Applicable cotter pin 3 X 18 l 4 X 25 l 4 X 35 l 4 X 40 l 0.040 0.076 0.050 0.093 0.065 0.117 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 NT-12M CD-M03 CD-M05 CD-M08 IY-12 32 40 50, 63 80 100 125 32, 40 50, 63 80, 100 125 10 14 22 25 36 51 72 44 60 82 4 4.5 5 5 3 4 4 4 M10 X 1.25 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 M27 X 2.0 6 8 11 13 16 16 17 22 27 32 41 41 19.6 25.4 31.2 37.0 47.3 47.3 16.5 21
Special Tools P.21 to P.23 1.12-5 Applicable Fluids Material and fluid compatibility check list for air and manually operated high purity valves Body material Diaphragm material Ethylene propylene rubber EPR Chemical Polyphenylene sulfide resin PPS Stainless steel SUS316 Fluoro resin PFA Fluoro resin PTFE Nitrile rubber NBR X Note 1) Note 1) Note 2) Acetone X Note 2) Ammonium hydroxide
anodized 3 Rod cover Magnet Magnet Aluminum alloy 15 Chromated 4 Piston Plug Carbon steel Aluminum alloy 16 Electroless nickel plated 5 Piston rod Element Resin Carbon steel 17 Anodized 6 Plate Snap ring Spring steel Aluminum alloy 18 Anodized 7 End plate Rod seal NBR Aluminum alloy 19 Hard chrome plated 8 Non-rotating rod Piston seal NBR Stainless steel 20 9 Bushing O-ring A NBR Resin 21
N.C. 3 2 1 19 2 x 3.5 Mounting hole (16) 11 24.5 21 12 Plug IN port 5 (Lead wire length) 27 For LVM14R 36 300 16 13 UL1007 AWG22 1 2 3 N.C. N.O. (16) (16) 11 OUT port IN port 10 Push type Manual override 73.5 For LVM16R N.O. N.C. 3 2 1 25.5 (16) N.O.
Single solenoid 99 (.21) (A) 4 (B) 2 SV3000 Double solenoid 102 (.22) SOL.b SOL.a 3 (EB) 5 (EA) 3 position 110 (.24) Single solenoid 186 (.41) 1 (P) SV4000 Double solenoid 190 (.42) 3 position 211 (.46) Note) Weights of solenoid valve only. 3
port A port M5 x 0.8, C4 Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port. 1/8 9 Series SYJ300 Type 20 Manifold: Top Ported/SS3YJ3-20Stations -00 (-F) [ ] for AC Grommet (G) 3.5 L2 (6) (2.5) (17.3) 10 (21.5) M3 x 0.5 (Bracket mounting screw) 2-3.5 (For mounting) (Pitch) P=10.5 12.5 41.5 M3 x 0.5 (A port) 5 5 2 (2.5) 1.9 10 5 10 5 12.7 R P P 26.4 21
Stainless steel This is used by mounting it on the manifold block when a valve is removed for maintenance or when the mounting of an additional valve is planned, etc. 5 Series VCS Direct Operated 2 Port for Steam Dimensions (mm) 1in = 25.4mm T (Y) R Z 16 T 25 IN port 2-3/8 : Thread type S l = 280 l = 300 (X) 2.5 (N) E C D G Q SMC SMC C A B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21
Dimensions Model Metric size D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Inch size TMH-05 21 8.3 8.5 15.4 7.7 9.3 6.4 6.3 3.3 11.7 TMH-06 13.1 TMH-07 26.5 10.6 11 20 10 11 7.2 7.1 4.3 13.5 10 TMH-08 TMH-09 15.5 TMH-10 18.5 34 14.6 14.2 28 14 14 9.6 9.5 4.3 TMH-11 18.8 5
Seal material Symbol A H FKM This is used by mounting it on the manifold block when a valve is removed for maintenance, or when the mounting of an additional valve is planned, 5 Series VCL Direct Operated 2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21
H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 3
adjusting screw 8 P PE Exhaust part 2-3.5 62.8 (Body mounting hole Note 1)) 3 75 Suction filter With L type plug connector Vacuum pressure switch PE P EXH S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21
Model: 21, Port Size: Rc1/8, Thread Type: NPT, Base/Seal Material: Stainless Steel, FKM Seal, Suffix: Standard, Number of Manifolds: 4 Stations
Model: 21, Port Size: Rc1/4, Thread Type: NPTF, Base/Seal Material: Brass, NBR Seal, Suffix: Standard, Number of Manifolds: 10 Stations
Model: 21, Port Size: Rc1/8, Thread Type: Rc, Base/Seal Material: Brass, NBR Seal, Suffix: Standard, Number of Manifolds: 4 Stations
Model: 21, Port Size: Rc1/8, Thread Type: Rc, Base/Seal Material: Brass, FKM Seal, Suffix: Standard, Number of Manifolds: 4 Stations
Model: 21, Port Size: Rc1/8, Thread Type: NPT, Base/Seal Material: Brass, FKM Seal, Suffix: Standard, Number of Manifolds: 3 Stations
Model: 21, Port Size: Rc1/8, Thread Type: NPT, Base/Seal Material: Stainless Steel, FKM Seal, Suffix: Standard, Number of Manifolds: 2 Stations
Model: 21, Port Size: Rc1/8, Thread Type: NPT, Base/Seal Material: Stainless Steel, FKM Seal, Suffix: Standard, Number of Manifolds: 5 Stations
Model: 21, Port Size: Rc1/8, Thread Type: NPT, Base/Seal Material: Stainless Steel, FKM Seal, Suffix: Standard, Number of Manifolds: 6 Stations
Model: 21, Port Size: Rc1/8, Thread Type: NPT, Base/Seal Material: Stainless Steel, FKM Seal, Suffix: Standard, Number of Manifolds: 8 Stations