Vacuum Pad

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

Vacuum Pad

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

Vacuum Pad

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

Vacuum Pad

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Port size Thread type Rated voltage Electrical entry Oil-free option Bracket option JSXD41 C N 03 R 1 CS None None S F 04 N 2 D B E F 3 4 5 6 7 8 B J JSXD41 Series/ Valve type Body material Seal material Port size Thread type Rated voltage Electrical entry Oil-free option Bracket option JSXD51 C N 06 R 1 CS None None S F N 2 D B E F 3 4 5 6 7 8 B J JSXD51 Series/ Valve type Body

Table of Contents

DIN rail for 9 stations J kit (Flat ribbon cable connector) S kit (Serial) kit F kit (D-sub connector) P kit (Flat ribbon cable connector) When changing the manifold style into a DIN rail mount Order brackets for mounting a DIN rail. (Refer to Option on page 2-4-24.) F 25P U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P J 20P U S Type No.

VQC

SUP block plate VVQ2000-16A EXH block plate VVQ2000-19A Port plug Note 1) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B C4 (N3) With 4 (5/32") One-touch fitting Side port Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM).

Digital Flow Switch (Manifold type)

40) (reference value) Nil S P W -55No.PF-OMW0004-B Total flow characteristics for several return units Flow range: 0.5 to 4 L/min (symbol 04) (reference value) Nil S P W -56No.PF-OMW0004-B Flow range: 2 to 16 L/min (symbol 20) (reference value) Nil S P W -57No.PF-OMW0004-B Flow range: 5 to 40 L/min (symbol 40) (reference value) Nil S P W -58No.PF-OMW0004-B Operating pressure and proof pressure

JXCx-OMX0009

A B-1 Brown 2 A A-1 Red 1 Cable length (L) B B-2 Orange 6 B A-2 Yellow 5 1 1.5m COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m (3) Shield Cable color Terminal No. Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 Actuator cable type A A-5 Black 6 B B-6 Orange 9 Nil Robotic type cable B A-6 Black 8 3 S Standard cable (4) Signal name Terminal No.

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.

JXCx-OMT0061CN

1 2 L A A-1 1 B (B-2) 6 1 1.5m B (A-2) 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m (3) Shiel d Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 S B (B-6) 9 B (A-6) 8 3 (14.2) (2 ) 2 1 (8) (1 ) B1 A1 (14) (18) (17.7) 6 5 (3 ) 2 1 B6 A6 15 16 (11) (30.7) 15.2 [820m] (1) (2) -L A B-1 2 A A-1 1 B (B-2) 6 8 8m* B (A-2) 5 COM-A/COM B-3 3 A 10m* COM-B/ A-3 4 B 15m* (3) Shield

VQ5000

B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc1/8 (external pilot port) With connector on D side (FD) 12 Base Mounted

5 Port Solenoid Valve, Series VQC

B 16 SOL. A 4 Station 6 SOL. B 17 SOL. A Individual EXH spacer VVQ1000-R-1-C6 VVQ2000-R-1-C8 EXH block plate VVQ2000-19A DIN rail mounting bracket [-D] VVQ1000-57A VVQ2000-57A Silencer (EXH port) AN200-KM8 (For VQC1000) AN200-KM10 (For VQC2000) 8 5 Station 7 21 SOL. B 9 (-S) (-T) (-S) (-T) 18 22 10 SOL. A 23 6 Station 8 11 SOL.

JXCx-OMT0062

Brown 2 A B-1 Red 1 A A-1 Cable length (L) Orange 6 B B-2 Yellow 5 B A-2 1.5m 1 Green 3 COM-A/COM B-3 Blue 4 COM-B/ A-3 3m 3 Shield Cable color Terminal no. 5m 5 Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 Actuator cable type A A-5 Black 6 B B-6 Orange 9 Nil Robotic type cable B A-6 Black 8 3 S Standard cable signal Terminal no.

Step Motor Driver （ Pulse input type ）

Brown 2 A B-1 Red 1 A A-1 Cable lengthL Orange 6 B B-2 Yellow 5 B A-2 1 1.5m Green 3 COM-A/COM B-3 Blue 4 COM-B/ A-3 3 3m Shield Cable color Terminal no. 5 5m Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 Actuator cable type A A-5 Black 6 B B-6 Orange 9 Nil Robotic type cable B A-6 Black 8 3 S Standard cable signal Terminal no.

1.1

Specify the quantity of units necessary for use with your piping system. 29 Series HRG Dimensions [Dustproof filter set] HRG-FL001 HRG-FL005 A A (10) (25) (25) B (25) (25) (10) B Surface fastener HRG-FL010 A (10) (25) (25) B (390) (390) HRG-FL015 A (10) A (10) (25) (25) (25) (25) B (Large) (Small) B (390) (390) (mm) A B C Part no.

JXCx-OMT0005CN

A 10m * 4 COM-B/ A-3 B 15m * 3 Shield C 20m * 12 Vcc B-4 13 GND A-4 * 7 A B-5 6 A A-5 * 9 B B-6 8 B A-6 3 (14.2) (2) 2 1 5.5 (18) (14) A1 B1 1 6 5 17.7 (3) 2 1 A6 B6 6.3 16 15 30.7 L (11) 59 - 15.3 [5m ] LE-CP--B(1) 2 A B-1 2 L A A-1 1 B B-2 6 B A-2 5 COM-A/COM B-3 3 COM-B/ A-3 4 3 Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (4) + B-1 4 A-1

LG1H

A A B Section BB P.C.D.

Fluoropolymer Piping Equipment

B C E E H L1 L1 L2 L2 M Min. port size (L2, L2) B M LQ3E21-S 6 4 6 17 16 16 34.5 33.5 39.5 38.5 20 3.9 LQ3E31-S 10 5 9 22.5 19.5 21 47.5 44.5 52.5 49.5 25 7.5 LQ3E32-S 8 49.5 46.5 6.3 LQ3E41-S 12 6 10 24 22 24 52.5 50.5 54.5 52.5 29 9.5 LQ3E51-S 19 7 14 26.5 24 32 64 61.5 66 63.5 37 15.8 LQ3E61-S 25 8 18 30 26 41 78 74 80 76 49 22 C 1/4 (E, E) C H L1, L1 Inch Size (E,E): Reference dimension

Membrane Air Dryer

L H o t (L) A M B C P (H) OUT IN Q N N D R (J) OUT (K) F E S G 9 (IDG3, 5 only) (Maintenance space 100 mm or more) With float With drain guide Port size A B C D E type auto-drain F G H J K L M N P Q R S Model T U IDG3V3, 3HV3, 5V3, 5HV3 IDG10V3, 10HV3 IDG20V3, 20HV3 1/4, 3/8 284 202 41.5 10 119 144 174 97 5.5 12 73 173 180 237 262 93 30 24 5.5 29 67 3.2 192 1/8, 1/4 254 55 14 208 201 129