VM

roller VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Cross roller plunger Toggle lever VM220-02-08 VM230-02-08 VM-30AR Red VM220-02-30R VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y Push button (Mushroom) VM-30AB Black VM220-02-30B VM-30AG Green VM220-02-30G VM-30AY Yellow VM220-02-30Y VM-32AR Red VM220-02-32R VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y VM-32AB Black VM220

Clean Gas Filter

Note 2) Weight kg Connection Filtration area cm 2 AME SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 SFA102-02 SFA202-02 SFA302-02 SFA103-02 SFA203-02 SFA303-02 Rc 1/4 (Female thread) 13.85 ED001S-X10V 0.34 26 NPT 1/4 (Female thread) AMF Rc 1/4 (Female thread) 33.18 ED101S-X10V 0.44 70 NPT 1/4 (Female thread) ZFC Rc 1/4 (Female thread) 56.75 ED201S-X10V 0.66 140 NPT 1/ 4 (Female

ZP3

L N S U F GN GS 02 13 5.5 2 KQ2H02-M3G Width across flats K ZP3 T 015 02 035 U J K 3 6 1.2 04 14.5 8 4 KQ2H04-M3G J Dimensions Per Vacuum Inlet: Barb Fitting Model J K Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

modular-press-e

Float type Note 5) AD27 Y200 AKM2000-01 (02) IS1000M-20 Y210-01 (02) AD17 Y100 AD48 AD47 AD38 AD37 Y300 AKM3000-(01) 02 IS1000M-30 Y310-(01) 02 AD38 AD48 auto drain AD17 AD27 AD37 AD47 Spacer Y100 Y200 Y300 Y400 Y500 Y600 Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y600 Y500 Check valve Note 6) Note 7) Pressure switch Note

smcmaintenancepartslist

Float type Note 5) AD27 Y200 AKM2000-01 (02) IS1000M-20 Y210-01 (02) AD17 Y100 AD48 AD47 AD38 AD37 Y300 AKM3000-(01) 02 IS1000M-30 Y310-(01) 02 auto drain Spacer Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y600 Y500 Check valve Note 6) Note 7) Pressure switch Note 7) IS1000M-60 IS1000M-50 Y510-(02) 03 Y610-03 (04) Y610-(03

Modular F.R.L. Pressure Control Equipment

Float type Note 5) AD27 Y200 AKM2000-01 (02) IS1000M-20 Y210-01 (02) AD17 Y100 AD48 AD47 AD38 AD37 Y300 AKM3000-(01) 02 IS1000M-30 Y310-(01) 02 AD38 AD48 auto drain AD17 AD27 AD37 AD47 Spacer Y100 Y200 Y300 Y400 Y500 Y600 Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y600 Y500 Check valve Note 6) Note 7) Pressure switch Note

Hand Valve Series VH

3 (R) 4 3 3 (Exhaust center) VH301-02, 03 VH311-02, 03 Rc1/4: 17(0.9) Exhaust center 2 (Position) VH302-02, 03 VH312-02, 03 2 1 (A) 2 (B) 4 VH3 1/4, 3/8 0.71 3 (Closed center) VH320-02, 03 VH330-02, 03 Rc3/8: 20(1.1) 1 (P) 3 (R) 3 (Exhaust center) VH321-02, 03 VH331-02, 03 2 (Position) VH322-02, 03 VH332-02, 03 12 3 4 3 (Closed center) VH400-02 to 06 VH410-02 to 06 Rc1/4: 45(2.5) 4 3 3 (Exhaust

Modular F.R.L. Units

-M5-A Y24-01-A 02-A Y34-01-A 02-A Y44-02-A 03-A Y54-03-A 04-A 1 in part numbers for a round type pressure gauge indicates a pipe thread type.

ZP

(Pad diameter: 20 mm or less) ZP T 02 U N A5 From p. 33 p. 115 p. 117 From p. 121 With adapter ZP T 02 U N J 6 B3 A8 From p. 43 p. 116 p. 118 From p. 124 With buffer q w e r t y u i Flat type q Vacuum inlet direction w Pad diameter t Buffer stroke 02 2 16 16 04 4 20 20 06 6 25 25 08 8 32 32 10 10 40 40 13 13 50 50 e Material Nil Pad unit T Vertical R Lateral (With One-touch fitting) Y Lateral

A

1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44-02 1/4 60 48 36 54 Y41-02 1/4 14 39 24 Y44-03 3/8 60 48 36 54 Y41-03 3/8 14 39 24 Y54-03 3/8 72 62 40 62 Y51-02 1/4 14 24 41

VFA3000

(1.8) 14.8 (0.8) 36 (2) 15.3 (0.85) 02 03 VFA5144 2 position single : 0.51 02 03 04: 0.56 34.2 (1.9) 34.2 (1.9) 33 (1.8) 36 (2) 45 (2.5) 52 (2.9) 02 03 04 1 8 3 8 1 2 1 4 , , : 0.52 02 03 04: 0.57 1 8 45 (2.5) 52 (2.9) VFA5244 2 position double 02 03 04 3 8 1 2 1 4 , , Body ported : 0.66 02 03 04: 0.71 VFA5344 -X1 3 position closed center 1 8 34 (1.9) 38 (2.1) 02 03 04 JIS Symbol 3 8 1 2

0.01

(C04) C08 (C06) 02 (C06) 02 (C08) Port size w C10 (C08) 02 (C08) C12 (C10) 02 (C10) 02 (C12) Model Port size q C04 (C06) C04 (02) C06 (C08) C06 (02) C08 (02) Model Port size q C08 (C10) C08 (02) C10 (C12) C10 (02) C12 (02) SFD100SFD200326 Related Products Mist Separator AM Series Refer to pages 223 to 230 for details.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

VFA3000

Body ported single solenoid VFA3122 F 02 Foot bracket Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size W/o sub-plate (Pilot port: Rc) VFA3 1 5 0 For 50 type manifold Nil Thread type for pilot port W/o sub-plate (Pilot port: Other than Rc) 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil Rc G NPT NPTF 00F 00N 00T Function

Secondary Batteries

Port size Body size Port size Symbol 2 3 4 02 03 04 06 1/4 3/8 1/2 3/4 *Specifications and dimensions for the 90-series are the same as standard products.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc

OMU0023

Data No.1 8 02 0106 sent. 9 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Modular Design with Uniform Body Style

Example) AC30C-F03DE1-16NR-D q e r w y t q Body size 20 30 40 Symbol Description w Pipe thread type Nil Rc V V V N*1 NPT V V V F*2 G V V V + 01 1/8 V 02 1/4 V V V e Port size 03 3/8 V V 04 1/2 V 06 3/4 V + Nil Without auto drain V V V a Float type auto drain C*4 N.C. (Normally closed) Drain port is closed when pressure is not applied. V V V D*5 N.O.

HEC-OM-S008

31 32 35 30 30 03 3F 38 0D Answer 25.0 deg.C. 31 Temperature setting (without writing FRAM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38