Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/4, Output Specification: Out 1: IO-Link or NPN/PNP, Out 2: NPN, PNP, or Input, Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/o Flow Adjustment Valve, Calibration Certificate: None, Made to Order: Compatible with Argon and Carbon

Rated Flow Range: 0.5 to 50 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: Rc1/8, Output Specification: Out 1: IO-Link or NPN/PNP, Out 2: NPN, PNP, or Input, Lead Wire: Lead Wire w/Connector, Unit Specification: SI Unit Only, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: Compatible with Argon and Carbon Dioxide Mixed

EXxx-OMW0014CN

(0.1 ms) 6.431.6 ms (0.4 ms) 32132.8 ms (1.6 ms) 0.4132.8 ms IO-Link Vendor ID 065535 dec (0) Vendor ID IO-Link Device ID 016777215 dec (0) Device ID 3IO-Link Manual 63 No.EX-OMW0014CN-A Byte Swap Byte Swap 8 8 . 9-11 8 Byte Swap Direct (No swap) 0x0123 4567 89AB CDEF Swap 16 bit 0x2301 6745 AB89 EFCD Swap 32 bit 0x6745 2301 EFCD AB89 Swap All 0xEFCD AB89 6745 2301 2 swap 32bit Byte

Sensor Monitor

Maximum load current 20 mA Switch output Maximum applied voltage (NPN output) 30 VDC Internal voltage drop (Residual voltage) 1 V or less ((Load current 20 mA) Delay time 1 1 ms or less (delay time available for anti-chattering function: 20, 100, 500, 1000, 2000, 5000 ms) Hysteresis Variable from 0 2 Protection Over current protection Input type Voltage input: 1 to 5 VDC (Input impedance:

Digital Flow Switch (Remote type monitor unit)

External input does not operate No reaction to the external input The input signal duration is too short For external inputs, the white wire should be connected to GND for 30 ms or more.

JXCx-OMT0001CN

() MS LED NS LED IP 5.1 (IP ) (1)PLC (2)PLC (3) NS LED (1)PLC (2)PLC (3) NS LED NS LED IP 5.1 (IP ) -104No.JXC-OMT0001CN-C 2.3 6. 13.

Programless controller Step motor (servo 24 VDC)

(recommendation is 30 ms) between input signals and maintain the state of the signal for a minimum of 15ms (recommendation is 30 ms), because PLC processing delays and controller scanning delays can occur.

Fieldbus system PROFINET compatible SI Unit

Cycle Time 0.4 to 6.3 ms (by 0.1 ms) 6.4 to 31.6 ms (by 0.4 ms) 32 to 132.8 ms (by 1.6 ms) 0.4 to 132.8 ms Set the vendor ID. It is compared against the vendor ID of the connected IO-Link device when the device comparison function is enabled 0 to 65535 dec (Default value is 0) Set the vendor ID of the device to be connected. Vendor ID Set the device ID.

α PneuAlpha HARDWARE MANUAL

20 40 ms Response Time (I01 I08) 10 20 ms 10 20 ms Description AC Input Specication Description Sink (Common) Source (+ Common) 6 PneuAlpha Hardware Specification 2 Table 2.5: Analog Input Specications Temperature Drift +/3 LSB Offset/Gain Offset Value = 0 at 0V DC Gain Value: 0 10V = 0 250 These default values can be changed in the Offset FB Overall Accuracy +/5% (0.5V DC) Input Impedance

ZSE30/ISE30

PRESSURE PRESSURE PRESSURE PRESSURE PRESSURE OUT OUT ON: Red ON: Green OUT OUT OUT PRESSURE PRESSURE 2.5 ms 20 ms 160 ms PRESSURE PRESSURE OUT OUT ON/OFF: Red ON/OFF: Green Press the SET button to set the color and proceed to the operating mode setting. If the analog output is set, press the UP or DOWN button and select the desired display color from (Green) or (Red).

FC2W-X110

Insufcient supply ow rate Flow rate control Position control (Fully closed) 250 ms 250 ms 2000 ms 1 A

PSxx-OMU0002CN

(20,100,500,1000,2000,5000 ms ) 0 2 15 V 0.65 V 1 k 420 mA 2.420 mA 12 V 300 24 V 600 50 0.4 V 5 ms -75No.PS-OMU0002CN-D ZSE20A() ZSE20AF() ISE20A() 3 MPa,kPa,kgf/cm 2,bar,psi,InHg,mmHg MPa,kPa,kgf/cm 2, bar,psi LCD 3 (X2) 1)/ 2) 1)4 7 2)4 (1 11 7 ) ON OUT1OUT2 4 0,10,50,100,500,1000,5000 ms IP40 AC1000 V 1 50 M(DC500 V ) -550 -1060 () 3585RH() UL/CSA(E216656)CE

Digital Pressure Switch

Max. lead impedance: 300 (at power supply voltage of 12 VDC) Load impedance 600 (at power supply voltage of 24 VDC) Min. lead impedance: 50 Analog response time 20 ms Input type Non-voltage input: 0.4 V or less, Current consumption: 5.5 mA or less External input Input mode Zero-clear 5 Input time 30 ms or more -75No.PS-OMX1005 Product No.

100

or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms) ZL112A D Output Short-circuit protection Yes Unit Repeatability 0.2% F.S. 1 digit Lead wire Hysteresis mode Variable (0 to variable) Window comparator mode Hysteresis Refer to page 13.

IZN10_C

IZN10 IZN10 IZN10 IZN10 01 01 01 01 P P P P 06 06 06 06 Z Z Z Z B1 B1 B1 B1 IZN10 AC 01 02 11 Rc1/8 NPN P PNP 06 6 07 6.351/4) 16 6 ( 17 6.351/4() (3m) Z (10m) N IZN10-NT L DIN IZN10A002 IZN10B1 L B2 B3 DIN 01 06 ES 2 01 ES 17mm 2 2 02 3 3 11 Rc1/8 4 4 /IZS30 /IZS30 /IZS30 /IZS30-M2 M2 M2 M2 06 6: 07 6.351/4: 16 6 :( 17 6.35(1/4):() IZN10-CP(3m) IZN10-CPZ(10m) IZN10A003 NPN

HRX-OM-X037

or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L] 4.0 or less 4.0 or less Quoted from the standard JRA-GL-02

PSxx-OMS0004CN

[] -3No.PS-OMS0004CN-D () () () () -4No.PS-OMS0004CN-D () * C3604+AI203(96)FKM () ZS-31-X175 X188 () NG NG -5No.PS-OMS0004CN-D * (Nm) R1/8 35 R1/4 812 (50N ) () * () 6 33 ( ) () 10 m DC(-)() FG -6No.PS-OMS0004CN-D * ( ) () CE -1060 * 2030 10 1% * -7No.PS-OMS0004CN-D 0 01 PSE57 / M12(3m) 0 (01MPa) L M12(3m) 3 (-100100kPa) N 4 (0500KPa) (1~5V) 01 R1/8(M5) 28 (4~20mA) 02

AKH/AKB Series

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

VQZ Model Weight Weight (g) VFN200N/Flow Characteristics VZ Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN212N-5D-02F 240 380 VS C 2.68 2.68 b 0.40 0.40 Cv 0.72 0.72 C 5.41 5.41 b 0.31 0.31 Cv 1.38 1.38 VFN212N-5D-02F-D 2 position Single solenoid VFN Double solenoid How to Order VFN212 5 D N 02 F Z NAMUR Interface Solenoid Voltage Nil D Single solenoid Double solenoid Thread

ALF400 to 900, ALT-5/-9

Auto Feed Lube Port size Description Applicable model Symbol Nil 02 03 04 06 10 12 14 20 4 1 With bracket ALF400 to 600 B 8 3 Body size 2 1 F.R.L. 40 50 60 80 90 2 1 4 3 4 3 1 AV 1 1 1 4 1 2 1 1 2 2 1 Line pressure (MPa) AU 2 Thread type AF Nil N F Rc NPT G AR Note 1) Tank pressure is removed when line pressure is stopped.