/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank

Cooling capacity Note 3) (50/60 Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow rate Note 8) (50

Cooling capacity Note 3) (50/60 Hz)(kW)Heating capacity Note 4) (kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow rate Note 8) (50

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank

IS3000

C. CR N.C. C. IN Ex. 2) When using contact b only LAMP LIGHTS WHEN PRESSURE RISES. N.C. C. CR Caution Component Parts 1. In the case of using a switch with indicator light, wire the indicator light per the following: 2. Please put the enclosed seal of LAMP LIGHTS WHEN PRESSURE RISES. or LAMP GOES OUT WHEN PRESSURE RISES. on the equipment where it is easy to see.

NGIP seies

Construction/Parts List Auto Switch Type . . . .. 6 Dimensions N o s e M o u n V F l a n g e M o u n t . . . . . . . . . 7 4 Construction/Parts List . . .

Electric Actuator/Rod Type LEY16, 25, 32 Series LEY Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

Nil 1 3 5 8 A B C Without cable 1.5 3 5 8 !2 I/O cable length [m] Nil 1 3 5 Without cable 1.5 3 10 5 15 If Without controller is selected for controller types, I/O cable is not included. Refer to page 47 (LECP6/LECA6) or page 57 (LECP1) if I/O cable is required. 20 Produced upon receipt of order (Robotic cable only) Refer to the specifications Note 5) on page 7. !

VXD

B Grommet 100 VAC With surge voltage suppressor 12 One-touch fitting C 110 VAC G H J K 3/8 D 200 VAC 4 10A C37 N.C. 1/2 E 230 VAC 15 15A 3/8 Stainless steel B N.O. F 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC 6 25A N.C. N P C37 Stainless steel 25 1 K 200 VAC D N.O. L 230 VAC 7 32A N.C.

Compact Direct Operated 2/3 Port Solenoid Valve for Chemicals Series LVM09/090

The values of Av and Cv are based on JIS B 2005:1995, C and b are based on JIB B 8390:2000.

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

5 to 45 Circulating uid2 Tap water, 15% ethylene glycol aqueous solution, Deionized water Set temperature range1 C 5 to 35 Cooling capacity 50/60 Hz3 kW 8.0/9.0 Heating capacity 50/60 Hz4 kW 1.7/2.2 Temperature stability5 C 0.5 Circulating uid system Rated ow 50/60 Hz (Outlet)6 L/min 29/45 Maximum ow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating ow rate 50/60 Hz7 L/min

PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

For Deionized Water and Chemical Liquids Digital Flow Switch PF2D Series RoHS How to Order Remote Type Sensor Unit PF2D5 13 20 1 C Flow rate range Option (Refer to page 391.) 04 20 40 None e-con connector x 1 pc. Nil C 0.4 to 4 L/min 1.8 to 20 L/min 4 to 40 L/min The cable and connector are shipped unassembled.

Electric Gripper 2-Finger Type LEHZ10, 16, 20, 25, 32, 40 Series LEHZ ® Step Motor (Servo/24 VDC)

Please download it via our website, http://www.smcworld.com 7 Electric Gripper 2-Finger Type Series LEHZ Model Selection Specific Product Precautions LEHZ LECP6 LEC-G LECP1 LECPA LEHZJ LEHF LEHS Step Motor (Servo/24 VDC) i Actuator cable type !

MVGQ

+ , C8D , ) ( ) ( : C%=D C&=D , 9 ! &' = 2 + ! , E , ! !