Step Motor Controller (Servo / 24 VDC)

Vcc B-4 Brown 12 Actuator cable type GND A-4 Black 13 A B-5 Red 7 Nil Robotic type cable A A-5 Black 6 B B-6 Orange 9 S Standard cable B A-6 Black 8 3 Electric Actuator side Controller side (2) Actuator cable (8-20m) -Cable color Terminal no. signal Terminal no.

air-filter-e

X77 A B X78 Symbol Port size Accessory Port size Rc 3/8 1/2 3/4 Accessory Symbol Nil None Bracket 03 04 06 B Symbol Element seal material Note 1) Symbol Element category Element seal material Non-asbestos Fluororesin NBR FKM Material Bronze Stainless steel Polypropylene Glass fiber Cotton Cotton Stainless steel 304/Epoxy Stainless steel 316 Element type A Note 2) B S T G H P M L Sintered

Air Preparation Equipment

X77 A B X78 Symbol Port size Accessory Port size Rc 3/8 1/2 3/4 Accessory Symbol Nil None Bracket 03 04 06 B Symbol Element seal material Note 1) Symbol Element category Element seal material Non-asbestos Fluororesin NBR FKM Material Bronze Stainless steel Polypropylene Glass fiber Cotton Cotton Stainless steel 304/Epoxy Stainless steel 316 Element type A Note 2) B S T G H P M L Sintered

High performance type Step Motor Controller (Servo/24 VDC)

13 Actuator cable type A B-5 Red 7 A A-5 Black 6 Robot cable Nil B B-6 Orange 9 B A-6 Black 8 Standard cable S 3 Electric actuator side Controller side 14.2 (2) 1 2 (8) (1) (14) 18 A1 B1 17.7 5 6 (3) 1 2 A6 B6 L 15 16 30.7 11 2 Actuator cable [8 to 20 m] (1) (2) A B-1 Brown 2 A A-1 Red 1 UCable length (L) B B-2 Orange 6 B A-2 B-3 A-3 Yellow 5 8m*1) 8 Green 3 Blue 4 10m*1) A Shield (

VQ5000

port B 2 A 4 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override B 2 A 4 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P = 41 58.5 P = 41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (Single, Double, 3 position, Rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc 1/8 (External pilot port) With connector on D side (FD) 2-6-12

I/O Configurator (NFC version)

No.EX-OMV0017-B

OMR0031

Controller USB cable Communication 120.3 120.3 mm mm 200 200 mm/s mm/s (type A to mini-B) cable 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN3 PC (PC is prepared by the user.) 20 - 4.4 CN4: Counter connector (option) Connect the controller to the Multi-counter (CEU5) using the counter cable (LATH3-). Refer to section 6.2 Counter plug wiring (P.24).

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

T) LVQ LQ (mm) Dimensions PB LVN T U Model LVD2-S LVD3-S LVD4-S LVD5-S PA 28 9.6 TI/ TIL 34 17.5 A B 35 20 U PA 57 25 PAX With flow rate adjustment & by-pass PB (Max. S) (Max.

High Purity Chemical Valve

S) PB PA PB SMC B PA A A B SMC SMC Dimensions (Max. T) (mm) S Model LVC2m LVC3m LVC4m LVC5m LVC6m Dimensions 12.5 (mm) T 24 Model LVC3m LVC4m LVC5m 29 49.5 34.5 54.5 36 60.5 With indicator With flow rate adjustment & bypass (Max. S) PB W PA A B SMC A B Dimensions (Max.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q H R R H F F E E D C D C Y Y 2.5 2.5 A B A B With a stroke of 10mm With a stroke of 20 to 50mm Dimensions/10mm stroke Additional dimensions by stroke(mm) (mm) I H J Q: 6 Q: 8 Stroke A B C D E F H I J Y Model R S R S 20 +10 3 0 ZPR40F10-0-A14 ZPR50F10-0-A14 30 40 43 12.5 18.5 32.3 49.5 61.5 129.5 5 +20 +7 50 12.8 24.3 15.2 26.2 50 50 53 13.5 19.5 33.3 50.5 62.5 130.5 6 +25 +40 +52 15

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(increment of 0.1 s), 1 to 10 s (increment of 1 s), 20 s, 30 s, 40 s, 50 s, or 60 s.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

(L2,L2) B E L2 L1 E L2 M H B Model M 6 10 8 12 19 25 LQ3E21-S LQ3E31-S LQ3E32-S LQ3E41-S LQ3E51-S LQ3E61-S 4 6 17 16 16 34.5 33.5 39.5 52.5 49.5 54.5 66 80 38.5 49.5 46.5 52.5 63.5 76 20 C 1/4 5 9 22.5 19.5 21 47.5 44.5 25 C (E,E) H 6 7 8 10 14 18 24 26.5 30 22 24 26 24 32 41 52.5 64 78 50.5 61.5 74 29 37 49 L1,L1 Inch Size (E,E): Reference dimension for the inserted tubing from the end surface

VQC

B 16 SOL. A 4 Station 6 SOL. B DIN rail mounting bracket [-D] VVQ1000-57A for {F, L, M, P, S (EX500) kit} VVQC1000-57A-S for {S (EX250) kit} VVQC1000-57A-T for {T, S (EX126) kit} 17 SOL. A 5 Station 7 SOL. B 18 SOL. A 6 Station 8 SOL.

Series KDM Rectangular Multi-connector

Model . o N t r a P h c n I . o N t r a P c i r t e M e b u T . D . O f o r o l o C e s a e l e r n o t t u b f o r o l o C e s a e l e r n o t t u b g u l P t e k c o S g u l P t e k c o S e b u T . D .

Prevents Micro-Bubbles

S) PB PA PB SMC B PA A A B SMC SMC (mm) Dimensions (Max.

13

Vacuum pressure Suction flow rate 13-5-5 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS-

Industrial Filters

574 70 634 574 70 665 3/8, 1/2, 3/4 3/8, 1/2, 3/4 A (L250) A (L250) 315 70 375 315 70 408 FGDT FGDF FGDT FGDF B (L500) B (L500) 574 70 636 574 70 665 28 B Industrial Filter FGE Series FGD How to Order FGE FGE FGG FGE S A 10 B N A 002 G1 FGES/FGEL type (V-band type) FGA Material Symbol Option FGC Symbol Body Gasket/O-ring NBR FKM Pressure gauge type G46-10-02M (Brass at wetted parts) G1 G2

Short Stroke Electric Actuator Series LX

H 5 B C 100 S B F9N 1 Actuator configuration Number of auto switches/proximity switches Flat table type F 1 pc. 2 pcs. 1 2 Guide rod type P Slide table type S 6 pcs. 6 Guide type Direct acting guide H Auto switch/Proximity switch type Ball bushing B Without auto switch/proximity switch Nil With sensor plate, without proximity switch GN Proximity switches Motor type D-F9N (lead wire length

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2