NCA1

3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 F G J K L MR 3/4 2 1 1/2 9/16 1 1/2 1 3/16 3/4 2 1/4 2 11/16 2 1/8 1 5/8 3/4 2 1/4 2 11/16 2 1/4

Air Cylinder NCA1 Series

7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 F G J K L MR 3/4 2 1 1/2 9/16 1 1/2 1 3/16 3/4 2 1/4 2 11/16 2 1/8 1 5/8 3/4 2 1/4 2 11/16

High Vacuum Angle Valve, XL Series

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

3

VXS VXS 2) Shut off the power supply. 11. To control the fluid in the tank, connect the piping a little higher than the bottom of the tank. 3) Dismount the product. VXB 2. Low frequency operation Switch valves at least once every 30 days to prevent a malfunction. Also, in order to use it under the optimum state, conduct a regular inspection once a half year.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

(Green) Indicator light Load Enclosure IP40 Environment resistance Blue DC () 3.4 3-wire 25AWG 2 m Lead wire with connector 11

PSxx-OMG0001CN

DC1224 V DC1224 V 8 DC(+) DC(-) DC1224 V DC1224 V DC(+) 9 DC(-) / / 10 ( ) 11 / 5m / 12 2030 20 -28No.PS-OMG0001CN-H No.

ASR

rotations Number of needle rotations Flow Valve: Series ASQ Meter-out Type (Inlet pressure: 0.3 MPa) ASQ430F ASQ530F ASQ630F 20 10 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm2 Effective area mm2 Effective area mm2 400 6 200 15 300 4 500 10 5 200 100 2 5 100 10 5 0 10 5 0 10 5 0 Number of needle rotations Number of needle rotations Number of needle

Low Profile

2.45 1.5 2.3 (Lead wire AWG#26) 300 54 3.4 10 5 3 3 1.7 10 Base hole dimension w Mounting screw (Included) M2 x 11 2 x M2 x 0.4 Thread depth: 6 or more Tightening torque: 0.1 to 0.14 Nm 3 4 4 (11.6) 4 4 2.1 1.7 1.7 3 2.45 Universal 0.8 4.9 10 2 (OUT) 1.5 2.3 1 (SUP) 3 (EXH) 3 3 1.7 3 (EXH) port 1 (SUP) port 2 (OUT) port Specific Product Precautions Be sure to read this before handling the

Low Differential Pressure Sensor

Tightening torque (Nm) 0.5 to 0.7 Nominal thread size M3 11 Digital Pressure Switch Precautions 2 Be sure to read before handling. Air Supply Selection Warning Warning 1. Use the switch within the operating fluid and ambient temperature range.

Hand Valve Series VH

132 300 223 151 150 48 25 4-Rc3/4, 1 3 (R) 40 3.6-11 Hand Valve Series VH Panel Mounted/Dimensions VH21l-02 VH31l-02 to 03 4 (B) 2 (A) 25 25 25 4 (B) SlA 1 (P) 3 (R) 1 (P) l74 l62 62 49 VlA 2 (A) 49 4-5.5 4-6.6 SlA VlA 62 134 97 VM/VR 125 94 VH 1.5 45 1.5 106 88.5 92 73 56 1 (P) 3 (R) 1 (P) 27 23 13.5 3 (R) 12 4-Rc 1/4, 3/8 12 4-Rc1/4 VH33l-02 to 03 (Bottom piping) 2 (A) 44 Panel

KJ

(inch) Min. port size D Note) L Q M2 M1 Weight (g) Model Applicable tubing KQ2T01-03 KQ2T01-07 KQ2T03-05 KQ2T03-07 KQ2T05-07 KQ2T07-09 KQ2T07-11 KQ2T09-11 KQ2T09-13 KQ2T11-13 10.4 13.2 11.4 13.2 13.2 15.2 17.9 17.9 21.7 21.7 18 20.5 19.5 20.5 20.5 23 26 26 29 29 4.5 5.3 4.8 5.3 5.3 6 6.6 6.6 7.8 7.8 16 17 16.5 17 17 18.5 21 21 22 22 5 8 6 8 8 11 17 17 26 28 5 32 2.5 15.5 1 8 1 4 3 16 3

VS 8-2/VS 8-4

Note 9 Gray Black 22 Pink Red Station 9 SOL.B 1.5 m 3 m 5 m AXT100-DS25-015 AXT100-DS25-030 AXT100-DS25-050 SOL.A 10 White Black Cable 0.3 mm2 x 25 cores Station 10 SOL.B 23 Gray Red 11 White Red SOL.A Station 11 When using a standard commercial connector, use a type 25P female connector conforming to MIL-C-24308. Cannot be used for transfer wiring.

F

17.5 14.5 17 15.5 3.5 3.1 6 M5x0.8 KJT06-M5 7 11 17.5 15 17.5 15.5 4.5 4.2 6 R(PT)1/8 KJL06-01S 10 11 19.5 16.5 18 15.5 9 6.1 6 R(PT)1/8 KJT06-01S 10 11 19 17.5 19 15.5 11 7.1 Applicable Thread Model H D L1 L2 A M Minimum Weight Tube O.D T (Hex) Hole (g) Applicable Thread Model H D L1 L2 A M Minimum Weight Tube O.D T (Hex) Hole (g) (inch) Diameter (inch) Diameter 1/8 10-32UNF KJT01-32 7

OMU0023

value Checksum(LRC) 9 Calculated value 10 End code CR 11 LF 32 - 5.5 Memory Map The memory map for the Card Motor controller is summarized in the tables below.

VQ4000

SOL.B 23 23 () (+) Gray Red 10 stations SOL.B SOL.A 11 11 () (+) White Red SOL.A SOL.B 24 24 () (+) Black White 11 stations SOL.B SOL.A 12 12 () (+) Yellow Red SOL.A SOL.B 25 25 () (+) White None 12 stations SOL.B COM. 13 13 (+) () Orange Red COM. Note) Negative common specifications Positive common specifications Note) There is no polarity. It can also be used as a negative common.

Title not found

13 7 6 9 8 11 10 3 Connector B terminal no.

Pressure Gauge Guide

The installation torque is 0.3 to 0.5 Nm. 14-11-15

JXCx-OMT0005CN

(P.23) 10.1 (P.33) 3.4 (P.16) 11.(P.42) (CN1: EMG 3.(P.12) ) INP ON 10.1 (P.33) (INP PLC ) 5 3.(P.12) PLC (PLC) 2 12.4 (P.50) 11.(P.42) 3.(P.12) 83 - 5.(P.23) 10.1 (P.33) 3.(P.12) PLC (PLC) 2 12.4 (P.50) () () (LED() 3.2 (P.13) ) 11.(P.42) 5 11.(P.42) 11.(P.42) 3.(P.12) (CN1: EMG 3.

EXxx-OMY0006CN

10-11 Bit 7 Ch3/7(3) Table 10-11 58 No.EX##-OMY0006CN 10.7.

Compact Cylinder with Air Cushion

73 55 30 to 100 M FV 80 11 11 99 116 134 20 53.5 77 83.5 63.5 40 to 100 100 11 11 117 136 154 22 53.5 94 98 76 40 to 100 4-FD FT L FX FZ B + Stroke A + Stroke Rod end male threads Rod end nut L1 Rear flange type/RQG, RDQG Rear flange type mm Bore size (mm) Stroke range (mm) L1 L A FV M 33.5 8 63 72 30 to 100 43.5 10 80 84.5 40 to 100 B + Stroke 4-FD 43.5 12 100 99 40 to 100 L FT FX FZ A +