Flow Rate Range: 150 to 3000 ℓ/min, Port Specification: G, Port Size: 1", PF2A703H, Output Specification: 28 [NPN + Analog Output (1 to 5 V)], Lead Wire: w/o Lead Wire, Unit Specification: Fixed SI Unit

Flow Rate Range: 300 to 6000 ℓ/min, Port Specification: G, Port Size: 1 1/2", PF2A706H, Output Specification: 28 [NPN + Analog Output (1 to 5 V)], Lead Wire: w/o Lead Wire, Unit Specification: -

Flow Rate Range: 150 to 3000 ℓ/min, Port Specification: NPT, Port Size: 1", PF2A703H, Output Specification: 28 [NPN + Analog Output (1 to 5 V)], Lead Wire: w/o Lead Wire, Unit Specification: Fixed SI Unit

Flow Rate Range: 600 to 12000 ℓ/min, Port Specification: G, Port Size: 2", PF2A712H, Output Specification: 28 [NPN + Analog Output (1 to 5 V)], Lead Wire: w/o Lead Wire, Unit Specification: Fixed SI Unit

Flow Rate Range: 150 to 3000 ℓ/min, Port Specification: G, Port Size: 1", PF2A703H, Output Specification: 28 [NPN + Analog Output (1 to 5 V)], Lead Wire: -, Unit Specification: -

Flow Rate Range: 300 to 6000 ℓ/min, Port Specification: Rc, Port Size: 1 1/2", PF2A706H, Output Specification: 28 [NPN + Analog Output (1 to 5 V)], Lead Wire: M12 w/3m Lead Wire and Connector, Unit Specification: Fixed SI Unit

Flow Rate Range: 150 to 3000 ℓ/min, Port Specification: Rc, Port Size: 1", PF2A703H, Output Specification: 28 [NPN + Analog Output (1 to 5 V)], Lead Wire: -, Unit Specification: -

Multistage Ejector

Mount an air filter on the supply side to prevent it happening again. 28 - Document No.ZL-OM01001-A Trouble Cause Countermeasures Vacuum failure over time (absorbs properly initially.) Adsorbing part has some problem, such as deterioration of the vacuum pad, or leakage due to frictional wear. Replace the vacuum pad with a new one.

HRX-OM-Q033

PV SV 28. Select contact output 2 operation from the table below with [] key or [] key, and confirm by pressing SEL. Table 2.4-15 List of set values Set values Explanation Initial value (Default setting) N.O type N.C type 2.4 Setting and checking HRSH Series 2-12 HRX-OM-Q033 Chapter 2 Contact input/output communication Contact output 2 selected alarm Setting and checking 29.

Remodeled

Part number of auto switch mounting bracket 28 Revision history Initial release : 2012/5/21 Revision 1 : 2014/1/30 Add the air cushion. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation

Parallel Seal Type Slit Valve

leaves at a right angle. 3-6 At the case Gate OPEN(Fig.2B Fig.2A) After unclamp (unseal), Gate / Shaft / Lever and Roller block moves down together, then Gate opens and Slit of Body is released. 7 - 3-7 End lockin case with End Lock When the air pressure suddenly disappears at the opening and closing position of Gate, End lock pin 27 protrudes and enters the end lock groove 26 28

OML0002-C

External switch signal Current consumption: 5 mA or less Max. load current: 40 mA Max. load current: 40 mA Discharge signal Residual voltage: 1 V or less Residual voltage: 1 V or less Error signal Output signal (with load current of 40 mA) (with load current of 40 mA) Max. applied voltage: DC 28 V Maintenance signal Effective charge eliminating distance 20~500 mm 0~55oC Ambient temp.

