 F J E +0.084 0 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 CHK B-series +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 +0.1 0 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0

ZSE10 compact, digital pressure switch for vacuum/compound pressure has been reduced in height by approximately 50% when compared to the ZSE30A. Up to 10 slave sensors can be set at once using the copy settings function. Options include direct mount, panel mount or DIN rail mount, and a choice of 2 piping directions., VACUUM SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, 2X, OTHER NO

CLQ

port VH Q 2 x 2-9 counterbore depth 7 H thread effective depth C 5.5 2-5.4 through M5 x 0.8 unlocking port (Unlocks when pressurized) U I 6.5 VV D M E Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M5 x 0.8 K M E S 3.2 2 x 2-M5 x 0.8 3.2 Head side cylinder port

VP300/500/700

Common exhaust: VV3P5-41Stations 1-03 (G) (E) (T) (D, Y) (X port) (M5 x 0.8) N.C.

LEC-OM02704CN

0 H RX0F RX00 1 1 FROM E 1 H RX 1 F RX 1 0 M15 M10 M5 M0 E 2 H E 2 H R X F R X 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 RX 2 F R X 2 0 2 E 3 H 2 E 3 H RX 3 F RX 3 0 2 E4 H RX4F RX40 E5 H 3 RX5F RX50 M31 M26 M21 M16 15E H RX1F RX10 1 0 RX 7E F RX 7E 0 64 15F H RX 7F F RX 7F 0 . 1 Ready bit0 1 (1) M0(RD) M1(INP) M2(CPO) M3(ZP) M4(TLC) M5 M6(MBR) M7(PUS) M8 (MOF) M9 (COF) M10(

Rotary Gripper Series MRHQ

x 0.8 Port A M5 x 0.8 Port B 4-M6 x 1 Depth 10 I N J E A D P A A M N 16.5 27 6.5 8 17.5 26 SMC R R 16 8 E O P T P A I R R Y G A R I 36 Side A Side B Scale: 40% 11 Series MRHQ Rotary Gripper 1in = 25.4mm Dimensions (mm) Scale: 50% MRHQ25 A B 58 70 93 4-M5 x 0.8 Depth 8.5 47 66h9 0 0.074 33.3 opened +2.5 0.2 10 0 0.1 12 0 0.06 M5 x 0.8 Finger closing port 19.3 closed 0 0.8 4-M5 x 0.8 (mounting

LEC-OM02904

AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45

VCC

M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm J D side G1/4 port part Tightening torque: 10 1 Nm K G e w q Note) H r q w e Note) e w q Note) F q w E C A U side B D M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm Block Assembly C: 2 port valve manifold block assembly Manifold block assembly for gate valve D: 3 port valve manifold block assembly

3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

x 0.8 (External pilot port) 15.5 15.5 4 Insulation Black () B A 17.5 A B 35 X P EB EA Insulation Red (+) E P 17 4.3 56 17 M5 x 0.8 (Pilot EXH. port) 65 62.5 109.1 66.5 (For E type) L (Lead wire length) 0.3 mm2 1.55 22 9.5 18 18 5 x 1/4" (Piping ports) 28 L plug connector with cover (LL) 52-SY5140 (R) -LL-02 L 104 (Lead wire length) Insulation: Red (+) Insulation

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 q e w t !2 !4 !3 e !0 q o Spring acting/Spring return/With auto switch (Built-in magnet) Single acting/Spring extend/With auto switch (Built-in magnet) 12, 16 !2 t w !4 y i !1 !3 e !0 q o t w !0 r q o i !1 !3 e 20, 25 w t !2 !4 !1 !3 e !0 q o w t !0 r o q !1 !3 e Component Parts Rod end nut No.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

bolt B at ot ot (For clockwise rotation end adjustment) 5 5 r r 9 se 9 e e is e wi g w g n n k k ra oc c a o t r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m

MQQ

MQQTB 10, 16, 20 H effective thread depth C 2-M5 x 0.8 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB F Q Y I 4-N through M 0.2 D E L B + Stroke K A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm)

VQ

SY SYJ (L5) Plug assembly (L4) VK 2-4.5Mounting hole 1 2 3 VVQ100-12A(L3) 88 (8.5) L2 VZ 48.7 L1 VT VT (45) (35) 33 25 (5.5) VP 23.5 12.3 VG R11 Manual override 21.5 (Min. bending inner radius) (29.3) VP 104 VQ VQZ Stations 1 2 3 4 5 n Dside Uside VZ 2-M5 X 0.8(E port) VS 2-M5 X 0.8(P port) 42.9 A A 20 (8.5) 1.5 5 n-M5 X 0.8 (A port) 5 (7.5) 15 P=10 38 Equation: L1=10n+32 L2=10n+43

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

X 0.8, Rc (PT) 1/8, C4 (4 One-touch fitting) C6 (6 One-touch fitting) M5 X 0.8 Rc (PT)1/8 Port size M5 X 0.8 A port VZ M5 X 0.8 X port (1) M5 X 0.8 M5 X 0.8 VT Body ported style SYJ5l2/SYJ5l2R 3.4 (0.19) Valve effective area (mm2)(Cv) (2) VT M5: 3.3 (0.18) 1/8: 4.8 (0.27) C4, C6: 3.8 (0.21) Base mounted style SYJ5l4/SYJ5l4R M5: 3.8 (0.21) 1/8: 4.7 (0.26) VP Note 1) Only for external pilot