Direct air operated, 2 and 3 port valve series VXA can be used with a wide variety of fluids. The manifold for the VXA21/22 series is available in a common SUP style or individual SUP style (for vacuum use). The VXA31/32 series manifold is individual ported.
Direct air operated, 2 and 3 port valve series VXA can be used with a wide variety of fluids. The manifold for the VXA21/22 series is available in a common SUP style or individual SUP style (for vacuum use). The VXA31/32 series manifold is individual ported.
Valves are easily replaced without changing existing piping.Manifold for VX31/32/32 valves, Port size (individual port): 1/8, 1/4 Rc(PT), Maximum 10 stations available as standard, Compatible with a wide variety of fluids, C37 body, MFLD BASE, VX3200 SERIES, VALVE, VVX* MANIFOLD VX SERIES, PJ, VVX* BASE MT 1/4, 2.75577 lb, ModelOrifice diameterPort size (Common SUP/EXH type)MaterialFluid
Size: 32, Motor Mounting Position: D (In-line), Lead: B (Size 25: 6mm, Size 32/40: 8mm), Stroke: 100mm, Motor Option: B (with Lock), Rod End Thread: Rod End Female Thread, Mounting: F (Rod Flange), Actuator Cable Type, Length: M5 (5), Controller: C61 [Parallel Input (PNP)], Controller Mounting: 7 (Screw Mounting), Communication Plug Connector, I/O Cable: 3 (I/O Cable, 3m)
Slit Valve XGT Series RoHS How to Order XGT 22 2 46236 1 C Auto switch and the connector (Refer to the table below) High vacuum slit valve Valve size Gate O-ring material Number of axis Two axes bellows One axis bellows Applicable wafer size 200 mm 300 mm Symbol 22 31 Material FKM Kalrez 4079 Symbol 1 2 Opening window size Width Applicable wafer size Symbol 32 Note) Height x width (mm) 32
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: L (Left Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 200mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator Cable
Series: LEKFS, Size: 32, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 200, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R3 (3), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 7 (Screw Mounting)
Series: LEKFS, Size: 32, Motor Mounting Position: R (Right Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 200, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R3 (3), Controller: CE1 (JXCE1, EtherCAT®, Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)
Series: LEKFS, Size: 32, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 200, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R3 (3), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)
Series: LEKFS, Size: 32, Motor Mounting Position: L (Left Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 200, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R3 (3)
Series: LEKFS, Size: 32, Motor Mounting Position: L (Left Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 250, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R3 (3)
Series: LEKFS, Size: 32, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 300, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R3 (3), Controller: C61 (JXC61, Parallel I/O), Controller Mounting: 8 (DIN Rail Mounting), Communication Plug Connector
Series: LEKFS, Size: 32, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 250, Motor Option: w/o Option, Seal Band Stopper: N [Roller Type Seal Band Stopper [Grease Free]], Actuator Cable Type, Length: R3 (3), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 7
Series: LEKFS, Size: 32, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 400, Motor Option: w/o Option, Seal Band Stopper: N [Roller Type Seal Band Stopper [Grease Free]], Actuator Cable Type, Length: R3 (3), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 7
Series: LEKFS, Size: 32, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 50, Motor Option: w/o Option, Seal Band Stopper: N [Roller Type Seal Band Stopper [Grease Free]], Actuator Cable Type, Length: R3 (3), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 7
Size: 32, Motor Mounting Position: D (In-line), Lead: A (Size 25: 12mm, Size 32/40: 16mm), Stroke: 150mm, Motor Option: without Option, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Actuator Cable Type, Length: M3 (3), Controller: w/o Controller, Controller Mounting: None, Communication Plug Connector, I/O Cable: None
Size: 32, Motor Mounting Position: D (In-line), Lead: C (Size 25: 3mm, Size 32/40: 4mm), Stroke: 250mm, Motor Option: without Option, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: Ends Tapped/Body Bottom Tapped, Actuator Cable Type, Length: M3 (3), Controller: C91 (Ether Net/IPâ„¢), Controller Mounting: 8 (DIN Rail), Communication Plug Connector, I/O Cable:
Size: 32, Motor Mounting Position: D (In-line), Lead: C (Size 25: 3mm, Size 32/40: 4mm), Stroke: 30mm, Motor Option: without Option, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Actuator Cable Type, Length: M3 (3), Controller: C91 (Ether Net/IPâ„¢), Controller Mounting: 8 (DIN Rail), Communication Plug Connector, I/O Cable: None
Size: 32, Motor Mounting Position: D (In-line), Lead: A (Size 25: 12mm, Size 32/40: 16mm), Stroke: 50mm, Motor Option: B (with Lock), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Actuator Cable Type, Length: M3 (3), Controller: C91 (Ether Net/IPâ„¢), Controller Mounting: 8 (DIN Rail), Communication Plug Connector, I/O Cable: None
Size: 32, Motor Mounting Position: D (In-line), Lead: C (Size 25: 3mm, Size 32/40: 4mm), Stroke: 500mm, Motor Option: B (with Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: Ends Tapped/Body Bottom Tapped, Actuator Cable Type, Length: M3 (3), Controller: C91 (Ether Net/IPâ„¢), Controller Mounting: 8 (DIN Rail), Communication Plug Connector, I/O Cable: