SMC Pneumatic Clean Series

Ejector Vacuum regulator Outside of clean room Outside of clean room Vacuum pump Duct piping Front matter 10 System Circuit in Clean Room Clean blow system Example of equipment to suit each clean blow grade 100 Line A Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 80 Line A: For oil-free air blow Line B: For clean blow Line C: For clean

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

reduces flow setting time

59 AS331FS1-G02-12 12 18.5 43.5 28.3 59.9 17 61 AS331FS1-G03-06 6 10.4 12.9 16.6 20.2 36.1 21.4 57.8 13.3 AK 1/4 21 63.1 61.7 54.6 53.2 24.5 19.2 VCHC 45 AS331FS1-G03-08 8 13.2 38 23.5 52.2 14.2 46 AS331FS1-G03-10 10 15.9 17.4 23 42.2 28.1 50.3 15.6 47 AS331FS1-G03-12 12 18.5 43.5 28.3 52.2 17 49 AS431FS1-G04-10 10 1/2 27 15.9 17.4 18.8 25.6 47.9 26.1 61.2 64.1 62.5 55.1 53.5 15.6 26 19 80

Speed Controller: Standard Type Large Flow In-line Type AS Series

L3 (1) Model Port size Max. 1 4 1 2 120 150 AS800 AS900 74 93 204 262 192 250 80 94 1 1 , 2 Note 1) L3: Reference dimensions Note 1) L3: Reference dimensions 655

Stroke Reading Cylinder and Counter

LEFT RIGHT 35.5 A : B : C : D : t : 10 sec or more required 80 4 56 DOWN 2.5 sec or more required SEL.

The BDC Series Bi-Directional Check Valve permits a differential flow in both directions. The

Max Pressure: 100 PSIG Media: Air and Liquid Max Flow: 1,000 LPM @ 80 PSIG Min. Flow: 1 LPM @ 80 PSIG Threads: 1/4 NPT (others available upon request) Construction: 100% PVC The BDC Series Bi-Directional Check Valve permits a differential flow in both directions. The free flow direction permits flow in excess of 1,000 liters a minute.

Round Type Hydraulic Cylinder

+0.027 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 0.1 0.2 0.1 0.2 0.1 0.3 0.1 0.3 AD-FI-20 AD-FI-25 AD-FI-32 AD-FI-40 9 9 16 16 16 18 22 22 36 38 55 55 9 9 12 12 10 10 15.5 15.5 20 25 32 40 20 20 24 24 14 14 20 20 30 10 16 22 60 20 25 32 40 46 28 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 12 M4 10 10 7 5.5 5.5 6.5 M4 set screw (1 pc.) 30 10 16 22 60 46 30 12 M4 10 10 7 5.5 5.5 6.5 36 12 16 30 80

Pin Clamp Cylinders

.: 9.5 or more) Port side C 770.1 Mounting surface 300.05 Mounting surface 80 67 (215) D Port side Rc1/8 Unlocking port Unlocks when pressurized 30 2 x 6H7 Depth 10 7.5 42.5 9 Clamp arm position 48 32 4 x M8 x 1.25 Depth 12 LOCK A Same as the port side B 90 from the port side C 180 from the port side D 270 from the port side Dustproof cover (Manual unlocking unit) D Clamp arm 2 x Rc1/8 Port

Shot Pin Cylinder

95 + Stroke 40 + Stroke 0.05 24.8 40 0.1 25 View A-A 50 100 (119.3) 11 0.1 11 0.1 30 0.03 4 surfaces 2 x 9 4 surfaces 2 x 6 F7 11 0.1 11 0.1 40 0.05 45 10 15 Coil scraper 68.5 55 127 + Stroke 45 0.03 95 9.5 26.5 A A 11 30 M12 connector (4 pin) 109 Protective plate 132.5 2 x 8 F7 depth 16 90 9.5 13.5 10.5 4 x M10 depth 16 (Helisert) 45 G, NPT1/4 (Max. 69) 10 5 CKZP71-m Rod extended 16.1 80

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

85 90 95 100 105 60 65 70 75 80 85 73 78 83 88 93 98 16 to 25 Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2 x P through A1 H E 4 x T counterbore 0.5 B S Z (mm) S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0 M5

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Fittings & Tubing Air Cylinders Rotary Actuators Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Key Key +4 0 0 0 +4 0 9 y 9 A port B port 0 y A port B port a a w 0 w 1 y y e ay e k k 80 w of of y e e ke 1 g g n n f ay ra a o r n n w ge io io at ey n ot at R ra ot k R Angle adjustment range 3 n of io at e +4 0 ot R ng R ot ra at n 80 io io at 1 n ot R ay ra +4

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

0.02 0 2 x 4 depth 8 44 Auto switch mounting groove (A, B common view) 14h9-0.043 0 18 1.5 55.5 9 24.6 2-3 3.4 4.7 37 (60) 21 10 2 2 x 4.2 20 4-0.03 0 4-0.03 0 3 10-0.05 0 Open: 28, Closed: 16 2 x M4 x 0.7 thread depth 8 (Thread for mounting attachment) 18.5 18.5 7 7 5.5 5.5 936 Rotary Actuated Air Gripper MHR2 1122Without Auto Switch: MHR2-30R 1122B 1122MHR2-30E port location 76 73 120 80

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Size: 10 to 50 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed auto switch Solid state auto switch Hysteresis angle DM9 DA9, DA9V Size Rotating angle Operating angle m 10 10 10 10 Operating angle m 10 10 10 10 B 45 62 68 83 B 49 66 72 87 A 27 35 39 49 A 31 39 43 53 Hysteresis angle 90 80 65 50 42 35 30 24

CL

Fine Lock Cylinders Lock-up Cylinder Series CL 16, 20, 25, 32, 40, 50 63, 80, 100, 125, 140, 160 Locking in both directions is possible. Locking in either side of cylinder stroke is possible, too. (The lock-up cylinder can be locked only in one direction.)

Rotary Actuator/Vane Type

Adjuster/Vane Type CRB2WU Series MSZ CRQ2X MSQX How to Order Page 63 Construction Page 64 MRQ Dimensions Page 65 V Free Mount Type Rotary Actuator/Vane Type CRBU2 Series How to Order Page 68 Specifications Page 69 Construction Page 71 Dimensions Page 73 V Free Mount Type Rotary Actuator with Angle Adjuster/Vane Type CRBU2WU Series How to Order Page 78 Construction Page 79 Dimensions Page 80

15

25 70 45 80 Max. allowable thrust (N) 245 1961 422 814 150 Ambient temperature (C) 10 to 60C (No freezing) DNote) The maximum absorbed energy and maximum operating frequency was measured at ordinary temperature (approximately 20 to 25C.)

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

3 Port Air Operated Valve VPA3145/3165/3185 Series

3 4 VPA3165 82.6 1 4 8.5 1 110 17 68 75 118 45 113 36 71 95 1 1 4 1 1 1 1 4 1 2 VPA3185 118 13 2 132 14 80 95 140 52 140 41 81 105 2 1575

VXA31/32

Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.