MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 3 4 5 6 13 14 17 23 18 22 26 32 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.

Cylinder with Lock

Bore size E1 L1 MM R1 U1 NDH10 NX NZ Y-03M*1 32 20 30 M10 x 1.25 10 16 10 +0.058 0 14 +0.30 + 0.10 28 0.10 0.30 Y-04M*1 40 22 40 M14 x 1.5 11 19 10 +0.058 0 14 +0.30 + 0.10 28 0.10 0.30 Y-05M*1 50, 63 28 50 M18 x 1.5 14 24 14 +0.070 0 20 +0.30 + 0.10 40 0.10 0.30 Y-08M*1 80 40 65 M22 x 1.5 20 34 22 +0.084 0 30 +0.30 + 0.10 60 0.10 0.30 Y-10M*1 100 40 65 M26 x 1.5 20 34 22 +0.084 0

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: w/o Operation Manual, w/o Calibration Certificate

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Relief port (10-, 21-) Vacuum port (11-, 22-) G F MM 2 x LC LZ LX D I 4 x LD 20, 25 Width across flats KA Width across flats B2 Width across flats NA Standard port LT 45 ZZ + Stroke LS + Stroke S + Stroke X Y X Y Z Relief port (10-, 21-) Vacuum port (11-, 22-) 32, 40 (mm) H H2 H1 S P I G D A 12 10 8 6 KA MM NA NN B1 B2 Bore size 13.5 10.5 10.5 10.5 FL K 54 47 47 40 B LH LT LS LX LD 8 13 AL

SMC Pneumatic Clean Series

MM LX 2-LC D I LZ 4-LD 20, 25 Width across flats B2 Width across flats NA Standard port LT 45 N N Relief port Y X Y S + Stroke X Z LS + Stroke ZZ + Stroke 32, 40 (mm) 54 47 47 40 B LH LT LS LX LD 8 13 AL F K MM NA NN B1 B2 Bore size H H2 H1 S P N I G D A ZZ 6.8 4 LC LZ X Y Z 8 8 8 42.5 34.5 30 24 1/8 46.5 37.5 33.5 28 7 5.5 5.5 5 22 17 17 13 41 32 32 26 6 6 5 88 64 62 62 40 32 25 20 24 22

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Coordinates and Moments z M3: Yawing MX MTS MY CY M1: Pitching y x MG CX M2: Rolling DStatic Moment -X Ceiling mounting Horizontal mounting Wall mounting 20Data M1 M2 M2 M1 M2 M3 y X x Y y z X x Y X x Z m1 x g m2 x g m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2

Low Profile Guide Type

Coordinates and Moments z M3: Yawing M1: Pitching y x M2: Rolling Static Moment Ceiling mounting Horizontal mounting Wall mounting M2 M1 M1 M2 M2 M3 y x y x z x Y Y X X X Z m1 x g m2 x g m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m m1 x g x X m2 x g x X m4 x g x Z Static moment M1 M3 M1 CY3B CY3R m3 x g x Z m1 x g x Y m2 x g x Y

XM, XY

Construction XMA/Angle type XYA/In-line type Auto switch (Option) q Bonnet assembly (Maintenance part) (Includes w, t, y, u) Magnet (Option) Pilot port Bellows side exhaust u Bellows holder (Material: Stainless steel 304) e Exterior seal (Maintenance part) y Bellows (Material: Stainless steel 316L) Bellows side exhaust t Valve (Material: Stainless steel 304) w Valve seal (Maintenance part

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

5 $3 y!7 @8 !4 !

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

115 MR-C10A1 Without brake (Horizontal specification) Non-standard Mitsubishi Electric Corporation motor HC-PQ053 50 200/230 MR-C10A R 100/115 MR-C10A1 With brake (Vertical specification) HC-PQ13B 100 200/230 MR-C10A 100/115 SGME-A5BF12 SGDE-A5BP Without brake (Horizontal specification) Non-standard Yaskawa Electric Corporation motor 50 200/230 SGME-A5AF12 SGME-01BF12B SGDE-A5AP SGDE-01BP Y

SMC Pneumatic Clean Series

With air cushion B 15 LH LT 2-LC 4-LD W W (Knock pin position) X Y M X Y Z LS + Stroke LX LZ ZZ + Stroke (mm) B 54.5 70.5 82.5 30 LH 4 LC 60 LS 3 LT 54 LX 4 M 16.5 X 8.5 Y Z 63.5 75.5 75.5 144 ZZ 7 LD 71 LZ 10 W Bore size 40 50 63 10 12 4.5 4.5 17.5 17.5 169.5 169.5 67 67 40 45 5 5 66 82 5 5 22 22 11 13 86 106 Other dimensions are the same as basic style. 37 2122CG1/ CG1 1011Air cylinder

CNS

Symbol Bore size (mm) 125 140 160 H A L1 H1 3.5 Y type double knuckle I type single knuckle Y-12 110 50 100 156.5 I-12 Y-14 110 50 105 161.5 I-14 Y-16 120 56 110 170.5 I-16 L1 H1 A, H Dimensions When Mounting a Single/Double Knuckle Joint together with a Rod End Nut A H Bore size (mm) 125 140 160 65 125 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Confirm the total of x, y, and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

air-filter-e

Description Quantity O-ring Material Material y u i o t y u i o 1 1 NBR or FPM O-ring Penta seal 1 1 NBR or FPM Penta seal O-ring 1 1 Scraper Scraper 1 1 O-ring 1 Replacement Parts: Seal Kit Replacement Parts: Seal Kit Note Model Order no. Material NBR FPM KT-FN41N KT-FN41V KT-FN41N Items y through o from the above chart, 1 pc. each FN4102N FN4102V Note Model Order no.

Air Preparation Equipment

Description Quantity O-ring Material Material y u i o t y u i o 1 1 NBR or FPM O-ring Penta seal 1 1 NBR or FPM Penta seal O-ring 1 1 Scraper Scraper 1 1 O-ring 1 Replacement Parts: Seal Kit Replacement Parts: Seal Kit Note Model Order no. Material NBR FPM KT-FN41N KT-FN41V KT-FN41N Items y through o from the above chart, 1 pc. each FN4102N FN4102V Note Model Order no.

MU

E1 NDH10 Size A1 E1 MM Size L1 L1 MM A1 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 M10 X 1.25 M12 X 1.25 M14 X 1.5 M18 X 1.5 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 X 1.25 25 32 40 50, 63 25 32 40 50, 63 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 M12 X 1.25 M14 X 1.5 M18 X 1.5 Applicable pin NDH10 NL U1 U1 Part No. NO Part No.

80

Body material: Aluminum, PPS resin, Brass, Stainless steel Body material: PPS resin (One-touch fitting type) u y t r e w q u y t r e w q OUT 2 IN 1 OUT 2 IN 1 i Component Parts Component Parts No. Description Solenoid coil Fixed armature Tube Return spring Armature assembly Seal Body No.