Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 3 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8), Thread: T (NPTF)
Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8), Thread: T (NPTF)
Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 7 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8), Thread: T (NPTF)
Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 3 Stations, Passage: 2 (P and EA,EB: Common, Port A,B: Bottom), Port Size: 01 (1/8), Thread: T (NPTF)
Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 7 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8), Thread: T (NPTF), Control Unit: AP (Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch), Voltage of Air Release
Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 2 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8), Thread: T (NPTF), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)
Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 3 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8), Thread: T (NPTF), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)
Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 3 Stations, Passage: 2 (P and EA,EB: Common, Port A,B: Bottom), Port Size: 01 (1/8), Thread: T (NPTF), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)
Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 6 Stations, Passage: 2 (P and EA,EB: Common, Port A,B: Bottom), Port Size: 01 (1/8), Thread: T (NPTF), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)
Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 4 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8), Thread: T (NPTF), Control Unit: A (Air Filter w/Auto Drain, Regulator, Air Release Valve), Voltage of Air Release Valve: 5 (24VDC
Solenoid Direction: Opposite side of A port (A port bottom ported for Type 40), Type: 42 (A Port Side Ported; 42S: Solenoids on the Same Side of A Port), Stations: 01, Port Size: 01 (Rc 1/8), Thread: T (NPTF)
PFA/PFW Panel adapter B ZS-22-02 Thread type Piping port size Rc NPT G Nil N F 01 02 1/8 1/4 Specifications PFA301-m PFA300-m Model Specifications Note 1) 1 to 10, 5 to 50l/min (0.04 to 0.35, 0.18 to 1.77SCFM) Flow rate range measurement & setting Minimum setting unit 1% of maximum flow rate range Model PFA510-m PFA550-m Real-time flow rate l/min, CFM x 10-2 Display units Measured fluids Dry air,
Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 5 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8), Thread: T (NPTF)
Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 5 Stations, Passage: 2 (P and EA,EB: Common, Port A,B: Bottom), Port Size: 01 (1/8), Thread: T (NPTF)
Size: 01 (Size 01), Passage Symbol: FG (2 Position Double), Number of Solenoids: D (Double), Rated Voltage: 3 (24 VDC), Light/Surge Voltage Suppressor: None, Sealing Type: Metal Seal, Port Size: A01 (Side Ported, 1/8), Thread: T (NPTF)
Size: 01 (Size 01), Passage Symbol: FIG (3 Position Pressure Center), Number of Solenoids: D (Double), Rated Voltage: 4 (12 VDC), Light/Surge Voltage Suppressor: None, Sealing Type: R (Rubber Seal), Port Size: w/o Sub-plate, Thread: T (NPTF)
SFD-EL050) t Check that two connecting brackets B are attached to the filter body, and assemble the filter body to the groove of the block. GD y Mount the connecting bracket A on the assembled filter body, and tighten the hexagon socket head cap screw with the following torque.
Red flashes if the CPU is abnormal. q w e r t y u Green lights up when emitters require cleaning.
Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without
/PL / 16 108 No.EX##-OMY0006CN 22.F + + SFF 99.98% 99.98% PFDAV (T) Average Probability of -3 1% of 10 -2 1% of 10 Dangerous Failure PFH (T) Probability of dangerous -7 1% of10 -6 1% of 10 failure per hour Achievable Safety Level SIL3 / PL e SIL2 / PL d SIL3/PL e SIL2 PL d 109 No.EX##-OMY0006CN 23.GEX245-FPS EX245-FPS1/2/3 Input delay : tFilter + 2 ms tFilter = Parameterized filter