0.4

2 (A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3

Table of Contents

Slide Bearing Felt Holder Ball bushing Spacer Aluminum alloy Replacement Parts: Seal Kit Bore size (mm) Contents Kit no. 20 25 32 40 50 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Set of nos. above @1, @2, @3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.

Metal Seal/Rubber Seal Series VQ Body Ported

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

7.5

0 o 2 4 (B) (A) 2 4 (B) (A) 3 5 1 (EB) (P) (EA) 3 5 1 (EB) (P) (EA) 4(A) 2(B) i 5(EA)/3(EB) 1(P) 3 position closed center 3 position closed center/exhaust center/pressure center 3 position exhaust center 2 4 (B) (A) 2 4 (A) (B) !1 q y w e r t o !

LX

1 C 25 GD X60 Low Profile Slide Table Type LXPB 2 B 1 B C 50 F9N X60 Guide Rod Type X60 High Rigidity Slide Table Type C 50 F9N 1 B LXSH 2 B Motor type Low particulate generation specification 2 phase stepper motor 5 phase stepper motor 2 5 Number of auto/proximity switches Ball screw B Lead screw type 1 2 1 pc. 2 pcs.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

YA-03 Joint YU-03 RS W M V T2 Joint Part No. 2-D through 2-O counterbore T1 B E J Applicable mounting bracket Bore size (mm) Weight (g) Joint part no.

Hydraulic

Keeper plate Material: Rolled steel Rod end nut Material: Carbon steel 30 d JIS class 2 thread 2-d l 0.2 B D C m T H H B Bore size (mm) Bore size (mm) Cap bolt Rod series Part no.

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Cable color Connector D terminal no.

AC Servo Motor Driver (CC-Link Type ）

(b) One driver occupies 1 or 2 stations.

5 Port Solenoid Valve Series VQZ1000/2000/3000

1(P), 5(R1), 3(R2) port] + + M5 x 0.8 [4(A), 2(B) port] 9 7 SJ (5.5) (8) 44.5 140 [144.4] 31.5 (30) SY 17.3 30 127 [131.4] P 1 3 5 R2 R1 1 P 3 5 R2 R1 12 21 21 B B B B B B B 20.5 (35) 60 2 2 2 2 2 2 2 4 4 4 4 4 4 4 SV A A A A A A A 31.5 63.5 [65.7] (DIN rail) SYJ 4 x 4.5 (For mounting) 34.5 SZ 12 10 8 6 4 2 0 + + + + + + + M3 x 0.5 (External pilot port) (DIN rail clamp

VQ5000

(mm) 1in 25.4mm Bottom port diagram 2-G3/4 Conduit port 2n-1/2 (ports A, B) 144.5 143 112.5 83.5 55.5 M5 ground screw 106 59.2 46.8 9 9 34.5 34 n U side 12 X B 2 A 4 6 B A B 2 A 4 5 B A B 2 A 4 SMC SMC SMC SMC 4 B A L2 L1 58.5 P=41 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 48 68.5 P=41 B A 4 1 B A 2 X 12 Stations D side 42 16 107.8 179 15.5 22 51 69 117 2-1/8 (external pilot port) L n Dimensions

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

A B-1 A A-1 B B-2 B A-2 COM-A/COM B-3 COM-B/ A-3 Cable color Connector C terminal no. Brown 2 Red 1 Orange 6 Yellow 5 Green 3 Blue 4 Weight Product no. Weight [g] Note LE-CP-1-B-S 240 Standard cable LE-CP-3-B-S 380 LE-CP-5-B-S 630 LE-CP-1-B 190 Cable color Connector D terminal no.

Fieldbus System

, 3/5(E) port] Applicable tube O.D.: 10, 3/8" 8 DIN rail 5.5 PE B A B A B A B A B A A 4 3/5 A 4 A 4 A 4 A 4 35 (114.8) 97.5 113.4 116.7 39.5 26.5 E X 101 1 81.2 61.7 Cm: 14.5 01: 16.2 P 47.3 5.5 B 2 B 2 B 2 B 2 B 2 4 x M5 mounting hole 1.4 10.9 2.7 4.7 1/8 [4(A), 2(B) port] SI unit L2 34.2 1.5 One-touch fitting [4(A), 2(B) port] L4 (DIN rail mounting hole pitch: 12.5) 5.3 Applicable tube

ZP

across flat 6 5 Width across flat 8 Width across flat 10 Width across flat 8 Width across flat 10 Vertical 2 2 2 2 3 13 A D B 3 13 A D B With Adapter: Vacuum Inlet 2 2 2 2 13 A D B B D A M6 x 0.75 M6 x 0.75 M3 x 0.5 7 0.3 M3 x 0.5 7 0.3 M8 x 0.75 M8 x 0.75 M3 x 0.5 M3 x 0.5 7 Vertical 3 3 13 With Buffer: Vacuum Inlet 3 3 7 0.3 0.8 2 1.5 0.8 3 3 2 2.5 0.8 2 2.5 0.8 1.5 2 0.3 Lateral With

ZP

20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model Model Model ZP2-3507W ZP2-4010W ZP2-5010W ZP2-6010W ZP2-4020W ZP2-5020W ZP2-6020W ZP2-8020W ZP2-4030W ZP2-5030W ZP2-6030W ZP2-8030W 2 x 1.5 0.5 0.5 0.5 10 2 x 2.5 11 2.5 0.8 0.8 Adapter Mounting Dimensions If an adapter will be

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size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

LEC-OM02704CN

9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.

AC Servo Motor Driver (CC-Link Type ）

(b) One driver occupies 1 or 2 stations.

Fieldbus System

M4 mounting hole Connector for Handheld Terminal End Plate n 8 7 6 5 4 3 2 D side U side Station 1 3/4: 3/4" female thread (Rc, G, NPT/NPTF) 3/4 [3(R) port] 1/2: 1/2" female thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 56.6 30 101.2 15.7 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 11.5 72 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (