NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

type 1 2 3 4 5 6 7 9 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 to 120 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Nil F N Rc (PT) G (PF) NPT Manual override Non-locking push type (Flush) Non-locking push type (Extended) Locking type (Tool required) Nil A B Other Electrical entry Light/Surge voltage suppressor G E T D DO Grommet Grommet terminal Conduit terminal DIN terminal

VT307

B1B09-2A (10) 4-7-3 4 Series VT307 Dimensions (Interchangeable with VT301 for mounting) Grommet terminal: VT307-E Grommet: VT307-G 2-4.5 (Mounting hole) Manual override (Non-locking) Manual override (Non-locking) Applicable cable O.D. 2.3 to 2.8 2-4.5 (Mounting hole) (Applicable cable O.D.)

Table of Contents

Exploded View: VQ2000-Plug-in Unit (F, P, J, L, G, S kit) . Exploded View: VQ0-Plug Lead Unit (F, P, C, S kit) .

R

Pressure 1MPa / 150 PSI Min Operating Pressure 0.1MPa / 15 PSI Ambient and Operating Fluid Temperature 5 ~ 60C / 40 ~ 140F Piston Diameter (mm) 100 63 30 80 50 Min Speed sec/90 5 2 3 1 4 Max Speed sec/90 0.2 S Y M B O L S Stroke Tolerance +4 -0 Adjustable 6 Allowable Kinetic Energy (Nm) 0.55 0.05 0.12 0.01 0.16 T O R Q U E SPECIFICATIONS SERIES NCRA1 D I M E N S I O N S S E E N E X T P A G

Cylinder with Lock/Double Acting, Single Rod Series CLS

Seal kit includes a grease pack (125 to 160: 40 g, 180, 200: 50 g, 250: 60 g). Order with the following part number when only the grease pack is needed.

Non-rotating Double Power Cylinder Series MGZ

Seal kit includes a grease pack (20 to 50: 10 g, 63, 80: 20 g). Order with the following part number when only the grease pack is needed.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

MXW Non-rotating accuracy M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 MXJ Symbol Specifications Piping port size NPT 1/8 NPT 1/8 XC8 Adjustable stroke cylinder/Adjustable extention type G 1/8 G 1/8 MXP XC38 Vacuum (Rod through-hole) Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.

Low Profile Air Gripper Series MHF2

Description Contents MHF2-20D MHF2-20D1 MHF2-20D2 DMHF20-PS MHF20-PS MHF20-PS Seal kit 20, 21, 22 MHF-A2002 MHF-A2002-1 MHF-A2002-2 Finger assembly 3, 4, 5, 6, 14, 16, 19 Mounting screw Replacement part/Grease pack part no.: MHF2-D, D1 (12, 16, 20) MHF2-D2 (12) GR-S-005 (5 g) (Guide unit) GR-L-005 (5 g) (Cylinder unit) GR-S-005 (5 g) (Guide unit) MHF2-D2 (16, 20) GR-L-010 (10 g) (Cylinder

AU

JIS Symbol VY1 G 2 G 1 R 00 02 AU PPA Construction Lube unit AL Body Diaphragm assembly Valve assembly Sight dome Plug assembly of supplying oil Body size (Standard) Gasket for valve guide Thread type Nil N F 1 8 Damper 1 2 3 Rc NPT G 4 1 O-ring 3 8 Auto-drain specifications Description Component Parts AU100 type Body Material Zinc die-casted, Aluminum die-casted No.

ZSE30/ISE30

76 g 81 g Weight Without lead wire with connector 40 g 38 g 43 g 16-2-5 6 Series ZSE30/ISE30 Setting Pressure setting Press the button.

ZSE F/ISE

Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings) Variations R 1/ 4, NPT 1/4, G

VNC

None With light/Surge voltage suppressor (Except type G) With surge voltage suppressor (Type G only) VX2 Option Option S VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Accessory Function plate (D seal, with thread): DXT060-32-4A Electrical entry G E T D VX3

VXA21/22

VDW Thread type Nil T F N VQ Orifice size Rc NPTF G NPT 2 3 4 5 6 3 mm 4.5 mm 6 mm 8 mm 10 mm VX2 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Refer to the table (1) given below for availability.

VQ4000

H 0 1 G H 0 1 G H G H 3 position double check: VQ465 0 1 2 position double: VQ425 l 3 position closed center: VQ435 l 3 position exhaust center: VQ445 l 3 position pressure center: VQ455 l VQZ VQD 0 1 178.5 105.5 73 42.5 50 VZS 164.5 178.5 Indicator light 11(A port) (12.5) 11(B port) (12.5) 59 73 42.5 105.5 VFS Indicator light 50 11 (A port) 11 (B port) VS 2 4 (12.5) (12.5) 24.6 38 48 4 2

VY511, VYU5

VY1200-00-N VEX3222-5M Description E-P HYREG valve 3 position valve No. q w VE VY Exclusive controller VYU5-D G Rotary switch, Trimmer container 4-4.5 AL STOP START SEL. SW RESET RUN2 RUN1 OV SET UP 68 0.2 SET UP 7 31 BALANCE CONTROLLER VYU5-D 80 56 ERR.

tTV2000/3000

1/4 F02 o o Connection G(PR 3/8 F03 o o Connection G(PR 1/2 F04 o O: Standard specifications O: Combination possible Blank: Combination not possible Modular Connection Part Numbers muxm : Air filter NAF3OOO NAF4OOO Mist separator NAFM3OOO NAFM4OOO L-bracket B31OL 841 OL T-bracket B31OT B41OT Spacer Y30 Y40 Spacer with L-bracket Y3OL Y4OL Soacer with T-bracket Y3OT Y4OT o c o F to G E Modular

Title not found

U + . 1 1 + . 2 4 = | . t g 0 2 Port location on head cover Perpendiculat to the cylinder axis or in-line with the cylinder axis locations are available for basic type. (06 is not avaihble in perpendicular type.)

VCHR

How to Order VCHR 06 30 G Body size Thread type (Conforming to ISO1179-1 on the pneumatic/hydraulic G thread) 30 40 Symbol Port size Port size VCHR30 VCHR40 Symbol 06 10 14 3/4 1 11/2 630 Series VCHR Direct Operated Regulator for 6.0 MPa (Relieving Type) Specifications Model VCHR30 VCHR40 Valve construction Piston type Valve material Polyurethane elastomer Relief mechanism Relieving type

NAMUR

Model Weight Weight (g) VFN2000N/Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN2120N-5D-02F 260 C 3.48 3.48 b 0.25 0.25 Cv 0.85 0.85 C 4.57 4.57 b 0.17 0.17 Cv 1.06 1.06 VFN2220N-5D-02F 400 2 position Single solenoid Double solenoid How to Order VFN2 20 1 5 D N 02 F Z Thread type Solenoid Single solenoid Double solenoid 1 2 NAMUR Interface Rc (PT) G (PF

C92

B C D E F G H P U Load (kn) Weight (g) M A MB JA30-10-125 JA40-12-125 JA50-16-150 JAH50-20-150 JA125-27-200 JA160-36-200 2.5 4.4 11 18 28 71 M10 X 1.25 M12 X 1.25 M16 X 1.5 M20 X 1.5 M27 X 2 M36 X 2 49.5 60 71.5 101 123 178 19.5 20 22 28 34 51 22 24 25 30 38 55 24 31 41 59,5 66 96 5 6 7.5 11.5 13 16 8 11 14 24 27 36 8 11 13.5 16 20 24 17 22 27 32 41 55 9 13 15 18 24 42 0.5 0.75 1.0 2.0 2.0