CRB2-OM00001

speed and seconds of arc are found as follows. x t (1) t d t 1 / 2 t + C (2) C is integration constant.

Series MLGP

t e 2 ) 1 pcs. 15 D-P3DW(A) 2 pcs. 15 1 pc. 5 N o t e 2 ) N o t e 4 ) 2pcs.

High Vacuum L Type Valve

Description XLS-16XLS-16-P XLS-25XLS-25-P (2) Coil assembly XLS16-20-*G,C,D,T XLS16-20-P*G XLS25-20-*G,C,D,T XLS25-20-P*G (6) Core assembly XLS16-30-1 XLS25-30-1 (4) Armature assembly XLS16-30-2 XLS25-30-2 (3-1) Core O-ring AS568-018V AS568-018V (3-2) Bonnet O-ring AS568-025V AS568-030V Note) Enter voltage no. at * G, C, D, and T after * mean the symbol showing an electrical entry. 6 XL

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

Programless controller (with stroke study) Step motor (servo 24 VDC)

Speed Positioning operation 0mm/s 3) BUSY output turns off.

MLGC

Maximum piston speed: 500mm/s Able to operate at 50 to 500mm/s, if within the allowable kinetic energy range. MGG Characteristics MGC MGF Air cushion provided as standard equipment Enables the impact to be absorbed at the stroke end when the cylinder is operated at high speeds.

Ejector Valve Unit Series ZYY/ZYX 1

Note 2) V, S and R specifications are 45T, 45T1.

Digital Pressure Switch

1 k S: Analogue output 4 to 20 mA Max. load impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Min. load impedance 50 -S/-R (Auto-shift input mode) With auto-shift switch output NPN open collector output type 2 output Max. 28 V, 80 mA Residual voltage 1 V or less -17No.PS-OMM0003-J -V/-T (Analogue output mode) Switch output PNP open collector output type 2 output Max

Cylinder with Turntable Series MGT

Nil Cylinder unit/ Auto switch S 1 pc. M Slide bearing S 1 pc. 2 2 pcs. L Ball bushing bearing 3 3 pcs. Nil Without auto switch (Built-in magnet) Bore size 4 4 pcs. 63 63 mm For the applicable auto switch model, refer to the table below.

Multistage Ejector Series ZL112/212 1

Time to reach vacuum (S) The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for workpieces, etc., starting from atmospheric pressure in a 1 sealed tank.

PSxx-OMM0002CN

-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -17No.PS-OMM0002CN-F -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -A NPN2 Max.28 V80 mA 1 V -B PNP2 Max.80 mA 1 V -18No.PS-OMM0002CN-F ONOFF () ON OFF ON5OFF 20 P 1 H_1 [Pa] ON OFF [s] -19No.PS-OMM0002CN-F <> (19)

ITV

Y30 Y40 Spacer 234 Y30L Y40L Spacer with L-bracket Y30T Y40T Spacer with T-bracket qAF4000 wAFM4000 eITV3000 Modular Products and Accessory Combinations Applicable products and accessories Applicable model ITV20ll ITV30ll AF3000 AF4000 q Air filter w Mist separator e L-bracket r T-bracket t Spacer y Spacer with L-bracket u Spacer with T-bracket AFM3000 AFM4000 B310L B410L B310T B410T Y30

Clean Regulator/Fluororesin Type

y t y r i r u i !

Dedicated Controller Series LC1 Uniaxial Type

Note) The controller unit includes either T-nuts or T-brackets. Note) Pay attention to the shape of the connector on the PC.

Digital Flow Switch (Integrated display type)

PF2W704(T) 0.5 L/min 4 L/min PF2W720(T) 2 L/min 16 L/min PF2W740(T) 5 L/min 40 L/min PF2W711 10 L/min 100 L/min -46No.PF-OMO0012-E Revision history A: Contents revised in several places. B: Revision. (kPa MPa (page 38)) C: Contents revised in several places. D: Contents revised in several places. [July 2018] E: Revision.

MY1

Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) 31 Series MY1W Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

E,R.L.

Exr 27N-4O (40pm), 2NB '||oL: O.der ol assembly (Erample) OO' NAF + NAFI + iIAL Port Atlachment modl Air entry Port sire Applicable 0 6 % N P T t o I N P T Description Location s MF +NAq +a +M! NAF +6+ NAR NAC50?

ML2B

0.2 0.2 0.5 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 0.1 0.1 0.1 100 200 300 400 500 1000 1500 100 200 300400500 10001500 100 200 300400500 10001500 RS Q G YES Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) YES This system cannot be used because its learning function will not operate properly and the stopping accuracy will be worsen.

ML2B

Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) RS H A RZQ ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) MI W S 40 20 30 20 5 4 3 10 CEP1 10 5 4 3 2 ML2B40 ML2B40 ML2B40 2 5 4 3 Moment (Nm) Moment (Nm) Moment (Nm) 1 ML2B32 ML2B32 ML2B32 ML2B40 ML2B40 ML2B40 CE1 ML2B40 ML2B40 ML2B40 2 1 ML2B25 ML2B25 ML2B25 0.2 0.3 0.4 0.5 ML2B32 ML2B32 ML2B32 ML2B32 ML2B32

ML2B

0.2 0.2 0.5 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 0.1 0.1 0.1 100 200 300 400 500 1000 1500 100 200 300400500 10001500 100 200 300400500 10001500 RS Q G YES Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) YES This system cannot be used because its learning function will not operate properly and the stopping accuracy will be worsen.