Digital Gap Checker Smallest settable increment 1 0.01 0.1 5 C O N T E N T S ISA3 Series 3-Color Display Digital Gap Checker ISA3 Series How to Order (Without Control Unit)Page 7 How to Order (With Control Unit) Page 8 SpecificationsPage 9 Supply Pressure Dependence CharacteristicsPage 10 Response TimePage 11 Relationship between Displayed Value and DistancePage 12 Nozzle ShapePage 12 Internal Circuit and Wiring
KR KA KQG2 KG KFG2 MS KKA KP KP LQ MQR T IDK 361 KP/KPQ/KPG Series Specific Product Precautions 2 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions. Maintenance Operating Environment Warning Caution 1.
Description Material 1 Body Aluminum die-casted 2 (B) 4 (A) 2 Spool assembly Aluminum/FKM e 3 Plug (For the -X1) Steel 1 High Speed Pilot Operated Solenoid Valve DXT1215 Series How to Order Valves DXT1215 T 5 Wm U 01 N X1 w y e r t u q q Coil type w Rated voltage e Electrical entry M8 connector1 T With power-saving circuit 5 24 VDC Wm WO With straight connector cable Without connector cable
) Q R Cooling water outlet 87 G (H) K J Cooling water inlet S T 2 x 2 x U Mounting holes D N Drain C (A) B (M) W Rc (mm) B C D E F G H J K L M N P Q R S T U V W Y Z 473 ZA HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 Model A 360 570 948 1354 1612 2112 1724 1 2 3 4 1 2 1 2 3 4 3 4 3 4 3 4 1 2 1 2 3 4 395 10 10 12 18 18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139
Be sure to install the sensor at the circulating fluid inlet. 2 Peltier-type Chiller Thermo-con/Rack Mount Type Air-cooled Water-cooled HECR Series Construction and Principles Figure 2 Figure 1 Example of circulating fluid piping PE Target of temperature control Circulating fluid OUT T Peltier device (Thermo-module) The thermo-con is constructed as shown in Figure 1.
2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !
1 w r u y e t !5 !2 !4 q !0 !3 i Component Parts No.
Data Note 16 CJ-L016B CJ-F016B CJ-T016B T-bracket is used with double clevis (D). 1. For Series CJ2X, 0.1 Nl/min is the values at maximum in terms of its construction and there is internal leakage (ANR).
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70
When fluid is exhausted from the port 12(P1), the valve r connected with the piston t is closed by the return spring y. When valve opens When pressurized air enters through the port 12(P1), the valve piston moves upward by the pilot air that enters below the piston and the valve element opens.
.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--
Bodv PST Seat NSR 0 Lead wire Vinvtchloride (V,nvl sheath) Pressure sensor SUS630 G Fittings SUS304 2 Digital Pressure Switch Series ZSE6/ISE6 URJ'/4 Scale:75% (mm) Dimensions 30 (Union Ring JOint) 39 LCD W.lh back hght o -A '" '" ~ 00 '" []I-: 1DOWN button UP bulton [ ,~ LED (red) LED (green) I SET bunoo [, t::t::;I UAJ~ L 12.3 Sensor Depth 6.5 kj--t==:;A/ Welded section 2-flf2.7 20
7 t CRB2 Single vane For 180 (Indicates intermediate position) For 90 (Indicates A port pressurized) CRBU2 CRB1 @1 Component Parts MSU !1 u Material Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !
1 Resistor MI W S (g) Zener diode Auto switch model D-A33C D-A34C D-A44C CEP1 40 162 162 160 CE1 50 166 166 164 D-A34C, D-A44C Applicable bore size (mm) 63 184 184 182 CE2 80 210 210 208 Choke coil Reed switch LED 100 232 232 230 ML2B OUT (+) Terminal no. 1 OUT () Terminal no. 2 Resistor Dimensions Zener diode C J G5-S Surge absorber (mm) Applicable bore size (mm) 40 50 63 80 100 C H' T
.: FBK turbine 32, Diamond turbine oil 32 Maruzen: Turbine super 32 The {T Series W (white)} nylon tube can be used for hydraulic piping. Self-aligning fittings can be used for hydraulic piping, but one-touch fittings cannot be used. RB Make sure that there are no extreme differences in the bore of the pipes used for hydraulic piping. Also check for protrusions or burrs.
Data Note 16 CJ-L016B CJ-F016B CJ-T016B T-bracket is used with double clevis (D). 1. For Series CJ2X, 0.1 Nl/min is the values at maximum in terms of its construction and there is internal leakage (ANR).
K (3.3) D 4-G through R + Clamp stroke X Z C 0.2 2 x 4-H counterbore Q + 2 x Clamp stroke + 0.15 + 0.05 2-3.3 depth 3 K A P Both ends tapped style: MKA A thread (mm) A B Model MKA MKA50 MKA63 32 40 10 M6 x 1.0 14 M8 x 1.25 18 M10 x 1.5 R + Clamp stroke (Basic) (mm) Q A G I J S T B H K L O U C P V D E R X F Yh9 Z Model 0.1 0.2 MKB32 1 8 0 0.15 0.15 31.5 9 depth 7 M10 x 1.5 93.5 71.5 45 5.5
9 r t !8 @2 @4 !1 @3 A A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Enlarged view of A Description Material Note No.
7 t ML2B Nickel plated Carbon steel Carbon steel Zinc chromated Outer pipe Fitting bolt !8 y Aluminum alloy NBR White hard anodized Rod cover Piston seal !9 u C J G5-S NBR Bushing Rod seal A Special friction lining @0 i NBR Tube rod cover Rod seal B Carbon steel Electroless nickel plated @1 o CV NBR Nut Gasket A Carbon steel Zinc chromated @2 !