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\A pplicable tube 0.0. P R across flats 1 2 , oj Iir w w \ M8X 1.25 I . j 0 >-j / ~ P 3.5 I 'A ~.8 Flat type Flat with rib (mm) Flat type . Flat w~h rib (mm) Model . .A .8 C JD ' Model 'A .8 C D E F I:M6x1 I:Ma XI y I I: Ma x l Y E F I r.M6 Xl G c H G H ..JatlFlat1>ilt1 rib I . .

Use a pipe capable of withstanding the specified operating pressure and temperature and connect so that it will not have leakage. Install a water drainage (with a stop valve) for maintenance. 2.2 Installation 2 4 IDF100F~150F-W IDX-OM-M051 Air Dryer 2.

B A A B B-B In-line motor Component Parts Component Parts (Top/Right/Left side parallel only) No.

A/B 3.96 (0.22) A/B to EA/EB 4.14 (0.23) C6: P to A/B 9.54 (0.53) A/B to EA/EB 9.0 (0.5) C8: P to A/B 16.2 (0.9) A/B to EA/EB 16.2 (0.9) C10: Valve effective area Note 2) mm (Cv factor) Manifold base weight W (g) n: Number of stations W = 39n + 83 W = 48n + 99 W = 67n + 118 W = 88n + 151 W = 109n + 174 Flat ribbon cable connector, Socket: 26 pin MIL, With strain relief, MIL-C-83503 conformity

Series HRX-OM-X037 Contents 9.4.15 HRL200-W-40-T2 CH1 .9-19 9.4.16 HRL100/200-W-40-T2 CH2 .9-19 9.5 Pump Capacity . 9-20 9.5.1 HRL100-A/W-40 CH1 .9-20 9.5.2 HRL200-A/W-40 CH1 .9-20 9.5.3 HRL300-A-40 CH1 .9-21 9.5.4 HRL-A/W-40 CH2 .9-21 9.5.5 HRL100/200/300-A/W-40-T2 CH1 .9-22 9.5.6 HRL300-A-40-T3 CH2 .9-22 9.6 Types of Hazard Labels . 9-23 9.6.1 Positions of danger warning label .9-24 9.7

Low Low Low Low High High Motor rotation rate Motor rotation rate Variations Cooling capacities ranging from 10 kW to 25 kW Air-cooled refrigeration Water-cooled refrigeration Model HRSH250-A HRSH300-A Model HRSH100-A HRSH150-A HRSH200-A Model HRSH100-W HRSH150-W HRSH200-W HRSH250-W Cooling capacity 10.5 kW 15.7 kW 20.5 kW Cooling capacity 25 kW 28 kW Cooling capacity 11.5 kW 15.7 kW 20.6

5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model Model Model ZP2-3507W ZP2-4010W ZP2-5010W ZP2-6010W ZP2-4020W ZP2-5020W ZP2

(Example) For M3: L1 = 6 mm Applicable shaft types: S, W, Y The maximum dimension L2 is, as a rule, twice the thread size. (Example) For M4: L2 = 8 mm Applicable shaft types: S, W, Y Minimum machining diameter for d1 is 0.1 mm.

B L1 W M2 B side Inch Size 6 4 Model A side B side B C1 C2 E1 E2 H1 H2 L1 L2 M1 M2 Min. port size W Applicable tubing O.D.

HECR Applicable model Rated current [A] Sensitivity of leak current [mA] Short circuit display method HRS100-A/W-20 30 30 Mechanical button HRS150-A/W-20 40 Earth leakage breaker HEC HEB * 400 V type is equipped as standard. HED * Cannot be selected together with option B1.

(Example) For M3: L1 = 6 mm Applicable shaft types: S, W, Y The maximum dimension L2 is, as a rule, twice the thread size. (Example) For M4: L2 = 8 mm Applicable shaft types: S, W, Y Minimum machining diameter for d1 is 0.1 mm.

LEFS16/Ball Screw Drive Horizontal Vertical 16 6 14 Lead B Lead B 12 Work load: W [kg] Work load: W [kg] 4 10 Lead A 8 Lead A 6 2 4 2 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 700 800 Speed: V [mm/s] Speed: V [mm/s] LEFS25/Ball Screw Drive Horizontal Vertical 20 30 Lead B 25 15 Work load: W [kg] Work load: W [kg] Lead B 20 10 15 Lead A Lead A 10 5 Lead H Lead H 5 0 0 0 100 200

2 p. 31 ZK2 VA A A A K 5 L ZK2 FC A Port for the pressure switch or sensor q w e r t Symbol Port for the pressure switch or sensor Filter case color P With port (type with pressure switch or sensor) Smoke T Without port (type without pressure switch or sensor) Clear q Applicable system w Valve type e Rated voltage A Ejector system K Supply valve: N.C., Release valve: N.C. 5 24 VDC 6 12 VDC

T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T

HRX-OM-M090-f Operation Manual InstallationOperation Original Instructions Thermo chiller Air-Cooled Water-Cooled refrigerated type refrigerated type HRS012-A-10HRS012-W-10HRS018-A-10HRS018-W-10HRS012-A-20HRS012-W-20HRS018-A-20HRS018-W-20HRS024-A-20HRS024-W-20Keep this manual available whenever necessary 2021 SMC CORPORATION All Rights Reserved To the users Thank you for purchasing SMCs

A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

PB H thread depth C Vent hole Note 3) J PC EV Z T M U D K Note 2) L R 4 x O1 thread depth R W A + Stroke B + Stroke S EH M 6 x MO thread depth MR XA H9 depth XA MH Section XX details MA ML + Stroke MC MD Section XX XB XA H9 XA [mm] Incremental encoder Absolute encoder B C D EH EV Without lock With lock Without lock With lock A W Z A W Z A W Z A W Z Size Stroke range [mm] 25 15 to 100 238

This matches the controller. w Check Parallel I/O configuration matches (NPN or PNP). q w Specifications Basic Specifications Item LECP6 LECA6 Compatible motor AC servo motor Unipolar connection type 2-phase HB step motor Power voltage: 24 VDC 10% Current consumption: 3 A (Peak 5 A) Note 2) Power voltage: 24 VDC 10% Current consumption: 3 A (Peak 10 A) Note 2) Power supply Note 1) [Including

") 2 NCDQ8A(B)-100T(M) NCDQ8A(B)-200T(M) 1 0.37 (3/8") 0.25 (1/4") 0.37 (3/8") 0.25 (1/4") 0.87 (7/8") 0.37 (3/8") 0.37 (3/8") 0.37 (3/8") 0.25 (1/4") 0.87 (7/8") 2 47 Series NCQ8 Auto Switches/Proper Mounting Positions and Height for Stroke End Detection Reed switch D-A9 (V) Solid state switch D-M9 (V) D-F9 W(V) B A B A HS 056 HS B A B A 075, 106 HS B A B A 150, 200, 250 Note 1) Figures