SMC Corporation of America
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N300 P NGJP seies Air Cylinder Pin Cylinder Compact Design Minimizes Mounting Space Five Mounting Styles Avaihbb Bore sizes: o6mm, a10mm, g15mm Auto Switch Capable Double Acting sil'tr 5-tt3Y*%S/DoubleA o INDEX A u t o S w i t c h . . . . . . . . 5 Contact Protection Box How to Mount How to Order 1 Specifications Mounting BracketyPart No., Options, Cylinder Theoretical Force and Weight

Nil Without port (For manifold) (8A) 1 4 02 Electrical entry Light/Surge voltage suppressor CE-compliant CE-compliant G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire Electrical entry D T C H G Only"D" Symbol Nil S Z C Conduit Note) Note) T Conduit terminal Note) D DIN terminal Symbol S: With surge voltage suppressor Note) Refer to the figure below.

6 q e r t !5 w !4 !0 u y 32 to 50 With auto switch (built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 !0 u y Description No.

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

Nil 3 S n B L F G C D T Type Lube Non-lube Air-hydro MB Nil N H MB1 Auto switch Without auto switch Refer to the table below for the applicable auto switch model.

B 40 30 D F CDLQ With Auto Switch Number of auto switches With auto switch (built-in magnet) Nil S n 2 pcs. 1 pc.

T ASR ASF Model T H D1 D2 D3 L1 L2 L6 A2 M L5 A1 Weight (g) Note 5) MAX.

80 mm/s2 Target position 2: Travel distance 5 mm, Travel speed 20 mm/s, Acceleration 80 mm/s2, Deceleration 80 mm/s2 ii.Calculation example Travel distance [Number of pulses (pulse)] = Travel distance (mm) Encoder resolution (m/pulse) Travel speed [Pulse frequency (pulse/s)] = Travel speed (mm/s) Encoder resolution (m/pulse) Acceleration and Deceleration time [s] =Travel speed (mm/s) /

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

IDX-OM-V024-F PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDFB60-11-C,L,R,T,V IDFB60-23-C,L,R,T,V IDFB70-23-C,L,R,T,V IDFB80-23-C,L,R,T,V IDFB90-23-C,L,R,T,V This manual is intended to explain the installation and operation of the product.

Symbol Specifications/Content Applicable shaft type Mass Shaft type variation X, Y, Z, T, J, K (g) S, W XA1 to XA24 Shaft pattern sequencing I Size Standard mass X, Y, Z, T, J, K XA31 to XA59 Shaft pattern sequencing II 90 180 360 XC7 S, W, X, T, J Reversed shaft 10 120 150 200 XC8 to XC11 Change of rotating range 15 220 270 380 Change of angle adjustable range (0 to 100) XC12 to XC15 20

Symbol Specifications/Content Applicable shaft type Shaft type variation X,Y,Z,T,J,K S,W XA1 to XA24 Shaft pattern sequencing I X,Y,Z,T,J,K XA31 to XA59 XC7 Shaft pattern sequencing II Weight S,W,X,T,J Reversed shaft XC8 to XC11 Change of rotating range (g) Change of angle adjustable range (0 to 100)" Size Standard weight XC12 to XC15 90 180 S,W,Y Change of angle adjustable range (90 to

Option (1) D C S Without option With locking mechanism With cancel cap With lever detection switch Action (2) D B T Double acting (1) The options can be combined, provided that the priority order is indicated as D, C, S.

-Q6312-S 325 NCA325-02AQ6311-S NCA325-03-Q6311-S Material Aluminum alloy Aluminum alloy Aluminum alloy Carbon steel Aluminum alloy Aluminum alloy Bronze casting Carbon steel Carbon steel Carbon steel Carbon steel Resin NBR NBR NBR NBR NBR NBR Resin Carbon steel 150 NCA150-02AQ6308-S NCA150-03-Q6308-S 200 NCA200-02AQ6309-S NCA200-03-Q6309-S Please see below for How to Order Cylinder Tube.

T K (3.3) D 4-G through R + Clamp stroke X Z C 0.2 2 x 4-H counterbore Q + 2 x Clamp stroke + 0.15 + 0.05 2-3.3 depth 3 K A P Both ends tapped style: MKA A thread (mm) A B Model MKA MKA50 MKA63 32 40 10 M6 x 1.0 14 M8 x 1.25 18 M10 x 1.5 R + Clamp stroke (Basic) (mm) Q A G I J S T B H K L O U C P V D E R X F Yh9 Z Model 0.1 0.2 MKB32 1 8 0 0.15 0.15 31.5 9 depth 7 M10 x 1.5 93.5 71.5 45 5.5

12 T T 12.1 12.2 z z AC240V / DC24V 5A() / 2A() DC20V 3mA IDFA60/70/80/90 Series 12-1 IDX-OM-W094 T 12.3 AC230V z ON z A(4-5) B6-7 z A4-5A B6-7B z 3 5 /() z OFF 3 z OFF 6.2 IDFA60/70/80/90 Series 12-2 IDX-OM-W094 T 12.4 M3.5 1.01.3Nm M4.0 1.42.0Nm 6 5 4 1 2 3 PE N L 7 L,N PE B A IDFA60-23-T IDFA70-23-T IDFA80-23-T IDFA90-23-T M3.5 8.5mm M4.0 9.5Mm [3.2.5 ] IDFA60

IDX-OM-U010-H PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDFC60-23-C,L,R,T,V IDFC70-23-C,L,R,T,V IDFC80-23-C,L,R,T,V IDFC90-23-C,L,R,T,V This manual is intended to explain the installation and operation of the product.

0 i r t !2 !4 y e q !3 o w u !1 M: Rod end male thread 32 to 63 With auto switch (Built-in magnet) !0 !2 r t !4 y i e q !3 o w u 80, 100 With auto switch (Built-in magnet) !0 q w e r t y u i !2 !4 !3 Component Parts Replacement Parts/Seal Kit No. Description Material Note Cylinder tube Piston Bore size (mm) Kit no.