LZ-OM003xx

L[]ZB[]3 32 52 8e9 10 21 16 L[]ZB[]3 40 55 28.5 20 28 3.2 L[]ZB[]5 55 75 38 23 33 3.2 Model no. A B C D E F Model no. A B C D E T Use 2 spanner flats when fixing the foot to the motor. Recom m ended setscrew: M6 4pcs. 4 Knock pin 2pcs. Use (1)(across flat) when fixing the foot at the rod. L[]ZB[]3 119.5+st 69.7+st 4 6.8 L[]ZB[]5 155.5+st 92.7+st 4 7 Model no.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

less 2 m or less Note 4) CN1 Emergency stop EMG 42 Servo ON SON 15 Note 4) CN6 RES 19 Reset 3 MO1 PC 17 Proportion control Analog monitor 1 10 VDC 1 LG TL 18 External torque limit selection 10 VDC Analog monitor 2 2 MO2 LSP 43 Forward rotation stroke end LSN 44 Reverse rotation stroke end 2 m or less DOCOM 47 Upper limit setting P15R 1 Analog torque limit +10 V/Maximum torque TLA 27 LG 28

Centering Unit

P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD PE Q S T U W MACM2 X114 68 74 76 10 27.4 12 34 X115 52 6 62 X116 50 4 30 46 60 64 22.5 MACM4 X114 86 90 90 72 78 32.5 50 19 32 20 33 X115 56 6 78 40 X116 54 4 40 6.6 12 19 17 18 M5 7 MACM6 X114 118 125 125 97 113 33.8 53 28

06-rear-e

.: GR-S-010 (10 g) Scraper NBR Cushion seal Chromated NBR Magnetic shielding plate Clear anodized Rolled steel plate Switch rail 27 Aluminum alloy Magnet 28 Nickel plated Hexagon socket head cap screw 29 #0 Chromium steel Wear ring C Special resin 26 to 29 are non-replaceable parts, so they are not included in the seal kit. 163

06-rebr-e

Scraper NBR Cushion seal NBR Switch rail gasket NBR Magnetic shielding plate Rolled steel plate/Chromated Switch rail 27 Aluminum alloy/Clear anodized Magnet 28 Hexagon socket head cap screw 29 #0 Chromium steel/Nickel plated Wear ring C Special resin 171

Filter Regulator IW Series

Description Material Part no. 5 Diaphragm assembly Aluminum die-casted/Brass/NBR P218010-1 6 Element Bronze 1301-5B 7 Seal NBR 1301510 DRAIN 8 Filter disk assembly Brass/NBR P218010-16 9 O-ring NBR AS568-228 10 O-ring NBR JISB2401 P4 156 Filter Regulator IW Series Dimensions 15 Panel mounting hole Max. 4 M14 x P1.5 Panel 3.2 BLEED 68 208 60 28 View A OUT SUP 54 46 140 10 Pressure gauge port

1

temperature 10 to 70C Size Applicable cylinder Nominal thread size 20 For 20 M8 x 1.25 32 For 25 M10 x 1.25 For 32 M10 x 1.25 40 For 40 M14 x 1.5 Dimensions M, P D M E F C G A B H Standard Pneumatic: Up to 0.7 MPa [mm] Model Connection thread M A B C D E mF G Width across flats H Maximum thread depth P Weight JT20 M8 x 1.25 19.2 8 11 (25.4) 23 10 13.6 22 9.5 22 g JT32 M10 x 1.25 23 10 13.4 (30.6) 28

Air Cylinder

11 51 11 M6 x 1 7 16 11 M18 x 1.5 22 1/4 73 135 67 Up to 400 35 32 75 27 58 18 38 6 11 51 11 M8 x 1.25 7 16 11 M18 x 1.5 22 1/4 73 135 80 Up to 500 40 37 88 32 69 22 45 12 13 62 13 M8 x 1.25 7 19 13 M22 x 1.5 26 1/4 83 158 85 Up to 500 40 37 95 32 74 22 45 12 13 62 13 M10 x 1.25 7 19 14 M22 x 1.5 26 1/4 83 159 100 Up to 500 40 37 110 41 87 26 50 10 14 66 16 M10 x 1.25 12 23 14 M26 x 1.5 28