IDX-OM-P026E

Terminal block For wiring, please refer to P.2-5 10,11Remote control 12,13Operation 14,15Failure R,S,T: Power supply PE: Ground 15 14 13 12 11 10 R S T To the users machine To the users machine Terminal connecting screw: M3 Terminal connecting screw: M5 Crimped terminal width: 6.5mm or less Crimped terminal width: 13mm or less Applicable electric wire: 8mm 2 or more Applicable electric wire

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 4 x MM thread depth J Cylinder tube outer circumference: Hard chrome plated + special treatment Note 1) 0 -0.1 L H B G E 2 x P (Piping port) G NN Effective thread length T (R) D X Mounting nut width across flats C NA I N W K N F F S + Stroke ZZ + Stroke Note 1) 50, 63: L 0 -0.2 8 x V Effective thread depth Y H A B E G Mounting nut width across

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

VT317

SY Thread type SYJ Body type Nil F N T Rc G NPT NPTF T Body ported 0 Manifold VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size VT Nil Without port (For manifold) VP 02 (8A) 1 4 Light/Surge voltage suppressor VG Valve option Electrical entry D T C H

Air Slide Table Series MXS

Applied unit Contents Contents Contents 6 8 12 16 20 25 8 12 16 20 25 6 8 12 16 20 25 MXS8R-PS MXS12R-PS MXS16R-PS MXS20R-PS MXS25R-PS MXS6P-PS MXS8P-PS MXS12P-PS MXS16P-PS MXS20P-PS MXS25P-PS MXS6-PS MXS8-PS MXS12-PS MXS16-PS MXS20-PS MXS25-PS GR-S-005 (5g) GR-S-010 (10g) GR-S-020 (20g) GR-S-050 (50g) GR-L-005 (5g) GR-L-010 (10g) GR-L-020 (20g) GR-L-050 (50g) Set of nos. above !7 to !

7

9 t q @1 w e @0!4 @3 y !6 o u !7 @2 CK1C (Clevis width 12.5) @4 i !2 !0 !1 !3 !5 Component Parts MK No.

Refrigerant R134a (HFC) 1E, 2E, 3E, 4E, 6E, 8E, 11E, 15E1 (Inlet air temperature: 35 ° C, Outlet air pressure dew point: 10 ° C) Standard Inlet Air Temperature IDF l E Series

R and S (Because S function is also included in R.) S and T (Because S function is also included in T.) The combination of K, L and M is not possible because an auto drain can only be attached to a single option. 2 The maximum operating pressure is 1.6 MPa. 3 Voltage symbol 20 (200 VAC) is the terminal block connection as standard. The Option S cannot be chosen.

ISO Standard (15552) Air Cylinder: Standard Type Double Acting, Single/Double Rod ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 CP96 Series

Moreover, the D-M9ll and A9l auto switches cannot be mounted on square groove of the CP96 series. 129 ISO Standard (15552) Air Cylinder: Standard Type Double Acting, Single/Double Rod CP96 Series Specications Bore size [mm] 32 40 50 63 80 100 Action Double acting Fluid Air Proof pressure 1.5 MPa C85 C85W C85-S/T C75-S/T C85K-S/T C75K-S/T C85K C75K C75R CP96 CP96K C96 C96K C96Y C55 C85R C75

Turntable Cylinder Series MGT

S A93 MGT Table unit switch quantity Cylinder with turntable Table unit auto switch type S 1 pc.

HRX-OM-Y098

Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

HRX-OM-X037

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

Compact Slide Series MXH

9 t !8 i !0 @0 @0 y @1 !6 w q !9 t !8 !0 i !1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Component Parts Description Material Note Note Description Material No.

Clamp Cylinder Series CK1

Grease pack part no.: GR-S-005 (compatible with all sizes) Please order 2 pieces exceeding 100 strokes.

VP3145/3165/3185

Conduit terminal (T) Grommet (G) DIN terminal (D) 48 VDC 100 VAC Neon bulb Neon bulb With indicator light (L) Coil Coil None LED Coil Coil Surge voltage suppressor (S) Coil ZNR Pressure balance among each port This solenoid valve is pressureunbalanced type. Operate it within this pressure range: IN OUT EXH.

FREE MOUNT CYLINDER

(mm) Model 6 10, 16 20, 25, 32 Single rod C(D)U*-*D 0.12 0.06 0.05 Double acting Standard Double rod C(D)UW*-*D 0.15 0.10 0.08 Single acting Single rod C(D)U*-*S, T 0.2 0.15 0.13 Single rod C(D)UK*-*D 0.15 0.10 0.08 Double acting Non-rotating type Double rod C(D)UKW*-*D 0.18 0.13 0.11 Single acting Single rod C(D)UK*-*S, T 0.23 0.18 0.16 1-2.

Peltier-type Chiller Thermo-con/ Compact Type

Cooling Sample Embedding Machine 3 C O N T E N T S HEF Series Thermo-con/Compact Type Air-cooled HEF Series Cooling Capacity Calculation. . p. 5 How to Order/Specifications. p. 6 Cooling Capacity. p. 7 Heating Capacity. p. 7 Pump Capacity (Thermo-con Outlet). . p. 7 Dimensions. . p. 8 Operation Display Panel. . p. 9 Alarm. p. 9 Maintenance. p. 9 VOption High-Pressure Pump Mounted. p. 10 VOptional

3 Port Solenoid Valve

Flow Characteristics Port size 12 Flow characteristics Manifold 23 Port 1, 2, 3 C[dm3/(s bar)] C[dm3/(s bar)] b 0.13 0.10 0.26 0.16 b 0.26 0.16 0.13 0.10 Cv 0.007 0.016 0.012 0.020 Cv 0.012 0.020 0.007 0.016 V114 V114A V124 V124A 0.032 0.070 0.050 0.085 0.050 0.085 0.032 0.070 Type VV100-S41 M5 x 0.8 Note) Values when mounted on the manifold base (5 stations).

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

5 t u y Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MDHR2 !4 q !3 @0 o !2 !1 !9 w !8 i !6 !7 i e r !5 !0 y u t Component Parts Note Description Material Note Description Material No. q w e r t y No. !1 !

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

5 t u y MDHR2 q !4 !3 o @0 !2 !1 !9 w !8 i !6 i !7 e r !5 !0 t y u Component Parts Component Parts Description Material Description Material Note No. q w e r t y No. !1 !2 !3 !4 !5 !6 !7 !8 !

Step Motor (Servo/24 VDC) Electric Actuator Miniature Rod Type LEPY Series LEPY6, 10

Only 1.5 m cables usable with open collector. 3 For the LECPMJ, only Nil, S and T are selectable since I/O cable is not included.