High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

O

The expect ed perf orm ance and saf et y assurance w i l l be t he responsi bi l i t y of t he person w ho has det erm i ned t he com pat i bi l i t y of t he syst em .

O

The expect ed perf orm ance and saf et y assurance w i l l be t he responsi bi l i t y of t he person w ho has det erm i ned t he com pat i bi l i t y of t he syst em .

ITV-E

The expect ed perf orm ance and saf et y assurance w i l l be t he responsi bi l i t y of t he person w ho has det erm i ned t he com pat i bi l i t y of t he syst em .

VFRA3000

VFRA3111-03 VFRA3211-02 VFRA3211-03 VFRA3311-02 VFRA3311-03 VFRA3411-02 VFRA3411-03 VFRA3511-02 VFRA3511-03 1/4 3/8 1/4 3/8 1/4 3/8 1/4 3/8 1/4 3/8 0.38 0.39 0.41 0.36 0.40 0.39 0.42 0.42 0.33 (0.48) 0.34 (0.47) 1.9 2.2 1.9 2.0 1.8 1.9 1.7 1.8 1.9 (0.69) 2.2 (0.69) 0.61 Single 1/8 2 position 0.71 Double 1/8 Body ported Closed center 0.72 1/8 Exhaust center 0.72 1/8 3 position Pressure center

VZA2000

VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02 VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-01 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 Single Double Closed center Exhaust center 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49 0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9 1.9 Body ported Base mounted (With sub-plate) 2 position

15

+ A = 100 y, z + A 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A = 100

LJ1H

Nil Standard motor SMC controller Series LC1 compatible L R Left Right Lead screw lead G R Y Matsushita Electric Industrial Co., Ltd.

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p r o x i m a t e 2 Y e a r s .

Profi-E

Li neari t y F.

Aluminum High Vacuum Angle Valve

Note 2) A coating of vacuum grease [Y-VAC3] is applied to the valve seat of the vacuum part.

Compact

LEC Y The stroke adjustment unit is built into the product.

AZ1000

Delivery pressure Code 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) 02 06 10 15 Bonnet Standard Panel Installation 3) Bonnet port (NPT 1/8 inch) Code No code P BP Material 3) Panel mounting hole: dia.39.6 mm.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

AS2201F-02, AS2211F-02 AS2301F-02, AS2311F-02 AS3201F, AS3211F AS3301F, AS3311F AS4201F, AS4211F AS4301F, AS4311F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations Number of needle

JXCx-OMT0061CN

(P.32) (1) [IO] PLC PLC Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP 0B RESET 0C AREA 0C SETUP 0D WAREA 0D JOG(-) 0E ESTOP 0E JOG(+) 0F ALARM 0F FLGTH 101A CC-Link 101F CC-Link 1B READY 1C1F CC-Link (1) [] PLC RWr PLC RWw RWr bit RWw bit 0 (L) 0 1 (H) 1 (

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions (mm) Dimensions (mm) Dimensions (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41 28 43 20.5 30 13 63 65 46 68 31.5 50 4.5 21.5 100 103 69 107 47.5 80 35.5 ZP125HB ZP50HB ZP80HB 50 52 36 54 24 40.5 16.5 80 83 58 85 37 64 5 27.5 125 129 89 135 56 105 44 1213 Series ZPT/ZPX How to

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 25 100 B 2 S A1 S2 w e r t u y i o !0 !

3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

Electric Actuator Triple Axis P&P Unit

Weight of body without motor (kg) Stroke (mm) Y / Z axis in-line mount Y / Z axis side mount 100 4.2 4.7 150 4.6 5.1 200 5.0 5.5 250 5.4 5.9 300 5.8 6.3 350 6.2 6.7 400 6.6 7.1 450 7.0 7.5 500 7.4 7.9 550 7.8 8.3 Stroke (mm) Y / Z axis in-line mount Y / Z axis side mount 600 8.2 8.7 650 8.6 9.1 700 9.0 9.5 750 9.4 9.9 800 9.8 10.3 850 10.2 10.7 900 10.6 11.1 950 11.0 11.5 1000 11.4 11.9 4