Bore Size: 63mm, Port Thread: TN (NPT), Stroke: 50mm, Auto Switch: M9PWV--Solid State, 2-color Indication, 3 Wire PNP, Vertical, Lead Wire or Prewired Connector: L (3m)

Bore Size: 63mm, Port Thread: TN (NPT), Stroke: 50mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Bore Size: 63mm, Port Thread: TN (NPT), Stroke: 30mm, Auto Switch: M9PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector), Number: 3 pcs.

Bore Size: 63mm, Port Thread: TN (NPT), Stroke: 30mm, Auto Switch: M9PWV--Solid State, 2-color Indication, 3 Wire PNP, Vertical, Lead Wire or Prewired Connector: L (3m)

Bore Size: 63mm, Port Thread: TN (NPT), Stroke: 50mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Bore Size: 63mm, Port Thread: TN (NPT), Stroke: 100mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Compact Cylinder High Magnetic Field Design CDQ2BP Series

"ALrto switch detail: see pgs. 10-11.

Electric Actuators

Direct acting guide 3 0.03 Ball screw 100 Matsushita Electric Industrial Co., Ltd. 50 Series LXP 6 100 Ball bushing guide Mitsubishi Electric Corporation Ball screw 0.03 50 5 Yaskawa Electric Corporation 100 Series LXS 50 10 Note) Series LXF is only compatible with motors manufactured by Mitsubishi Electric Corporation.

AP500

0.07 1.00 (25.4) 5 0.03 Max. 3.32 (84.3) 0 0.00 0 2 4 6 8 10 Flow rate (slpm, N2) 0.82 (20.8) 0.44 (11.2) AP500HF 75 psig (0.52 MPa) 30 psig (0.21 MPa) Inlet pressure: 45 psig (0.31 MPa) 35 0.24 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40

CDQ2BP series

"ALrto switch detail: see pgs. 10-11.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Standard strokes (mm) Bore sizes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 50, 63 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Example) For CQ2XB40-57D, an 18mm spacer is installed inside a standard stroke CQ2XB40-75D cylinder. Specific Product Precautions Be sure to read before handling. Refer to pages 15 to 24 for safety instructions and precautions.

Solid State Vacuum Regulator Series ITV2090/2091

Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)

Thermo-chiller

(No continuous voltage uctuation) Earth leakage breaker Rated current [A] 30 40 50 Sensitivity current [mA] 30 Rated operating current4 [A] 17 32 41 Rated power consumption4 [kW(kVA)] 5.4 (5.9) 10.5 (11.0) 13.1 (14.2) Noise level (Front 1 m/Height 1 m)4 [dB(A)] 75 75 71 Accessories Operation Manual (for installation/operation) 2 pcs.

Solid State Vacuum Regulator

Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)

XL-OMV0002

227 ** 63 80 100 160 AS568-043V AS568-045V AS568-050V AS568-167V AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** AS568-233V B2401-V85V AS568-349V B2401-G155V AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** 1)(FKM:No.1349-80)(**) AS568-025-XN1 2)4 3) FKM for ULTIC EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ PLASMA ARMOR R No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Electric Actuators Two types of guide and three types of feed screw Single Axis Electric Actuator Series LJ1 High LJ1H High rigidity direct acting guide + Ground ball screw Work load 5 to 20kg Slider guide High rigidity direct acting guide 10 to 60kg Positioning accuracy Positioning repeatability LJ1H High rigidity direct acting guide + Rolled ball screw Slide screw 0.1mm Rolled ball screw

Dedicated Controller Series LC1 Uniaxial Type

SET-ON (10) Start readiness signal Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. BUSY (11) Operating signal COM +24V 1 COM 11 GND NO.0 When this signal is off, an alarm is being generated for the actuator/controller.

Single Axis Electric Actuator Series LJ1

Models to accommodate a wide variety of applications Electric Actuators Two types of guide and three types of feed screw Single Axis Electric Actuator Series LJ1 High LJ1H High rigidity direct acting guide + Ground ball screw Work load 5 to 20kg Slider guide High rigidity direct acting guide 10 to 60kg Positioning accuracy Positioning repeatability LJ1H High rigidity direct acting guide

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

Series MGF guide tables are low profile, compact cylinders which utilize a large concentric guiding sleeve to provide excellent eccentric load resistance. Mounting is possible from 2 directions. A built-in non-rotating mechanism prevents rotation of the table top. T-slots are provided on 3 faces of the MGF body *, allowing mounting of various brackets. Optional auto switches can be mounted